3/11/2010	12:02:48 AM	Run aborted at 12:02 AM
3/11/2010	12:02:48 AM	Helium valve closed
3/11/2010	12:02:48 AM	H2 valve closed
3/11/2010	12:02:48 AM	BCl3 valve closed
3/11/2010	12:02:48 AM	PH3 valve closed
3/11/2010	12:02:48 AM	SiCl4 pre valve closed
3/11/2010	12:02:48 AM	SiCl4 post valve closed
3/11/2010	12:02:48 AM	Bypass valve closed
3/11/2010	12:02:48 AM	Main Vac valve closed
3/11/2010	12:02:48 AM	Bubbler valve closed
3/11/2010	12:02:48 AM	Helium MFC set to  0.000000
3/11/2010	12:02:48 AM	H2 MFC set to  0.000000
3/11/2010	12:02:48 AM	BCl3 MFC set to  0.000000
3/11/2010	12:02:48 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:02:48 AM	Tube furnace set to 0
3/11/2010	12:11:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	12:11:22 AM	Recipe started at 12:11 AM
3/11/2010	12:11:22 AM	Helium valve closed
3/11/2010	12:11:22 AM	H2 valve closed
3/11/2010	12:11:22 AM	BCl3 valve closed
3/11/2010	12:11:22 AM	PH3 valve closed
3/11/2010	12:11:22 AM	SiCl4 pre valve closed
3/11/2010	12:11:22 AM	SiCl4 post valve closed
3/11/2010	12:11:22 AM	Main Vac valve closed
3/11/2010	12:11:22 AM	Bubbler valve closed
3/11/2010	12:11:22 AM	Bypass valve opened
3/11/2010	12:11:22 AM	Helium MFC set to  0.000000
3/11/2010	12:11:22 AM	H2 MFC set to  0.000000
3/11/2010	12:11:22 AM	BCl3 MFC set to  0.000000
3/11/2010	12:11:22 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:11:22 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:11:22 AM	Tube furnace set to 0
3/11/2010	12:11:53 AM	Helium valve closed
3/11/2010	12:11:53 AM	H2 valve closed
3/11/2010	12:11:53 AM	BCl3 valve closed
3/11/2010	12:11:53 AM	PH3 valve closed
3/11/2010	12:11:53 AM	SiCl4 pre valve closed
3/11/2010	12:11:53 AM	SiCl4 post valve closed
3/11/2010	12:11:53 AM	Bubbler valve closed
3/11/2010	12:11:53 AM	Main Vac valve opened
3/11/2010	12:11:53 AM	Bypass valve opened
3/11/2010	12:11:53 AM	Helium MFC set to  0.000000
3/11/2010	12:11:53 AM	H2 MFC set to  0.000000
3/11/2010	12:11:53 AM	BCl3 MFC set to  0.000000
3/11/2010	12:11:53 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:11:53 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:11:53 AM	Tube furnace set to 0
3/11/2010	12:11:53 AM	Run finished at 12:11 AM
3/11/2010	12:11:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	12:14:02 AM	Recipe started at 12:13 AM
3/11/2010	12:14:02 AM	H2 valve closed
3/11/2010	12:14:02 AM	BCl3 valve closed
3/11/2010	12:14:02 AM	PH3 valve closed
3/11/2010	12:14:02 AM	SiCl4 pre valve closed
3/11/2010	12:14:02 AM	SiCl4 post valve closed
3/11/2010	12:14:02 AM	Main Vac valve closed
3/11/2010	12:14:02 AM	Bypass valve closed
3/11/2010	12:14:02 AM	Bubbler valve closed
3/11/2010	12:14:02 AM	Helium valve opened
3/11/2010	12:14:02 AM	Helium MFC set to  500.000000
3/11/2010	12:14:02 AM	H2 MFC set to  0.000000
3/11/2010	12:14:02 AM	BCl3 MFC set to  0.000000
3/11/2010	12:14:02 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:14:02 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:14:02 AM	Tube furnace set to 0
3/11/2010	12:15:22 AM	Helium valve closed
3/11/2010	12:15:22 AM	H2 valve closed
3/11/2010	12:15:22 AM	BCl3 valve closed
3/11/2010	12:15:22 AM	PH3 valve closed
3/11/2010	12:15:22 AM	SiCl4 pre valve closed
3/11/2010	12:15:22 AM	SiCl4 post valve closed
3/11/2010	12:15:22 AM	Main Vac valve closed
3/11/2010	12:15:22 AM	Bypass valve closed
3/11/2010	12:15:22 AM	Bubbler valve closed
3/11/2010	12:15:22 AM	Helium MFC set to  0.000000
3/11/2010	12:15:22 AM	H2 MFC set to  0.000000
3/11/2010	12:15:22 AM	BCl3 MFC set to  0.000000
3/11/2010	12:15:22 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:15:22 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:15:22 AM	Tube furnace set to 0
3/11/2010	12:15:38 AM	Helium valve closed
3/11/2010	12:15:38 AM	H2 valve closed
3/11/2010	12:15:38 AM	BCl3 valve closed
3/11/2010	12:15:38 AM	PH3 valve closed
3/11/2010	12:15:38 AM	SiCl4 pre valve closed
3/11/2010	12:15:38 AM	SiCl4 post valve closed
3/11/2010	12:15:38 AM	Main Vac valve closed
3/11/2010	12:15:38 AM	Bubbler valve closed
3/11/2010	12:15:38 AM	Bypass valve opened
3/11/2010	12:15:38 AM	Helium MFC set to  0.000000
3/11/2010	12:15:38 AM	H2 MFC set to  0.000000
3/11/2010	12:15:38 AM	BCl3 MFC set to  0.000000
3/11/2010	12:15:38 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:15:38 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:15:38 AM	Tube furnace set to 0
3/11/2010	12:15:59 AM	Helium valve closed
3/11/2010	12:15:59 AM	H2 valve closed
3/11/2010	12:15:59 AM	BCl3 valve closed
3/11/2010	12:15:59 AM	PH3 valve closed
3/11/2010	12:15:59 AM	SiCl4 pre valve closed
3/11/2010	12:15:59 AM	SiCl4 post valve closed
3/11/2010	12:15:59 AM	Bubbler valve closed
3/11/2010	12:15:59 AM	Main Vac valve opened
3/11/2010	12:15:59 AM	Bypass valve opened
3/11/2010	12:15:59 AM	Helium MFC set to  0.000000
3/11/2010	12:15:59 AM	H2 MFC set to  0.000000
3/11/2010	12:15:59 AM	BCl3 MFC set to  0.000000
3/11/2010	12:15:59 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:15:59 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:15:59 AM	Tube furnace set to 0
3/11/2010	12:21:00 AM	H2 valve closed
3/11/2010	12:21:00 AM	BCl3 valve closed
3/11/2010	12:21:00 AM	PH3 valve closed
3/11/2010	12:21:00 AM	SiCl4 pre valve closed
3/11/2010	12:21:00 AM	SiCl4 post valve closed
3/11/2010	12:21:00 AM	Main Vac valve closed
3/11/2010	12:21:00 AM	Bypass valve closed
3/11/2010	12:21:00 AM	Bubbler valve closed
3/11/2010	12:21:00 AM	Helium valve opened
3/11/2010	12:21:00 AM	Helium MFC set to  500.000000
3/11/2010	12:21:00 AM	H2 MFC set to  0.000000
3/11/2010	12:21:00 AM	BCl3 MFC set to  0.000000
3/11/2010	12:21:00 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:21:00 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:21:00 AM	Tube furnace set to 0
3/11/2010	12:22:20 AM	Helium valve closed
3/11/2010	12:22:20 AM	H2 valve closed
3/11/2010	12:22:20 AM	BCl3 valve closed
3/11/2010	12:22:20 AM	PH3 valve closed
3/11/2010	12:22:20 AM	SiCl4 pre valve closed
3/11/2010	12:22:20 AM	SiCl4 post valve closed
3/11/2010	12:22:20 AM	Main Vac valve closed
3/11/2010	12:22:20 AM	Bypass valve closed
3/11/2010	12:22:20 AM	Bubbler valve closed
3/11/2010	12:22:20 AM	Helium MFC set to  0.000000
3/11/2010	12:22:20 AM	H2 MFC set to  0.000000
3/11/2010	12:22:20 AM	BCl3 MFC set to  0.000000
3/11/2010	12:22:20 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:22:20 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:22:20 AM	Tube furnace set to 0
3/11/2010	12:22:36 AM	Helium valve closed
3/11/2010	12:22:36 AM	H2 valve closed
3/11/2010	12:22:36 AM	BCl3 valve closed
3/11/2010	12:22:36 AM	PH3 valve closed
3/11/2010	12:22:36 AM	SiCl4 pre valve closed
3/11/2010	12:22:36 AM	SiCl4 post valve closed
3/11/2010	12:22:36 AM	Main Vac valve closed
3/11/2010	12:22:36 AM	Bubbler valve closed
3/11/2010	12:22:36 AM	Bypass valve opened
3/11/2010	12:22:36 AM	Helium MFC set to  0.000000
3/11/2010	12:22:36 AM	H2 MFC set to  0.000000
3/11/2010	12:22:36 AM	BCl3 MFC set to  0.000000
3/11/2010	12:22:36 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:22:36 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:22:36 AM	Tube furnace set to 0
3/11/2010	12:22:57 AM	Helium valve closed
3/11/2010	12:22:57 AM	H2 valve closed
3/11/2010	12:22:57 AM	BCl3 valve closed
3/11/2010	12:22:57 AM	PH3 valve closed
3/11/2010	12:22:57 AM	SiCl4 pre valve closed
3/11/2010	12:22:57 AM	SiCl4 post valve closed
3/11/2010	12:22:57 AM	Bubbler valve closed
3/11/2010	12:22:57 AM	Main Vac valve opened
3/11/2010	12:22:57 AM	Bypass valve opened
3/11/2010	12:22:57 AM	Helium MFC set to  0.000000
3/11/2010	12:22:57 AM	H2 MFC set to  0.000000
3/11/2010	12:22:57 AM	BCl3 MFC set to  0.000000
3/11/2010	12:22:57 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:22:57 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:22:57 AM	Tube furnace set to 0
3/11/2010	12:27:58 AM	H2 valve closed
3/11/2010	12:27:58 AM	BCl3 valve closed
3/11/2010	12:27:58 AM	PH3 valve closed
3/11/2010	12:27:58 AM	SiCl4 pre valve closed
3/11/2010	12:27:58 AM	SiCl4 post valve closed
3/11/2010	12:27:58 AM	Main Vac valve closed
3/11/2010	12:27:58 AM	Bypass valve closed
3/11/2010	12:27:58 AM	Bubbler valve closed
3/11/2010	12:27:58 AM	Helium valve opened
3/11/2010	12:27:58 AM	Helium MFC set to  500.000000
3/11/2010	12:27:58 AM	H2 MFC set to  0.000000
3/11/2010	12:27:58 AM	BCl3 MFC set to  0.000000
3/11/2010	12:27:58 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:27:58 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:27:58 AM	Tube furnace set to 0
3/11/2010	12:29:19 AM	Helium valve closed
3/11/2010	12:29:19 AM	H2 valve closed
3/11/2010	12:29:19 AM	BCl3 valve closed
3/11/2010	12:29:19 AM	PH3 valve closed
3/11/2010	12:29:19 AM	SiCl4 pre valve closed
3/11/2010	12:29:19 AM	SiCl4 post valve closed
3/11/2010	12:29:19 AM	Main Vac valve closed
3/11/2010	12:29:19 AM	Bypass valve closed
3/11/2010	12:29:19 AM	Bubbler valve closed
3/11/2010	12:29:19 AM	Helium MFC set to  0.000000
3/11/2010	12:29:19 AM	H2 MFC set to  0.000000
3/11/2010	12:29:19 AM	BCl3 MFC set to  0.000000
3/11/2010	12:29:19 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:29:19 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:29:19 AM	Tube furnace set to 0
3/11/2010	12:29:34 AM	Helium valve closed
3/11/2010	12:29:34 AM	H2 valve closed
3/11/2010	12:29:34 AM	BCl3 valve closed
3/11/2010	12:29:34 AM	PH3 valve closed
3/11/2010	12:29:34 AM	SiCl4 pre valve closed
3/11/2010	12:29:34 AM	SiCl4 post valve closed
3/11/2010	12:29:34 AM	Main Vac valve closed
3/11/2010	12:29:34 AM	Bubbler valve closed
3/11/2010	12:29:34 AM	Bypass valve opened
3/11/2010	12:29:34 AM	Helium MFC set to  0.000000
3/11/2010	12:29:34 AM	H2 MFC set to  0.000000
3/11/2010	12:29:34 AM	BCl3 MFC set to  0.000000
3/11/2010	12:29:34 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:29:34 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:29:34 AM	Tube furnace set to 0
3/11/2010	12:29:56 AM	Helium valve closed
3/11/2010	12:29:56 AM	H2 valve closed
3/11/2010	12:29:56 AM	BCl3 valve closed
3/11/2010	12:29:56 AM	PH3 valve closed
3/11/2010	12:29:56 AM	SiCl4 pre valve closed
3/11/2010	12:29:56 AM	SiCl4 post valve closed
3/11/2010	12:29:56 AM	Bubbler valve closed
3/11/2010	12:29:56 AM	Main Vac valve opened
3/11/2010	12:29:56 AM	Bypass valve opened
3/11/2010	12:29:56 AM	Helium MFC set to  0.000000
3/11/2010	12:29:56 AM	H2 MFC set to  0.000000
3/11/2010	12:29:56 AM	BCl3 MFC set to  0.000000
3/11/2010	12:29:56 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:29:56 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:29:56 AM	Tube furnace set to 0
3/11/2010	12:34:00 AM	Run aborted at 12:34 AM
3/11/2010	12:34:00 AM	Helium valve closed
3/11/2010	12:34:00 AM	H2 valve closed
3/11/2010	12:34:00 AM	BCl3 valve closed
3/11/2010	12:34:00 AM	PH3 valve closed
3/11/2010	12:34:00 AM	SiCl4 pre valve closed
3/11/2010	12:34:00 AM	SiCl4 post valve closed
3/11/2010	12:34:00 AM	Bypass valve closed
3/11/2010	12:34:00 AM	Main Vac valve closed
3/11/2010	12:34:00 AM	Bubbler valve closed
3/11/2010	12:34:00 AM	Helium MFC set to  0.000000
3/11/2010	12:34:00 AM	H2 MFC set to  0.000000
3/11/2010	12:34:00 AM	BCl3 MFC set to  0.000000
3/11/2010	12:34:00 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:34:00 AM	Tube furnace set to 0
3/11/2010	12:34:14 AM	Bypass valve closed
3/11/2010	12:34:16 AM	Main Vac valve closed
3/11/2010	12:34:17 AM	Bypass valve opened
3/11/2010	12:34:24 AM	Main Vac valve opened
3/11/2010	12:34:38 AM	Main Vac valve closed
3/11/2010	12:34:40 AM	Bypass valve closed
3/11/2010	12:34:56 AM	Main Vac valve opened
3/11/2010	12:34:57 AM	Bypass valve opened
3/11/2010	12:36:43 AM	Recipe started at 12:36 AM
3/11/2010	12:36:43 AM	Helium valve closed
3/11/2010	12:36:43 AM	BCl3 valve closed
3/11/2010	12:36:43 AM	PH3 valve closed
3/11/2010	12:36:43 AM	SiCl4 pre valve closed
3/11/2010	12:36:43 AM	SiCl4 post valve closed
3/11/2010	12:36:43 AM	Main Vac valve closed
3/11/2010	12:36:43 AM	Bypass valve closed
3/11/2010	12:36:43 AM	Bubbler valve closed
3/11/2010	12:36:43 AM	H2 valve opened
3/11/2010	12:36:43 AM	Helium MFC set to  0.000000
3/11/2010	12:36:43 AM	H2 MFC set to  500.000000
3/11/2010	12:36:43 AM	BCl3 MFC set to  0.000000
3/11/2010	12:36:43 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:36:43 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:36:43 AM	Tube furnace set to 0
3/11/2010	12:38:03 AM	Helium valve closed
3/11/2010	12:38:03 AM	BCl3 valve closed
3/11/2010	12:38:03 AM	PH3 valve closed
3/11/2010	12:38:03 AM	SiCl4 pre valve closed
3/11/2010	12:38:03 AM	SiCl4 post valve closed
3/11/2010	12:38:03 AM	Main Vac valve closed
3/11/2010	12:38:03 AM	Bypass valve closed
3/11/2010	12:38:03 AM	H2 valve opened
3/11/2010	12:38:03 AM	Bubbler valve opened
3/11/2010	12:38:04 AM	Helium MFC set to  0.000000
3/11/2010	12:38:04 AM	H2 MFC set to  500.000000
3/11/2010	12:38:04 AM	BCl3 MFC set to  0.000000
3/11/2010	12:38:04 AM	SiCl4 MFC set to  0.000000
3/11/2010	12:38:04 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:38:04 AM	Tube furnace set to 0
3/11/2010	12:58:04 AM	Helium valve closed
3/11/2010	12:58:04 AM	BCl3 valve closed
3/11/2010	12:58:04 AM	PH3 valve closed
3/11/2010	12:58:04 AM	Main Vac valve closed
3/11/2010	12:58:04 AM	Bypass valve closed
3/11/2010	12:58:04 AM	H2 valve opened
3/11/2010	12:58:04 AM	SiCl4 pre valve opened
3/11/2010	12:58:04 AM	SiCl4 post valve opened
3/11/2010	12:58:04 AM	Bubbler valve opened
3/11/2010	12:58:04 AM	Helium MFC set to  0.000000
3/11/2010	12:58:04 AM	H2 MFC set to  500.000000
3/11/2010	12:58:04 AM	BCl3 MFC set to  0.000000
3/11/2010	12:58:04 AM	SiCl4 MFC set to  325.000000
3/11/2010	12:58:04 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:58:04 AM	Tube furnace set to 0
3/11/2010	1:13:04 AM	Helium valve closed
3/11/2010	1:13:04 AM	BCl3 valve closed
3/11/2010	1:13:04 AM	PH3 valve closed
3/11/2010	1:13:04 AM	SiCl4 pre valve closed
3/11/2010	1:13:04 AM	SiCl4 post valve closed
3/11/2010	1:13:04 AM	Main Vac valve closed
3/11/2010	1:13:04 AM	Bypass valve closed
3/11/2010	1:13:04 AM	H2 valve opened
3/11/2010	1:13:04 AM	Bubbler valve opened
3/11/2010	1:13:04 AM	Helium MFC set to  0.000000
3/11/2010	1:13:04 AM	H2 MFC set to  500.000000
3/11/2010	1:13:04 AM	BCl3 MFC set to  0.000000
3/11/2010	1:13:04 AM	SiCl4 MFC set to  0.000000
3/11/2010	1:13:04 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	1:13:04 AM	Tube furnace set to 0
3/11/2010	1:33:05 AM	H2 valve closed
3/11/2010	1:33:05 AM	BCl3 valve closed
3/11/2010	1:33:05 AM	PH3 valve closed
3/11/2010	1:33:05 AM	SiCl4 pre valve closed
3/11/2010	1:33:05 AM	SiCl4 post valve closed
3/11/2010	1:33:05 AM	Main Vac valve closed
3/11/2010	1:33:05 AM	Bypass valve closed
3/11/2010	1:33:05 AM	Helium valve opened
3/11/2010	1:33:05 AM	Bubbler valve opened
3/11/2010	1:33:05 AM	Helium MFC set to  500.000000
3/11/2010	1:33:05 AM	H2 MFC set to  0.000000
3/11/2010	1:33:05 AM	BCl3 MFC set to  0.000000
3/11/2010	1:33:05 AM	SiCl4 MFC set to  0.000000
3/11/2010	1:33:05 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	1:33:05 AM	Tube furnace set to 0
3/11/2010	1:47:28 AM	Run aborted at 1:47 AM
3/11/2010	1:47:28 AM	Helium valve closed
3/11/2010	1:47:28 AM	H2 valve closed
3/11/2010	1:47:28 AM	BCl3 valve closed
3/11/2010	1:47:28 AM	PH3 valve closed
3/11/2010	1:47:28 AM	SiCl4 pre valve closed
3/11/2010	1:47:28 AM	SiCl4 post valve closed
3/11/2010	1:47:28 AM	Bypass valve closed
3/11/2010	1:47:28 AM	Main Vac valve closed
3/11/2010	1:47:28 AM	Bubbler valve closed
3/11/2010	1:47:28 AM	Helium MFC set to  0.000000
3/11/2010	1:47:28 AM	H2 MFC set to  0.000000
3/11/2010	1:47:28 AM	BCl3 MFC set to  0.000000
3/11/2010	1:47:28 AM	SiCl4 MFC set to  0.000000
3/11/2010	1:47:28 AM	Tube furnace set to 0
3/11/2010	1:57:58 AM	Recipe started at 1:57 AM
3/11/2010	1:57:58 AM	H2 valve closed
3/11/2010	1:57:58 AM	BCl3 valve closed
3/11/2010	1:57:58 AM	PH3 valve closed
3/11/2010	1:57:58 AM	SiCl4 pre valve closed
3/11/2010	1:57:58 AM	SiCl4 post valve closed
3/11/2010	1:57:58 AM	Main Vac valve closed
3/11/2010	1:57:58 AM	Bypass valve closed
3/11/2010	1:57:58 AM	Bubbler valve closed
3/11/2010	1:57:58 AM	Helium valve opened
3/11/2010	1:57:58 AM	Helium MFC set to  500.000000
3/11/2010	1:57:58 AM	H2 MFC set to  0.000000
3/11/2010	1:57:58 AM	BCl3 MFC set to  0.000000
3/11/2010	1:57:58 AM	SiCl4 MFC set to  0.000000
3/11/2010	1:57:58 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	1:57:58 AM	Tube furnace set to 0
3/11/2010	1:58:00 AM	Helium valve closed
3/11/2010	1:58:00 AM	H2 valve closed
3/11/2010	1:58:00 AM	BCl3 valve closed
3/11/2010	1:58:00 AM	PH3 valve closed
3/11/2010	1:58:00 AM	SiCl4 pre valve closed
3/11/2010	1:58:00 AM	SiCl4 post valve closed
3/11/2010	1:58:00 AM	Main Vac valve closed
3/11/2010	1:58:00 AM	Bypass valve closed
3/11/2010	1:58:00 AM	Bubbler valve closed
3/11/2010	1:58:00 AM	Helium MFC set to  0.000000
3/11/2010	1:58:00 AM	H2 MFC set to  0.000000
3/11/2010	1:58:00 AM	BCl3 MFC set to  0.000000
3/11/2010	1:58:00 AM	SiCl4 MFC set to  0.000000
3/11/2010	1:58:00 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	1:58:00 AM	Tube furnace set to 0
3/11/2010	1:58:16 AM	Helium valve closed
3/11/2010	1:58:16 AM	H2 valve closed
3/11/2010	1:58:16 AM	BCl3 valve closed
3/11/2010	1:58:16 AM	PH3 valve closed
3/11/2010	1:58:16 AM	SiCl4 pre valve closed
3/11/2010	1:58:16 AM	SiCl4 post valve closed
3/11/2010	1:58:16 AM	Main Vac valve closed
3/11/2010	1:58:16 AM	Bubbler valve closed
3/11/2010	1:58:16 AM	Bypass valve opened
3/11/2010	1:58:16 AM	Helium MFC set to  0.000000
3/11/2010	1:58:16 AM	H2 MFC set to  0.000000
3/11/2010	1:58:16 AM	BCl3 MFC set to  0.000000
3/11/2010	1:58:16 AM	SiCl4 MFC set to  0.000000
3/11/2010	1:58:16 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	1:58:16 AM	Tube furnace set to 0
3/11/2010	1:58:46 AM	Helium valve closed
3/11/2010	1:58:46 AM	H2 valve closed
3/11/2010	1:58:46 AM	BCl3 valve closed
3/11/2010	1:58:46 AM	PH3 valve closed
3/11/2010	1:58:46 AM	SiCl4 pre valve closed
3/11/2010	1:58:46 AM	SiCl4 post valve closed
3/11/2010	1:58:46 AM	Bubbler valve closed
3/11/2010	1:58:46 AM	Main Vac valve opened
3/11/2010	1:58:46 AM	Bypass valve opened
3/11/2010	1:58:46 AM	Helium MFC set to  0.000000
3/11/2010	1:58:46 AM	H2 MFC set to  0.000000
3/11/2010	1:58:46 AM	BCl3 MFC set to  0.000000
3/11/2010	1:58:46 AM	SiCl4 MFC set to  0.000000
3/11/2010	1:58:46 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	1:58:46 AM	Tube furnace set to 0
3/11/2010	2:03:47 AM	H2 valve closed
3/11/2010	2:03:47 AM	BCl3 valve closed
3/11/2010	2:03:47 AM	PH3 valve closed
3/11/2010	2:03:47 AM	SiCl4 pre valve closed
3/11/2010	2:03:47 AM	SiCl4 post valve closed
3/11/2010	2:03:47 AM	Main Vac valve closed
3/11/2010	2:03:47 AM	Bypass valve closed
3/11/2010	2:03:47 AM	Bubbler valve closed
3/11/2010	2:03:47 AM	Helium valve opened
3/11/2010	2:03:47 AM	Helium MFC set to  500.000000
3/11/2010	2:03:47 AM	H2 MFC set to  0.000000
3/11/2010	2:03:47 AM	BCl3 MFC set to  0.000000
3/11/2010	2:03:47 AM	SiCl4 MFC set to  0.000000
3/11/2010	2:03:47 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:03:47 AM	Tube furnace set to 0
3/11/2010	2:05:08 AM	Helium valve closed
3/11/2010	2:05:08 AM	H2 valve closed
3/11/2010	2:05:08 AM	BCl3 valve closed
3/11/2010	2:05:08 AM	PH3 valve closed
3/11/2010	2:05:08 AM	SiCl4 pre valve closed
3/11/2010	2:05:08 AM	SiCl4 post valve closed
3/11/2010	2:05:08 AM	Main Vac valve closed
3/11/2010	2:05:08 AM	Bypass valve closed
3/11/2010	2:05:08 AM	Bubbler valve closed
3/11/2010	2:05:08 AM	Helium MFC set to  0.000000
3/11/2010	2:05:08 AM	H2 MFC set to  0.000000
3/11/2010	2:05:08 AM	BCl3 MFC set to  0.000000
3/11/2010	2:05:08 AM	SiCl4 MFC set to  0.000000
3/11/2010	2:05:08 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:05:08 AM	Tube furnace set to 0
3/11/2010	2:05:23 AM	Helium valve closed
3/11/2010	2:05:23 AM	H2 valve closed
3/11/2010	2:05:23 AM	BCl3 valve closed
3/11/2010	2:05:23 AM	PH3 valve closed
3/11/2010	2:05:23 AM	SiCl4 pre valve closed
3/11/2010	2:05:23 AM	SiCl4 post valve closed
3/11/2010	2:05:23 AM	Main Vac valve closed
3/11/2010	2:05:23 AM	Bubbler valve closed
3/11/2010	2:05:23 AM	Bypass valve opened
3/11/2010	2:05:23 AM	Helium MFC set to  0.000000
3/11/2010	2:05:23 AM	H2 MFC set to  0.000000
3/11/2010	2:05:23 AM	BCl3 MFC set to  0.000000
3/11/2010	2:05:23 AM	SiCl4 MFC set to  0.000000
3/11/2010	2:05:23 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:05:23 AM	Tube furnace set to 0
3/11/2010	2:05:45 AM	Helium valve closed
3/11/2010	2:05:45 AM	H2 valve closed
3/11/2010	2:05:45 AM	BCl3 valve closed
3/11/2010	2:05:45 AM	PH3 valve closed
3/11/2010	2:05:45 AM	SiCl4 pre valve closed
3/11/2010	2:05:45 AM	SiCl4 post valve closed
3/11/2010	2:05:45 AM	Bubbler valve closed
3/11/2010	2:05:45 AM	Main Vac valve opened
3/11/2010	2:05:45 AM	Bypass valve opened
3/11/2010	2:05:45 AM	Helium MFC set to  0.000000
3/11/2010	2:05:45 AM	H2 MFC set to  0.000000
3/11/2010	2:05:45 AM	BCl3 MFC set to  0.000000
3/11/2010	2:05:45 AM	SiCl4 MFC set to  0.000000
3/11/2010	2:05:45 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:05:45 AM	Tube furnace set to 0
3/11/2010	2:10:45 AM	H2 valve closed
3/11/2010	2:10:45 AM	BCl3 valve closed
3/11/2010	2:10:45 AM	PH3 valve closed
3/11/2010	2:10:45 AM	SiCl4 pre valve closed
3/11/2010	2:10:45 AM	SiCl4 post valve closed
3/11/2010	2:10:45 AM	Main Vac valve closed
3/11/2010	2:10:45 AM	Bypass valve closed
3/11/2010	2:10:45 AM	Bubbler valve closed
3/11/2010	2:10:45 AM	Helium valve opened
3/11/2010	2:10:45 AM	Helium MFC set to  500.000000
3/11/2010	2:10:45 AM	H2 MFC set to  0.000000
3/11/2010	2:10:45 AM	BCl3 MFC set to  0.000000
3/11/2010	2:10:45 AM	SiCl4 MFC set to  0.000000
3/11/2010	2:10:45 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:10:45 AM	Tube furnace set to 0
3/11/2010	2:12:07 AM	Helium valve closed
3/11/2010	2:12:07 AM	H2 valve closed
3/11/2010	2:12:07 AM	BCl3 valve closed
3/11/2010	2:12:07 AM	PH3 valve closed
3/11/2010	2:12:07 AM	SiCl4 pre valve closed
3/11/2010	2:12:07 AM	SiCl4 post valve closed
3/11/2010	2:12:07 AM	Main Vac valve closed
3/11/2010	2:12:07 AM	Bypass valve closed
3/11/2010	2:12:07 AM	Bubbler valve closed
3/11/2010	2:12:07 AM	Helium MFC set to  0.000000
3/11/2010	2:12:07 AM	H2 MFC set to  0.000000
3/11/2010	2:12:07 AM	BCl3 MFC set to  0.000000
3/11/2010	2:12:07 AM	SiCl4 MFC set to  0.000000
3/11/2010	2:12:07 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:12:07 AM	Tube furnace set to 0
3/11/2010	2:12:22 AM	Helium valve closed
3/11/2010	2:12:22 AM	H2 valve closed
3/11/2010	2:12:22 AM	BCl3 valve closed
3/11/2010	2:12:22 AM	PH3 valve closed
3/11/2010	2:12:22 AM	SiCl4 pre valve closed
3/11/2010	2:12:22 AM	SiCl4 post valve closed
3/11/2010	2:12:22 AM	Main Vac valve closed
3/11/2010	2:12:22 AM	Bubbler valve closed
3/11/2010	2:12:22 AM	Bypass valve opened
3/11/2010	2:12:22 AM	Helium MFC set to  0.000000
3/11/2010	2:12:22 AM	H2 MFC set to  0.000000
3/11/2010	2:12:22 AM	BCl3 MFC set to  0.000000
3/11/2010	2:12:22 AM	SiCl4 MFC set to  0.000000
3/11/2010	2:12:22 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:12:22 AM	Tube furnace set to 0
3/11/2010	2:12:44 AM	Helium valve closed
3/11/2010	2:12:44 AM	H2 valve closed
3/11/2010	2:12:44 AM	BCl3 valve closed
3/11/2010	2:12:44 AM	PH3 valve closed
3/11/2010	2:12:44 AM	SiCl4 pre valve closed
3/11/2010	2:12:44 AM	SiCl4 post valve closed
3/11/2010	2:12:44 AM	Bubbler valve closed
3/11/2010	2:12:44 AM	Main Vac valve opened
3/11/2010	2:12:44 AM	Bypass valve opened
3/11/2010	2:12:44 AM	Helium MFC set to  0.000000
3/11/2010	2:12:44 AM	H2 MFC set to  0.000000
3/11/2010	2:12:44 AM	BCl3 MFC set to  0.000000
3/11/2010	2:12:44 AM	SiCl4 MFC set to  0.000000
3/11/2010	2:12:44 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:12:44 AM	Tube furnace set to 0
3/11/2010	2:17:44 AM	Helium valve closed
3/11/2010	2:17:44 AM	H2 valve closed
3/11/2010	2:17:44 AM	BCl3 valve closed
3/11/2010	2:17:44 AM	PH3 valve closed
3/11/2010	2:17:44 AM	SiCl4 pre valve closed
3/11/2010	2:17:44 AM	SiCl4 post valve closed
3/11/2010	2:17:44 AM	Bubbler valve closed
3/11/2010	2:17:44 AM	Main Vac valve opened
3/11/2010	2:17:44 AM	Bypass valve opened
3/11/2010	2:17:44 AM	Helium MFC set to  0.000000
3/11/2010	2:17:44 AM	H2 MFC set to  0.000000
3/11/2010	2:17:44 AM	BCl3 MFC set to  0.000000
3/11/2010	2:17:44 AM	SiCl4 MFC set to  0.000000
3/11/2010	2:17:44 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:17:44 AM	Tube furnace set to 0
3/11/2010	2:17:45 AM	Run finished at 2:17 AM
3/11/2010	2:24:32 AM	Main Vac valve closed
3/11/2010	2:24:34 AM	Bypass valve closed
3/11/2010	2:24:49 AM	Bypass valve opened
3/11/2010	2:24:50 AM	Main Vac valve opened
3/11/2010	2:25:52 AM	Recipe started at 2:25 AM
3/11/2010	2:25:52 AM	Helium valve closed
3/11/2010	2:25:52 AM	BCl3 valve closed
3/11/2010	2:25:52 AM	PH3 valve closed
3/11/2010	2:25:52 AM	SiCl4 pre valve closed
3/11/2010	2:25:52 AM	SiCl4 post valve closed
3/11/2010	2:25:52 AM	Main Vac valve closed
3/11/2010	2:25:52 AM	Bypass valve closed
3/11/2010	2:25:52 AM	Bubbler valve closed
3/11/2010	2:25:52 AM	H2 valve opened
3/11/2010	2:25:52 AM	Helium MFC set to  0.000000
3/11/2010	2:25:52 AM	H2 MFC set to  500.000000
3/11/2010	2:25:52 AM	BCl3 MFC set to  0.000000
3/11/2010	2:25:52 AM	SiCl4 MFC set to  0.000000
3/11/2010	2:25:52 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:25:52 AM	Tube furnace set to 0
3/11/2010	2:27:13 AM	Helium valve closed
3/11/2010	2:27:13 AM	BCl3 valve closed
3/11/2010	2:27:13 AM	PH3 valve closed
3/11/2010	2:27:13 AM	SiCl4 pre valve closed
3/11/2010	2:27:13 AM	SiCl4 post valve closed
3/11/2010	2:27:13 AM	Main Vac valve closed
3/11/2010	2:27:13 AM	Bypass valve closed
3/11/2010	2:27:13 AM	H2 valve opened
3/11/2010	2:27:13 AM	Bubbler valve opened
3/11/2010	2:27:13 AM	Helium MFC set to  0.000000
3/11/2010	2:27:13 AM	H2 MFC set to  500.000000
3/11/2010	2:27:13 AM	BCl3 MFC set to  0.000000
3/11/2010	2:27:13 AM	SiCl4 MFC set to  0.000000
3/11/2010	2:27:13 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:27:13 AM	Tube furnace set to 0
3/11/2010	2:47:13 AM	Helium valve closed
3/11/2010	2:47:13 AM	BCl3 valve closed
3/11/2010	2:47:13 AM	PH3 valve closed
3/11/2010	2:47:13 AM	Main Vac valve closed
3/11/2010	2:47:13 AM	Bypass valve closed
3/11/2010	2:47:13 AM	H2 valve opened
3/11/2010	2:47:13 AM	SiCl4 pre valve opened
3/11/2010	2:47:13 AM	SiCl4 post valve opened
3/11/2010	2:47:13 AM	Bubbler valve opened
3/11/2010	2:47:13 AM	Helium MFC set to  0.000000
3/11/2010	2:47:13 AM	H2 MFC set to  500.000000
3/11/2010	2:47:13 AM	BCl3 MFC set to  0.000000
3/11/2010	2:47:13 AM	SiCl4 MFC set to  325.000000
3/11/2010	2:47:13 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:47:13 AM	Tube furnace set to 0
3/11/2010	3:02:13 AM	Helium valve closed
3/11/2010	3:02:13 AM	BCl3 valve closed
3/11/2010	3:02:13 AM	PH3 valve closed
3/11/2010	3:02:13 AM	SiCl4 pre valve closed
3/11/2010	3:02:13 AM	SiCl4 post valve closed
3/11/2010	3:02:13 AM	Main Vac valve closed
3/11/2010	3:02:13 AM	Bypass valve closed
3/11/2010	3:02:13 AM	H2 valve opened
3/11/2010	3:02:13 AM	Bubbler valve opened
3/11/2010	3:02:13 AM	Helium MFC set to  0.000000
3/11/2010	3:02:13 AM	H2 MFC set to  500.000000
3/11/2010	3:02:13 AM	BCl3 MFC set to  0.000000
3/11/2010	3:02:13 AM	SiCl4 MFC set to  0.000000
3/11/2010	3:02:13 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:02:13 AM	Tube furnace set to 0
3/11/2010	3:17:44 AM	H2 valve closed
3/11/2010	3:17:44 AM	BCl3 valve closed
3/11/2010	3:17:44 AM	PH3 valve closed
3/11/2010	3:17:44 AM	SiCl4 pre valve closed
3/11/2010	3:17:44 AM	SiCl4 post valve closed
3/11/2010	3:17:44 AM	Main Vac valve closed
3/11/2010	3:17:44 AM	Bypass valve closed
3/11/2010	3:17:44 AM	Helium valve opened
3/11/2010	3:17:44 AM	Bubbler valve opened
3/11/2010	3:17:44 AM	Helium MFC set to  500.000000
3/11/2010	3:17:44 AM	H2 MFC set to  0.000000
3/11/2010	3:17:44 AM	BCl3 MFC set to  0.000000
3/11/2010	3:17:44 AM	SiCl4 MFC set to  0.000000
3/11/2010	3:17:44 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:17:44 AM	Tube furnace set to 0
3/11/2010	3:24:35 AM	Run aborted at 3:24 AM
3/11/2010	3:24:35 AM	Helium valve closed
3/11/2010	3:24:35 AM	H2 valve closed
3/11/2010	3:24:35 AM	BCl3 valve closed
3/11/2010	3:24:35 AM	PH3 valve closed
3/11/2010	3:24:35 AM	SiCl4 pre valve closed
3/11/2010	3:24:35 AM	SiCl4 post valve closed
3/11/2010	3:24:35 AM	Bypass valve closed
3/11/2010	3:24:35 AM	Main Vac valve closed
3/11/2010	3:24:35 AM	Bubbler valve closed
3/11/2010	3:24:35 AM	Helium MFC set to  0.000000
3/11/2010	3:24:35 AM	H2 MFC set to  0.000000
3/11/2010	3:24:35 AM	BCl3 MFC set to  0.000000
3/11/2010	3:24:35 AM	SiCl4 MFC set to  0.000000
3/11/2010	3:24:35 AM	Tube furnace set to 0
3/11/2010	3:29:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	3:29:32 AM	Recipe started at 3:29 AM
3/11/2010	3:29:32 AM	Helium valve closed
3/11/2010	3:29:32 AM	H2 valve closed
3/11/2010	3:29:32 AM	BCl3 valve closed
3/11/2010	3:29:32 AM	PH3 valve closed
3/11/2010	3:29:32 AM	SiCl4 pre valve closed
3/11/2010	3:29:32 AM	SiCl4 post valve closed
3/11/2010	3:29:32 AM	Main Vac valve closed
3/11/2010	3:29:32 AM	Bubbler valve closed
3/11/2010	3:29:32 AM	Bypass valve opened
3/11/2010	3:29:32 AM	Helium MFC set to  0.000000
3/11/2010	3:29:32 AM	H2 MFC set to  0.000000
3/11/2010	3:29:32 AM	BCl3 MFC set to  0.000000
3/11/2010	3:29:32 AM	SiCl4 MFC set to  0.000000
3/11/2010	3:29:32 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:29:32 AM	Tube furnace set to 0
3/11/2010	3:30:00 AM	Helium valve closed
3/11/2010	3:30:00 AM	H2 valve closed
3/11/2010	3:30:00 AM	BCl3 valve closed
3/11/2010	3:30:00 AM	PH3 valve closed
3/11/2010	3:30:00 AM	SiCl4 pre valve closed
3/11/2010	3:30:00 AM	SiCl4 post valve closed
3/11/2010	3:30:00 AM	Bubbler valve closed
3/11/2010	3:30:00 AM	Main Vac valve opened
3/11/2010	3:30:00 AM	Bypass valve opened
3/11/2010	3:30:00 AM	Helium MFC set to  0.000000
3/11/2010	3:30:00 AM	H2 MFC set to  0.000000
3/11/2010	3:30:00 AM	BCl3 MFC set to  0.000000
3/11/2010	3:30:00 AM	SiCl4 MFC set to  0.000000
3/11/2010	3:30:00 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:30:00 AM	Tube furnace set to 0
3/11/2010	3:30:00 AM	Run finished at 3:30 AM
3/11/2010	3:30:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	9:07:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	9:07:15 AM	Recipe started at 9:07 AM
3/11/2010	9:07:15 AM	H2 valve closed
3/11/2010	9:07:15 AM	BCl3 valve closed
3/11/2010	9:07:15 AM	PH3 valve closed
3/11/2010	9:07:15 AM	SiCl4 pre valve closed
3/11/2010	9:07:15 AM	SiCl4 post valve closed
3/11/2010	9:07:15 AM	Main Vac valve closed
3/11/2010	9:07:15 AM	Bypass valve closed
3/11/2010	9:07:15 AM	Bubbler valve closed
3/11/2010	9:07:15 AM	Helium valve opened
3/11/2010	9:07:15 AM	Helium MFC set to  500.000000
3/11/2010	9:07:15 AM	H2 MFC set to  0.000000
3/11/2010	9:07:15 AM	BCl3 MFC set to  0.000000
3/11/2010	9:07:15 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:07:15 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:07:15 AM	Tube furnace set to 0
3/11/2010	9:08:36 AM	Helium valve closed
3/11/2010	9:08:36 AM	H2 valve closed
3/11/2010	9:08:36 AM	BCl3 valve closed
3/11/2010	9:08:36 AM	PH3 valve closed
3/11/2010	9:08:36 AM	SiCl4 pre valve closed
3/11/2010	9:08:36 AM	SiCl4 post valve closed
3/11/2010	9:08:36 AM	Main Vac valve closed
3/11/2010	9:08:36 AM	Bypass valve closed
3/11/2010	9:08:36 AM	Bubbler valve closed
3/11/2010	9:08:36 AM	Helium MFC set to  0.000000
3/11/2010	9:08:36 AM	H2 MFC set to  0.000000
3/11/2010	9:08:36 AM	BCl3 MFC set to  0.000000
3/11/2010	9:08:36 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:08:36 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:08:36 AM	Tube furnace set to 0
3/11/2010	9:08:36 AM	Run finished at 9:08 AM
3/11/2010	9:08:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	9:17:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	9:17:12 AM	Recipe started at 9:17 AM
3/11/2010	9:17:12 AM	Helium valve closed
3/11/2010	9:17:12 AM	H2 valve closed
3/11/2010	9:17:12 AM	BCl3 valve closed
3/11/2010	9:17:12 AM	PH3 valve closed
3/11/2010	9:17:12 AM	SiCl4 pre valve closed
3/11/2010	9:17:12 AM	SiCl4 post valve closed
3/11/2010	9:17:12 AM	Main Vac valve closed
3/11/2010	9:17:12 AM	Bubbler valve closed
3/11/2010	9:17:12 AM	Bypass valve opened
3/11/2010	9:17:12 AM	Helium MFC set to  0.000000
3/11/2010	9:17:12 AM	H2 MFC set to  0.000000
3/11/2010	9:17:12 AM	BCl3 MFC set to  0.000000
3/11/2010	9:17:12 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:17:12 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:17:12 AM	Tube furnace set to 0
3/11/2010	9:17:43 AM	Helium valve closed
3/11/2010	9:17:43 AM	H2 valve closed
3/11/2010	9:17:43 AM	BCl3 valve closed
3/11/2010	9:17:43 AM	PH3 valve closed
3/11/2010	9:17:43 AM	SiCl4 pre valve closed
3/11/2010	9:17:43 AM	SiCl4 post valve closed
3/11/2010	9:17:43 AM	Bubbler valve closed
3/11/2010	9:17:43 AM	Main Vac valve opened
3/11/2010	9:17:43 AM	Bypass valve opened
3/11/2010	9:17:43 AM	Helium MFC set to  0.000000
3/11/2010	9:17:43 AM	H2 MFC set to  0.000000
3/11/2010	9:17:43 AM	BCl3 MFC set to  0.000000
3/11/2010	9:17:43 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:17:43 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:17:43 AM	Tube furnace set to 0
3/11/2010	9:17:43 AM	Run finished at 9:17 AM
3/11/2010	9:17:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	9:25:36 AM	Recipe started at 9:25 AM
3/11/2010	9:25:36 AM	H2 valve closed
3/11/2010	9:25:36 AM	BCl3 valve closed
3/11/2010	9:25:36 AM	PH3 valve closed
3/11/2010	9:25:36 AM	SiCl4 pre valve closed
3/11/2010	9:25:36 AM	SiCl4 post valve closed
3/11/2010	9:25:36 AM	Main Vac valve closed
3/11/2010	9:25:36 AM	Bypass valve closed
3/11/2010	9:25:36 AM	Bubbler valve closed
3/11/2010	9:25:36 AM	Helium valve opened
3/11/2010	9:25:36 AM	Helium MFC set to  500.000000
3/11/2010	9:25:36 AM	H2 MFC set to  0.000000
3/11/2010	9:25:36 AM	BCl3 MFC set to  0.000000
3/11/2010	9:25:36 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:25:36 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:25:36 AM	Tube furnace set to 0
3/11/2010	9:27:00 AM	Helium valve closed
3/11/2010	9:27:00 AM	H2 valve closed
3/11/2010	9:27:00 AM	BCl3 valve closed
3/11/2010	9:27:00 AM	PH3 valve closed
3/11/2010	9:27:00 AM	SiCl4 pre valve closed
3/11/2010	9:27:00 AM	SiCl4 post valve closed
3/11/2010	9:27:00 AM	Main Vac valve closed
3/11/2010	9:27:00 AM	Bypass valve closed
3/11/2010	9:27:00 AM	Bubbler valve closed
3/11/2010	9:27:00 AM	Helium MFC set to  0.000000
3/11/2010	9:27:00 AM	H2 MFC set to  0.000000
3/11/2010	9:27:00 AM	BCl3 MFC set to  0.000000
3/11/2010	9:27:00 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:27:00 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:27:00 AM	Tube furnace set to 0
3/11/2010	9:27:15 AM	Helium valve closed
3/11/2010	9:27:15 AM	H2 valve closed
3/11/2010	9:27:15 AM	BCl3 valve closed
3/11/2010	9:27:15 AM	PH3 valve closed
3/11/2010	9:27:15 AM	SiCl4 pre valve closed
3/11/2010	9:27:15 AM	SiCl4 post valve closed
3/11/2010	9:27:15 AM	Main Vac valve closed
3/11/2010	9:27:15 AM	Bubbler valve closed
3/11/2010	9:27:15 AM	Bypass valve opened
3/11/2010	9:27:15 AM	Helium MFC set to  0.000000
3/11/2010	9:27:15 AM	H2 MFC set to  0.000000
3/11/2010	9:27:15 AM	BCl3 MFC set to  0.000000
3/11/2010	9:27:15 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:27:15 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:27:15 AM	Tube furnace set to 0
3/11/2010	9:27:37 AM	Helium valve closed
3/11/2010	9:27:37 AM	H2 valve closed
3/11/2010	9:27:37 AM	BCl3 valve closed
3/11/2010	9:27:37 AM	PH3 valve closed
3/11/2010	9:27:37 AM	SiCl4 pre valve closed
3/11/2010	9:27:37 AM	SiCl4 post valve closed
3/11/2010	9:27:37 AM	Bubbler valve closed
3/11/2010	9:27:37 AM	Main Vac valve opened
3/11/2010	9:27:37 AM	Bypass valve opened
3/11/2010	9:27:37 AM	Helium MFC set to  0.000000
3/11/2010	9:27:37 AM	H2 MFC set to  0.000000
3/11/2010	9:27:37 AM	BCl3 MFC set to  0.000000
3/11/2010	9:27:37 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:27:37 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:27:37 AM	Tube furnace set to 0
3/11/2010	9:32:37 AM	H2 valve closed
3/11/2010	9:32:37 AM	BCl3 valve closed
3/11/2010	9:32:37 AM	PH3 valve closed
3/11/2010	9:32:37 AM	SiCl4 pre valve closed
3/11/2010	9:32:37 AM	SiCl4 post valve closed
3/11/2010	9:32:37 AM	Main Vac valve closed
3/11/2010	9:32:37 AM	Bypass valve closed
3/11/2010	9:32:38 AM	Bubbler valve closed
3/11/2010	9:32:38 AM	Helium valve opened
3/11/2010	9:32:38 AM	Helium MFC set to  500.000000
3/11/2010	9:32:38 AM	H2 MFC set to  0.000000
3/11/2010	9:32:38 AM	BCl3 MFC set to  0.000000
3/11/2010	9:32:38 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:32:38 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:32:38 AM	Tube furnace set to 0
3/11/2010	9:34:01 AM	Helium valve closed
3/11/2010	9:34:01 AM	H2 valve closed
3/11/2010	9:34:01 AM	BCl3 valve closed
3/11/2010	9:34:01 AM	PH3 valve closed
3/11/2010	9:34:01 AM	SiCl4 pre valve closed
3/11/2010	9:34:01 AM	SiCl4 post valve closed
3/11/2010	9:34:01 AM	Main Vac valve closed
3/11/2010	9:34:01 AM	Bypass valve closed
3/11/2010	9:34:01 AM	Bubbler valve closed
3/11/2010	9:34:01 AM	Helium MFC set to  0.000000
3/11/2010	9:34:01 AM	H2 MFC set to  0.000000
3/11/2010	9:34:01 AM	BCl3 MFC set to  0.000000
3/11/2010	9:34:01 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:34:01 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:34:01 AM	Tube furnace set to 0
3/11/2010	9:34:16 AM	Helium valve closed
3/11/2010	9:34:16 AM	H2 valve closed
3/11/2010	9:34:16 AM	BCl3 valve closed
3/11/2010	9:34:16 AM	PH3 valve closed
3/11/2010	9:34:16 AM	SiCl4 pre valve closed
3/11/2010	9:34:16 AM	SiCl4 post valve closed
3/11/2010	9:34:16 AM	Main Vac valve closed
3/11/2010	9:34:16 AM	Bubbler valve closed
3/11/2010	9:34:16 AM	Bypass valve opened
3/11/2010	9:34:16 AM	Helium MFC set to  0.000000
3/11/2010	9:34:16 AM	H2 MFC set to  0.000000
3/11/2010	9:34:16 AM	BCl3 MFC set to  0.000000
3/11/2010	9:34:16 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:34:16 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:34:16 AM	Tube furnace set to 0
3/11/2010	9:34:38 AM	Helium valve closed
3/11/2010	9:34:38 AM	H2 valve closed
3/11/2010	9:34:38 AM	BCl3 valve closed
3/11/2010	9:34:38 AM	PH3 valve closed
3/11/2010	9:34:38 AM	SiCl4 pre valve closed
3/11/2010	9:34:38 AM	SiCl4 post valve closed
3/11/2010	9:34:38 AM	Bubbler valve closed
3/11/2010	9:34:38 AM	Main Vac valve opened
3/11/2010	9:34:38 AM	Bypass valve opened
3/11/2010	9:34:38 AM	Helium MFC set to  0.000000
3/11/2010	9:34:38 AM	H2 MFC set to  0.000000
3/11/2010	9:34:38 AM	BCl3 MFC set to  0.000000
3/11/2010	9:34:38 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:34:38 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:34:38 AM	Tube furnace set to 0
3/11/2010	9:39:39 AM	H2 valve closed
3/11/2010	9:39:39 AM	BCl3 valve closed
3/11/2010	9:39:39 AM	PH3 valve closed
3/11/2010	9:39:39 AM	SiCl4 pre valve closed
3/11/2010	9:39:39 AM	SiCl4 post valve closed
3/11/2010	9:39:39 AM	Main Vac valve closed
3/11/2010	9:39:39 AM	Bypass valve closed
3/11/2010	9:39:39 AM	Bubbler valve closed
3/11/2010	9:39:39 AM	Helium valve opened
3/11/2010	9:39:39 AM	Helium MFC set to  500.000000
3/11/2010	9:39:39 AM	H2 MFC set to  0.000000
3/11/2010	9:39:39 AM	BCl3 MFC set to  0.000000
3/11/2010	9:39:39 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:39:39 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:39:39 AM	Tube furnace set to 0
3/11/2010	9:41:02 AM	Helium valve closed
3/11/2010	9:41:02 AM	H2 valve closed
3/11/2010	9:41:02 AM	BCl3 valve closed
3/11/2010	9:41:02 AM	PH3 valve closed
3/11/2010	9:41:02 AM	SiCl4 pre valve closed
3/11/2010	9:41:02 AM	SiCl4 post valve closed
3/11/2010	9:41:02 AM	Main Vac valve closed
3/11/2010	9:41:02 AM	Bypass valve closed
3/11/2010	9:41:02 AM	Bubbler valve closed
3/11/2010	9:41:02 AM	Helium MFC set to  0.000000
3/11/2010	9:41:02 AM	H2 MFC set to  0.000000
3/11/2010	9:41:02 AM	BCl3 MFC set to  0.000000
3/11/2010	9:41:02 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:41:02 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:41:02 AM	Tube furnace set to 0
3/11/2010	9:41:17 AM	Helium valve closed
3/11/2010	9:41:17 AM	H2 valve closed
3/11/2010	9:41:17 AM	BCl3 valve closed
3/11/2010	9:41:17 AM	PH3 valve closed
3/11/2010	9:41:17 AM	SiCl4 pre valve closed
3/11/2010	9:41:17 AM	SiCl4 post valve closed
3/11/2010	9:41:17 AM	Main Vac valve closed
3/11/2010	9:41:17 AM	Bubbler valve closed
3/11/2010	9:41:17 AM	Bypass valve opened
3/11/2010	9:41:17 AM	Helium MFC set to  0.000000
3/11/2010	9:41:17 AM	H2 MFC set to  0.000000
3/11/2010	9:41:17 AM	BCl3 MFC set to  0.000000
3/11/2010	9:41:17 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:41:17 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:41:17 AM	Tube furnace set to 0
3/11/2010	9:41:40 AM	Helium valve closed
3/11/2010	9:41:40 AM	H2 valve closed
3/11/2010	9:41:40 AM	BCl3 valve closed
3/11/2010	9:41:40 AM	PH3 valve closed
3/11/2010	9:41:40 AM	SiCl4 pre valve closed
3/11/2010	9:41:40 AM	SiCl4 post valve closed
3/11/2010	9:41:40 AM	Bubbler valve closed
3/11/2010	9:41:40 AM	Main Vac valve opened
3/11/2010	9:41:40 AM	Bypass valve opened
3/11/2010	9:41:40 AM	Helium MFC set to  0.000000
3/11/2010	9:41:40 AM	H2 MFC set to  0.000000
3/11/2010	9:41:40 AM	BCl3 MFC set to  0.000000
3/11/2010	9:41:40 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:41:40 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:41:40 AM	Tube furnace set to 0
3/11/2010	9:46:40 AM	Helium valve closed
3/11/2010	9:46:40 AM	H2 valve closed
3/11/2010	9:46:40 AM	BCl3 valve closed
3/11/2010	9:46:40 AM	PH3 valve closed
3/11/2010	9:46:40 AM	SiCl4 pre valve closed
3/11/2010	9:46:40 AM	SiCl4 post valve closed
3/11/2010	9:46:40 AM	Bubbler valve closed
3/11/2010	9:46:40 AM	Main Vac valve opened
3/11/2010	9:46:40 AM	Bypass valve opened
3/11/2010	9:46:40 AM	Helium MFC set to  0.000000
3/11/2010	9:46:40 AM	H2 MFC set to  0.000000
3/11/2010	9:46:40 AM	BCl3 MFC set to  0.000000
3/11/2010	9:46:40 AM	SiCl4 MFC set to  0.000000
3/11/2010	9:46:40 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:46:40 AM	Tube furnace set to 0
3/11/2010	9:46:41 AM	Run finished at 9:46 AM
3/11/2010	10:03:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	10:03:28 AM	Recipe started at 10:03 AM
3/11/2010	10:03:28 AM	H2 valve closed
3/11/2010	10:03:28 AM	BCl3 valve closed
3/11/2010	10:03:28 AM	PH3 valve closed
3/11/2010	10:03:28 AM	SiCl4 pre valve closed
3/11/2010	10:03:28 AM	SiCl4 post valve closed
3/11/2010	10:03:28 AM	Main Vac valve closed
3/11/2010	10:03:28 AM	Bypass valve closed
3/11/2010	10:03:28 AM	Bubbler valve closed
3/11/2010	10:03:28 AM	Helium valve opened
3/11/2010	10:03:28 AM	Helium MFC set to  500.000000
3/11/2010	10:03:28 AM	H2 MFC set to  0.000000
3/11/2010	10:03:28 AM	BCl3 MFC set to  0.000000
3/11/2010	10:03:29 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:03:29 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:03:29 AM	Tube furnace set to 0
3/11/2010	10:04:50 AM	Helium valve closed
3/11/2010	10:04:50 AM	H2 valve closed
3/11/2010	10:04:50 AM	BCl3 valve closed
3/11/2010	10:04:50 AM	PH3 valve closed
3/11/2010	10:04:50 AM	SiCl4 pre valve closed
3/11/2010	10:04:50 AM	SiCl4 post valve closed
3/11/2010	10:04:50 AM	Main Vac valve closed
3/11/2010	10:04:50 AM	Bypass valve closed
3/11/2010	10:04:50 AM	Bubbler valve closed
3/11/2010	10:04:50 AM	Helium MFC set to  0.000000
3/11/2010	10:04:50 AM	H2 MFC set to  0.000000
3/11/2010	10:04:50 AM	BCl3 MFC set to  0.000000
3/11/2010	10:04:50 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:04:50 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:04:50 AM	Tube furnace set to 0
3/11/2010	10:04:50 AM	Run finished at 10:04 AM
3/11/2010	10:04:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	10:04:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	10:04:56 AM	Recipe started at 10:04 AM
3/11/2010	10:04:56 AM	Helium valve closed
3/11/2010	10:04:56 AM	H2 valve closed
3/11/2010	10:04:56 AM	BCl3 valve closed
3/11/2010	10:04:56 AM	PH3 valve closed
3/11/2010	10:04:56 AM	SiCl4 pre valve closed
3/11/2010	10:04:56 AM	SiCl4 post valve closed
3/11/2010	10:04:56 AM	Main Vac valve closed
3/11/2010	10:04:56 AM	Bubbler valve closed
3/11/2010	10:04:56 AM	Bypass valve opened
3/11/2010	10:04:56 AM	Helium MFC set to  0.000000
3/11/2010	10:04:56 AM	H2 MFC set to  0.000000
3/11/2010	10:04:56 AM	BCl3 MFC set to  0.000000
3/11/2010	10:04:56 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:04:56 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:04:56 AM	Tube furnace set to 0
3/11/2010	10:05:18 AM	Helium valve closed
3/11/2010	10:05:18 AM	H2 valve closed
3/11/2010	10:05:18 AM	BCl3 valve closed
3/11/2010	10:05:18 AM	PH3 valve closed
3/11/2010	10:05:18 AM	SiCl4 pre valve closed
3/11/2010	10:05:18 AM	SiCl4 post valve closed
3/11/2010	10:05:18 AM	Bubbler valve closed
3/11/2010	10:05:18 AM	Main Vac valve opened
3/11/2010	10:05:18 AM	Bypass valve opened
3/11/2010	10:05:18 AM	Helium MFC set to  0.000000
3/11/2010	10:05:18 AM	H2 MFC set to  0.000000
3/11/2010	10:05:18 AM	BCl3 MFC set to  0.000000
3/11/2010	10:05:18 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:05:18 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:05:18 AM	Tube furnace set to 0
3/11/2010	10:05:18 AM	Run finished at 10:05 AM
3/11/2010	10:05:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	10:13:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	10:13:05 AM	Recipe started at 10:13 AM
3/11/2010	10:13:05 AM	H2 valve closed
3/11/2010	10:13:05 AM	BCl3 valve closed
3/11/2010	10:13:05 AM	PH3 valve closed
3/11/2010	10:13:05 AM	SiCl4 pre valve closed
3/11/2010	10:13:05 AM	SiCl4 post valve closed
3/11/2010	10:13:05 AM	Main Vac valve closed
3/11/2010	10:13:05 AM	Bypass valve closed
3/11/2010	10:13:05 AM	Bubbler valve closed
3/11/2010	10:13:05 AM	Helium valve opened
3/11/2010	10:13:05 AM	Helium MFC set to  500.000000
3/11/2010	10:13:05 AM	H2 MFC set to  0.000000
3/11/2010	10:13:05 AM	BCl3 MFC set to  0.000000
3/11/2010	10:13:05 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:13:05 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:13:05 AM	Tube furnace set to 0
3/11/2010	10:14:26 AM	Helium valve closed
3/11/2010	10:14:26 AM	H2 valve closed
3/11/2010	10:14:26 AM	BCl3 valve closed
3/11/2010	10:14:26 AM	PH3 valve closed
3/11/2010	10:14:26 AM	SiCl4 pre valve closed
3/11/2010	10:14:26 AM	SiCl4 post valve closed
3/11/2010	10:14:26 AM	Main Vac valve closed
3/11/2010	10:14:26 AM	Bypass valve closed
3/11/2010	10:14:26 AM	Bubbler valve closed
3/11/2010	10:14:26 AM	Helium MFC set to  0.000000
3/11/2010	10:14:26 AM	H2 MFC set to  0.000000
3/11/2010	10:14:26 AM	BCl3 MFC set to  0.000000
3/11/2010	10:14:26 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:14:26 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:14:26 AM	Tube furnace set to 0
3/11/2010	10:14:27 AM	Run finished at 10:14 AM
3/11/2010	10:14:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	10:18:40 AM	Recipe started at 10:18 AM
3/11/2010	10:18:40 AM	H2 valve closed
3/11/2010	10:18:40 AM	BCl3 valve closed
3/11/2010	10:18:40 AM	PH3 valve closed
3/11/2010	10:18:40 AM	SiCl4 pre valve closed
3/11/2010	10:18:40 AM	SiCl4 post valve closed
3/11/2010	10:18:40 AM	Main Vac valve closed
3/11/2010	10:18:40 AM	Bypass valve closed
3/11/2010	10:18:40 AM	Bubbler valve closed
3/11/2010	10:18:40 AM	Helium valve opened
3/11/2010	10:18:40 AM	Helium MFC set to  500.000000
3/11/2010	10:18:40 AM	H2 MFC set to  0.000000
3/11/2010	10:18:40 AM	BCl3 MFC set to  0.000000
3/11/2010	10:18:40 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:18:40 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:18:40 AM	Tube furnace set to 0
3/11/2010	10:18:42 AM	Helium valve closed
3/11/2010	10:18:42 AM	H2 valve closed
3/11/2010	10:18:42 AM	BCl3 valve closed
3/11/2010	10:18:42 AM	PH3 valve closed
3/11/2010	10:18:42 AM	SiCl4 pre valve closed
3/11/2010	10:18:42 AM	SiCl4 post valve closed
3/11/2010	10:18:42 AM	Main Vac valve closed
3/11/2010	10:18:42 AM	Bypass valve closed
3/11/2010	10:18:42 AM	Bubbler valve closed
3/11/2010	10:18:42 AM	Helium MFC set to  0.000000
3/11/2010	10:18:42 AM	H2 MFC set to  0.000000
3/11/2010	10:18:42 AM	BCl3 MFC set to  0.000000
3/11/2010	10:18:42 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:18:42 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:18:42 AM	Tube furnace set to 0
3/11/2010	10:18:57 AM	Helium valve closed
3/11/2010	10:18:57 AM	H2 valve closed
3/11/2010	10:18:57 AM	BCl3 valve closed
3/11/2010	10:18:57 AM	PH3 valve closed
3/11/2010	10:18:57 AM	SiCl4 pre valve closed
3/11/2010	10:18:57 AM	SiCl4 post valve closed
3/11/2010	10:18:57 AM	Main Vac valve closed
3/11/2010	10:18:57 AM	Bubbler valve closed
3/11/2010	10:18:57 AM	Bypass valve opened
3/11/2010	10:18:57 AM	Helium MFC set to  0.000000
3/11/2010	10:18:57 AM	H2 MFC set to  0.000000
3/11/2010	10:18:57 AM	BCl3 MFC set to  0.000000
3/11/2010	10:18:57 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:18:57 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:18:57 AM	Tube furnace set to 0
3/11/2010	10:19:27 AM	Helium valve closed
3/11/2010	10:19:27 AM	H2 valve closed
3/11/2010	10:19:27 AM	BCl3 valve closed
3/11/2010	10:19:27 AM	PH3 valve closed
3/11/2010	10:19:27 AM	SiCl4 pre valve closed
3/11/2010	10:19:27 AM	SiCl4 post valve closed
3/11/2010	10:19:27 AM	Bubbler valve closed
3/11/2010	10:19:27 AM	Main Vac valve opened
3/11/2010	10:19:27 AM	Bypass valve opened
3/11/2010	10:19:27 AM	Helium MFC set to  0.000000
3/11/2010	10:19:27 AM	H2 MFC set to  0.000000
3/11/2010	10:19:27 AM	BCl3 MFC set to  0.000000
3/11/2010	10:19:27 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:19:27 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:19:27 AM	Tube furnace set to 0
3/11/2010	10:24:28 AM	H2 valve closed
3/11/2010	10:24:28 AM	BCl3 valve closed
3/11/2010	10:24:28 AM	PH3 valve closed
3/11/2010	10:24:28 AM	SiCl4 pre valve closed
3/11/2010	10:24:28 AM	SiCl4 post valve closed
3/11/2010	10:24:28 AM	Main Vac valve closed
3/11/2010	10:24:28 AM	Bypass valve closed
3/11/2010	10:24:28 AM	Bubbler valve closed
3/11/2010	10:24:28 AM	Helium valve opened
3/11/2010	10:24:28 AM	Helium MFC set to  500.000000
3/11/2010	10:24:28 AM	H2 MFC set to  0.000000
3/11/2010	10:24:28 AM	BCl3 MFC set to  0.000000
3/11/2010	10:24:28 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:24:28 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:24:28 AM	Tube furnace set to 0
3/11/2010	10:25:44 AM	Helium valve closed
3/11/2010	10:25:44 AM	H2 valve closed
3/11/2010	10:25:44 AM	BCl3 valve closed
3/11/2010	10:25:44 AM	PH3 valve closed
3/11/2010	10:25:44 AM	SiCl4 pre valve closed
3/11/2010	10:25:44 AM	SiCl4 post valve closed
3/11/2010	10:25:44 AM	Main Vac valve closed
3/11/2010	10:25:44 AM	Bypass valve closed
3/11/2010	10:25:44 AM	Bubbler valve closed
3/11/2010	10:25:44 AM	Helium MFC set to  0.000000
3/11/2010	10:25:44 AM	H2 MFC set to  0.000000
3/11/2010	10:25:44 AM	BCl3 MFC set to  0.000000
3/11/2010	10:25:44 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:25:44 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:25:44 AM	Tube furnace set to 0
3/11/2010	10:25:59 AM	Helium valve closed
3/11/2010	10:25:59 AM	H2 valve closed
3/11/2010	10:25:59 AM	BCl3 valve closed
3/11/2010	10:25:59 AM	PH3 valve closed
3/11/2010	10:25:59 AM	SiCl4 pre valve closed
3/11/2010	10:25:59 AM	SiCl4 post valve closed
3/11/2010	10:25:59 AM	Main Vac valve closed
3/11/2010	10:25:59 AM	Bubbler valve closed
3/11/2010	10:25:59 AM	Bypass valve opened
3/11/2010	10:25:59 AM	Helium MFC set to  0.000000
3/11/2010	10:25:59 AM	H2 MFC set to  0.000000
3/11/2010	10:25:59 AM	BCl3 MFC set to  0.000000
3/11/2010	10:25:59 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:25:59 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:25:59 AM	Tube furnace set to 0
3/11/2010	10:26:19 AM	Helium valve closed
3/11/2010	10:26:19 AM	H2 valve closed
3/11/2010	10:26:19 AM	BCl3 valve closed
3/11/2010	10:26:19 AM	PH3 valve closed
3/11/2010	10:26:19 AM	SiCl4 pre valve closed
3/11/2010	10:26:19 AM	SiCl4 post valve closed
3/11/2010	10:26:19 AM	Bubbler valve closed
3/11/2010	10:26:19 AM	Main Vac valve opened
3/11/2010	10:26:19 AM	Bypass valve opened
3/11/2010	10:26:19 AM	Helium MFC set to  0.000000
3/11/2010	10:26:19 AM	H2 MFC set to  0.000000
3/11/2010	10:26:19 AM	BCl3 MFC set to  0.000000
3/11/2010	10:26:19 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:26:19 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:26:19 AM	Tube furnace set to 0
3/11/2010	10:31:20 AM	H2 valve closed
3/11/2010	10:31:20 AM	BCl3 valve closed
3/11/2010	10:31:20 AM	PH3 valve closed
3/11/2010	10:31:20 AM	SiCl4 pre valve closed
3/11/2010	10:31:20 AM	SiCl4 post valve closed
3/11/2010	10:31:20 AM	Main Vac valve closed
3/11/2010	10:31:20 AM	Bypass valve closed
3/11/2010	10:31:20 AM	Bubbler valve closed
3/11/2010	10:31:20 AM	Helium valve opened
3/11/2010	10:31:20 AM	Helium MFC set to  500.000000
3/11/2010	10:31:20 AM	H2 MFC set to  0.000000
3/11/2010	10:31:20 AM	BCl3 MFC set to  0.000000
3/11/2010	10:31:20 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:31:20 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:31:20 AM	Tube furnace set to 0
3/11/2010	10:32:35 AM	Helium valve closed
3/11/2010	10:32:35 AM	H2 valve closed
3/11/2010	10:32:35 AM	BCl3 valve closed
3/11/2010	10:32:35 AM	PH3 valve closed
3/11/2010	10:32:35 AM	SiCl4 pre valve closed
3/11/2010	10:32:35 AM	SiCl4 post valve closed
3/11/2010	10:32:35 AM	Main Vac valve closed
3/11/2010	10:32:35 AM	Bypass valve closed
3/11/2010	10:32:35 AM	Bubbler valve closed
3/11/2010	10:32:35 AM	Helium MFC set to  0.000000
3/11/2010	10:32:35 AM	H2 MFC set to  0.000000
3/11/2010	10:32:35 AM	BCl3 MFC set to  0.000000
3/11/2010	10:32:35 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:32:35 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:32:35 AM	Tube furnace set to 0
3/11/2010	10:32:51 AM	Helium valve closed
3/11/2010	10:32:51 AM	H2 valve closed
3/11/2010	10:32:51 AM	BCl3 valve closed
3/11/2010	10:32:51 AM	PH3 valve closed
3/11/2010	10:32:51 AM	SiCl4 pre valve closed
3/11/2010	10:32:51 AM	SiCl4 post valve closed
3/11/2010	10:32:51 AM	Main Vac valve closed
3/11/2010	10:32:51 AM	Bubbler valve closed
3/11/2010	10:32:51 AM	Bypass valve opened
3/11/2010	10:32:51 AM	Helium MFC set to  0.000000
3/11/2010	10:32:51 AM	H2 MFC set to  0.000000
3/11/2010	10:32:51 AM	BCl3 MFC set to  0.000000
3/11/2010	10:32:51 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:32:51 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:32:51 AM	Tube furnace set to 0
3/11/2010	10:33:11 AM	Helium valve closed
3/11/2010	10:33:11 AM	H2 valve closed
3/11/2010	10:33:11 AM	BCl3 valve closed
3/11/2010	10:33:11 AM	PH3 valve closed
3/11/2010	10:33:11 AM	SiCl4 pre valve closed
3/11/2010	10:33:11 AM	SiCl4 post valve closed
3/11/2010	10:33:11 AM	Bubbler valve closed
3/11/2010	10:33:11 AM	Main Vac valve opened
3/11/2010	10:33:11 AM	Bypass valve opened
3/11/2010	10:33:11 AM	Helium MFC set to  0.000000
3/11/2010	10:33:11 AM	H2 MFC set to  0.000000
3/11/2010	10:33:11 AM	BCl3 MFC set to  0.000000
3/11/2010	10:33:11 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:33:11 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:33:11 AM	Tube furnace set to 0
3/11/2010	10:38:11 AM	Helium valve closed
3/11/2010	10:38:11 AM	H2 valve closed
3/11/2010	10:38:11 AM	BCl3 valve closed
3/11/2010	10:38:11 AM	PH3 valve closed
3/11/2010	10:38:11 AM	SiCl4 pre valve closed
3/11/2010	10:38:11 AM	SiCl4 post valve closed
3/11/2010	10:38:11 AM	Bubbler valve closed
3/11/2010	10:38:11 AM	Main Vac valve opened
3/11/2010	10:38:11 AM	Bypass valve opened
3/11/2010	10:38:11 AM	Helium MFC set to  0.000000
3/11/2010	10:38:11 AM	H2 MFC set to  0.000000
3/11/2010	10:38:11 AM	BCl3 MFC set to  0.000000
3/11/2010	10:38:11 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:38:11 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:38:11 AM	Tube furnace set to 0
3/11/2010	10:38:13 AM	Run finished at 10:38 AM
3/11/2010	10:41:24 AM	Recipe started at 10:41 AM
3/11/2010	10:41:24 AM	H2 valve closed
3/11/2010	10:41:24 AM	BCl3 valve closed
3/11/2010	10:41:24 AM	PH3 valve closed
3/11/2010	10:41:24 AM	SiCl4 pre valve closed
3/11/2010	10:41:24 AM	SiCl4 post valve closed
3/11/2010	10:41:24 AM	Main Vac valve closed
3/11/2010	10:41:24 AM	Bypass valve closed
3/11/2010	10:41:24 AM	Bubbler valve closed
3/11/2010	10:41:24 AM	Helium valve opened
3/11/2010	10:41:24 AM	Helium MFC set to  500.000000
3/11/2010	10:41:24 AM	H2 MFC set to  0.000000
3/11/2010	10:41:24 AM	BCl3 MFC set to  0.000000
3/11/2010	10:41:24 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:41:24 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:41:24 AM	Tube furnace set to 0
3/11/2010	10:42:39 AM	Helium valve closed
3/11/2010	10:42:40 AM	H2 valve closed
3/11/2010	10:42:40 AM	BCl3 valve closed
3/11/2010	10:42:40 AM	PH3 valve closed
3/11/2010	10:42:40 AM	SiCl4 pre valve closed
3/11/2010	10:42:40 AM	SiCl4 post valve closed
3/11/2010	10:42:40 AM	Main Vac valve closed
3/11/2010	10:42:40 AM	Bypass valve closed
3/11/2010	10:42:40 AM	Bubbler valve closed
3/11/2010	10:42:40 AM	Helium MFC set to  0.000000
3/11/2010	10:42:40 AM	H2 MFC set to  0.000000
3/11/2010	10:42:40 AM	BCl3 MFC set to  0.000000
3/11/2010	10:42:40 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:42:40 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:42:40 AM	Tube furnace set to 0
3/11/2010	10:42:55 AM	Helium valve closed
3/11/2010	10:42:55 AM	H2 valve closed
3/11/2010	10:42:55 AM	BCl3 valve closed
3/11/2010	10:42:55 AM	PH3 valve closed
3/11/2010	10:42:55 AM	SiCl4 pre valve closed
3/11/2010	10:42:55 AM	SiCl4 post valve closed
3/11/2010	10:42:55 AM	Main Vac valve closed
3/11/2010	10:42:55 AM	Bubbler valve closed
3/11/2010	10:42:55 AM	Bypass valve opened
3/11/2010	10:42:55 AM	Helium MFC set to  0.000000
3/11/2010	10:42:55 AM	H2 MFC set to  0.000000
3/11/2010	10:42:55 AM	BCl3 MFC set to  0.000000
3/11/2010	10:42:55 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:42:55 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:42:55 AM	Tube furnace set to 0
3/11/2010	10:43:15 AM	Helium valve closed
3/11/2010	10:43:15 AM	H2 valve closed
3/11/2010	10:43:15 AM	BCl3 valve closed
3/11/2010	10:43:15 AM	PH3 valve closed
3/11/2010	10:43:15 AM	SiCl4 pre valve closed
3/11/2010	10:43:15 AM	SiCl4 post valve closed
3/11/2010	10:43:15 AM	Bubbler valve closed
3/11/2010	10:43:15 AM	Main Vac valve opened
3/11/2010	10:43:15 AM	Bypass valve opened
3/11/2010	10:43:15 AM	Helium MFC set to  0.000000
3/11/2010	10:43:15 AM	H2 MFC set to  0.000000
3/11/2010	10:43:15 AM	BCl3 MFC set to  0.000000
3/11/2010	10:43:15 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:43:15 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:43:15 AM	Tube furnace set to 0
3/11/2010	10:48:15 AM	H2 valve closed
3/11/2010	10:48:15 AM	BCl3 valve closed
3/11/2010	10:48:15 AM	PH3 valve closed
3/11/2010	10:48:15 AM	SiCl4 pre valve closed
3/11/2010	10:48:15 AM	SiCl4 post valve closed
3/11/2010	10:48:15 AM	Main Vac valve closed
3/11/2010	10:48:15 AM	Bypass valve closed
3/11/2010	10:48:15 AM	Bubbler valve closed
3/11/2010	10:48:15 AM	Helium valve opened
3/11/2010	10:48:15 AM	Helium MFC set to  500.000000
3/11/2010	10:48:15 AM	H2 MFC set to  0.000000
3/11/2010	10:48:15 AM	BCl3 MFC set to  0.000000
3/11/2010	10:48:15 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:48:15 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:48:15 AM	Tube furnace set to 0
3/11/2010	10:49:35 AM	Helium valve closed
3/11/2010	10:49:35 AM	H2 valve closed
3/11/2010	10:49:35 AM	BCl3 valve closed
3/11/2010	10:49:35 AM	PH3 valve closed
3/11/2010	10:49:35 AM	SiCl4 pre valve closed
3/11/2010	10:49:35 AM	SiCl4 post valve closed
3/11/2010	10:49:35 AM	Main Vac valve closed
3/11/2010	10:49:35 AM	Bypass valve closed
3/11/2010	10:49:35 AM	Bubbler valve closed
3/11/2010	10:49:35 AM	Helium MFC set to  0.000000
3/11/2010	10:49:35 AM	H2 MFC set to  0.000000
3/11/2010	10:49:35 AM	BCl3 MFC set to  0.000000
3/11/2010	10:49:35 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:49:35 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:49:35 AM	Tube furnace set to 0
3/11/2010	10:49:50 AM	Helium valve closed
3/11/2010	10:49:50 AM	H2 valve closed
3/11/2010	10:49:50 AM	BCl3 valve closed
3/11/2010	10:49:50 AM	PH3 valve closed
3/11/2010	10:49:50 AM	SiCl4 pre valve closed
3/11/2010	10:49:50 AM	SiCl4 post valve closed
3/11/2010	10:49:50 AM	Main Vac valve closed
3/11/2010	10:49:50 AM	Bubbler valve closed
3/11/2010	10:49:50 AM	Bypass valve opened
3/11/2010	10:49:50 AM	Helium MFC set to  0.000000
3/11/2010	10:49:50 AM	H2 MFC set to  0.000000
3/11/2010	10:49:50 AM	BCl3 MFC set to  0.000000
3/11/2010	10:49:50 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:49:50 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:49:50 AM	Tube furnace set to 0
3/11/2010	10:50:12 AM	Helium valve closed
3/11/2010	10:50:12 AM	H2 valve closed
3/11/2010	10:50:12 AM	BCl3 valve closed
3/11/2010	10:50:12 AM	PH3 valve closed
3/11/2010	10:50:12 AM	SiCl4 pre valve closed
3/11/2010	10:50:12 AM	SiCl4 post valve closed
3/11/2010	10:50:12 AM	Bubbler valve closed
3/11/2010	10:50:12 AM	Main Vac valve opened
3/11/2010	10:50:12 AM	Bypass valve opened
3/11/2010	10:50:12 AM	Helium MFC set to  0.000000
3/11/2010	10:50:12 AM	H2 MFC set to  0.000000
3/11/2010	10:50:12 AM	BCl3 MFC set to  0.000000
3/11/2010	10:50:12 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:50:12 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:50:12 AM	Tube furnace set to 0
3/11/2010	10:55:12 AM	H2 valve closed
3/11/2010	10:55:12 AM	BCl3 valve closed
3/11/2010	10:55:12 AM	PH3 valve closed
3/11/2010	10:55:12 AM	SiCl4 pre valve closed
3/11/2010	10:55:12 AM	SiCl4 post valve closed
3/11/2010	10:55:12 AM	Main Vac valve closed
3/11/2010	10:55:12 AM	Bypass valve closed
3/11/2010	10:55:12 AM	Bubbler valve closed
3/11/2010	10:55:12 AM	Helium valve opened
3/11/2010	10:55:12 AM	Helium MFC set to  500.000000
3/11/2010	10:55:12 AM	H2 MFC set to  0.000000
3/11/2010	10:55:12 AM	BCl3 MFC set to  0.000000
3/11/2010	10:55:12 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:55:12 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:55:12 AM	Tube furnace set to 0
3/11/2010	10:56:34 AM	Helium valve closed
3/11/2010	10:56:34 AM	H2 valve closed
3/11/2010	10:56:34 AM	BCl3 valve closed
3/11/2010	10:56:34 AM	PH3 valve closed
3/11/2010	10:56:34 AM	SiCl4 pre valve closed
3/11/2010	10:56:34 AM	SiCl4 post valve closed
3/11/2010	10:56:34 AM	Main Vac valve closed
3/11/2010	10:56:34 AM	Bypass valve closed
3/11/2010	10:56:34 AM	Bubbler valve closed
3/11/2010	10:56:34 AM	Helium MFC set to  0.000000
3/11/2010	10:56:34 AM	H2 MFC set to  0.000000
3/11/2010	10:56:34 AM	BCl3 MFC set to  0.000000
3/11/2010	10:56:34 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:56:34 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:56:34 AM	Tube furnace set to 0
3/11/2010	10:56:49 AM	Helium valve closed
3/11/2010	10:56:49 AM	H2 valve closed
3/11/2010	10:56:49 AM	BCl3 valve closed
3/11/2010	10:56:49 AM	PH3 valve closed
3/11/2010	10:56:49 AM	SiCl4 pre valve closed
3/11/2010	10:56:49 AM	SiCl4 post valve closed
3/11/2010	10:56:49 AM	Main Vac valve closed
3/11/2010	10:56:49 AM	Bubbler valve closed
3/11/2010	10:56:49 AM	Bypass valve opened
3/11/2010	10:56:49 AM	Helium MFC set to  0.000000
3/11/2010	10:56:49 AM	H2 MFC set to  0.000000
3/11/2010	10:56:49 AM	BCl3 MFC set to  0.000000
3/11/2010	10:56:49 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:56:49 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:56:49 AM	Tube furnace set to 0
3/11/2010	10:57:11 AM	Helium valve closed
3/11/2010	10:57:11 AM	H2 valve closed
3/11/2010	10:57:11 AM	BCl3 valve closed
3/11/2010	10:57:11 AM	PH3 valve closed
3/11/2010	10:57:11 AM	SiCl4 pre valve closed
3/11/2010	10:57:11 AM	SiCl4 post valve closed
3/11/2010	10:57:11 AM	Bubbler valve closed
3/11/2010	10:57:11 AM	Main Vac valve opened
3/11/2010	10:57:11 AM	Bypass valve opened
3/11/2010	10:57:11 AM	Helium MFC set to  0.000000
3/11/2010	10:57:11 AM	H2 MFC set to  0.000000
3/11/2010	10:57:11 AM	BCl3 MFC set to  0.000000
3/11/2010	10:57:11 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:57:11 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:57:11 AM	Tube furnace set to 0
3/11/2010	10:58:31 AM	Run aborted at 10:58 AM
3/11/2010	10:58:31 AM	Helium valve closed
3/11/2010	10:58:31 AM	H2 valve closed
3/11/2010	10:58:31 AM	BCl3 valve closed
3/11/2010	10:58:31 AM	PH3 valve closed
3/11/2010	10:58:31 AM	SiCl4 pre valve closed
3/11/2010	10:58:31 AM	SiCl4 post valve closed
3/11/2010	10:58:31 AM	Bypass valve closed
3/11/2010	10:58:31 AM	Main Vac valve closed
3/11/2010	10:58:31 AM	Bubbler valve closed
3/11/2010	10:58:31 AM	Helium MFC set to  0.000000
3/11/2010	10:58:31 AM	H2 MFC set to  0.000000
3/11/2010	10:58:31 AM	BCl3 MFC set to  0.000000
3/11/2010	10:58:31 AM	SiCl4 MFC set to  0.000000
3/11/2010	10:58:31 AM	Tube furnace set to 0
3/11/2010	10:58:58 AM	Bypass valve closed
3/11/2010	10:58:59 AM	Main Vac valve closed
3/11/2010	10:59:00 AM	Bypass valve opened
3/11/2010	10:59:06 AM	Main Vac valve opened
3/11/2010	11:01:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	11:01:22 AM	Recipe started at 11:01 AM
3/11/2010	11:01:22 AM	H2 valve closed
3/11/2010	11:01:22 AM	BCl3 valve closed
3/11/2010	11:01:22 AM	PH3 valve closed
3/11/2010	11:01:22 AM	SiCl4 pre valve closed
3/11/2010	11:01:22 AM	SiCl4 post valve closed
3/11/2010	11:01:22 AM	Main Vac valve closed
3/11/2010	11:01:22 AM	Bypass valve closed
3/11/2010	11:01:22 AM	Bubbler valve closed
3/11/2010	11:01:22 AM	Helium valve opened
3/11/2010	11:01:22 AM	Helium MFC set to  500.000000
3/11/2010	11:01:22 AM	H2 MFC set to  0.000000
3/11/2010	11:01:22 AM	BCl3 MFC set to  0.000000
3/11/2010	11:01:22 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:01:22 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:01:22 AM	Tube furnace set to 0
3/11/2010	11:02:43 AM	Helium valve closed
3/11/2010	11:02:43 AM	H2 valve closed
3/11/2010	11:02:43 AM	BCl3 valve closed
3/11/2010	11:02:43 AM	PH3 valve closed
3/11/2010	11:02:43 AM	SiCl4 pre valve closed
3/11/2010	11:02:43 AM	SiCl4 post valve closed
3/11/2010	11:02:43 AM	Main Vac valve closed
3/11/2010	11:02:43 AM	Bypass valve closed
3/11/2010	11:02:43 AM	Bubbler valve closed
3/11/2010	11:02:43 AM	Helium MFC set to  0.000000
3/11/2010	11:02:43 AM	H2 MFC set to  0.000000
3/11/2010	11:02:43 AM	BCl3 MFC set to  0.000000
3/11/2010	11:02:43 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:02:43 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:02:43 AM	Tube furnace set to 0
3/11/2010	11:02:43 AM	Run finished at 11:02 AM
3/11/2010	11:02:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	11:03:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	11:03:05 AM	Recipe started at 11:03 AM
3/11/2010	11:03:05 AM	Helium valve closed
3/11/2010	11:03:05 AM	H2 valve closed
3/11/2010	11:03:05 AM	BCl3 valve closed
3/11/2010	11:03:05 AM	PH3 valve closed
3/11/2010	11:03:05 AM	SiCl4 pre valve closed
3/11/2010	11:03:05 AM	SiCl4 post valve closed
3/11/2010	11:03:05 AM	Main Vac valve closed
3/11/2010	11:03:05 AM	Bubbler valve closed
3/11/2010	11:03:05 AM	Bypass valve opened
3/11/2010	11:03:05 AM	Helium MFC set to  0.000000
3/11/2010	11:03:05 AM	H2 MFC set to  0.000000
3/11/2010	11:03:05 AM	BCl3 MFC set to  0.000000
3/11/2010	11:03:05 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:03:05 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:03:05 AM	Tube furnace set to 0
3/11/2010	11:03:27 AM	Helium valve closed
3/11/2010	11:03:27 AM	H2 valve closed
3/11/2010	11:03:27 AM	BCl3 valve closed
3/11/2010	11:03:27 AM	PH3 valve closed
3/11/2010	11:03:27 AM	SiCl4 pre valve closed
3/11/2010	11:03:27 AM	SiCl4 post valve closed
3/11/2010	11:03:27 AM	Bubbler valve closed
3/11/2010	11:03:27 AM	Main Vac valve opened
3/11/2010	11:03:27 AM	Bypass valve opened
3/11/2010	11:03:27 AM	Helium MFC set to  0.000000
3/11/2010	11:03:27 AM	H2 MFC set to  0.000000
3/11/2010	11:03:27 AM	BCl3 MFC set to  0.000000
3/11/2010	11:03:27 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:03:27 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:03:27 AM	Tube furnace set to 0
3/11/2010	11:03:27 AM	Run finished at 11:03 AM
3/11/2010	11:03:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	11:05:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	11:05:48 AM	Recipe started at 11:05 AM
3/11/2010	11:05:48 AM	H2 valve closed
3/11/2010	11:05:48 AM	BCl3 valve closed
3/11/2010	11:05:48 AM	PH3 valve closed
3/11/2010	11:05:48 AM	SiCl4 pre valve closed
3/11/2010	11:05:48 AM	SiCl4 post valve closed
3/11/2010	11:05:48 AM	Main Vac valve closed
3/11/2010	11:05:48 AM	Bypass valve closed
3/11/2010	11:05:48 AM	Bubbler valve closed
3/11/2010	11:05:48 AM	Helium valve opened
3/11/2010	11:05:48 AM	Helium MFC set to  500.000000
3/11/2010	11:05:48 AM	H2 MFC set to  0.000000
3/11/2010	11:05:48 AM	BCl3 MFC set to  0.000000
3/11/2010	11:05:48 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:05:48 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:05:48 AM	Tube furnace set to 0
3/11/2010	11:07:08 AM	Helium valve closed
3/11/2010	11:07:08 AM	H2 valve closed
3/11/2010	11:07:08 AM	BCl3 valve closed
3/11/2010	11:07:08 AM	PH3 valve closed
3/11/2010	11:07:08 AM	SiCl4 pre valve closed
3/11/2010	11:07:08 AM	SiCl4 post valve closed
3/11/2010	11:07:08 AM	Main Vac valve closed
3/11/2010	11:07:08 AM	Bypass valve closed
3/11/2010	11:07:08 AM	Bubbler valve closed
3/11/2010	11:07:08 AM	Helium MFC set to  0.000000
3/11/2010	11:07:08 AM	H2 MFC set to  0.000000
3/11/2010	11:07:08 AM	BCl3 MFC set to  0.000000
3/11/2010	11:07:08 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:07:08 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:07:08 AM	Tube furnace set to 0
3/11/2010	11:07:08 AM	Run finished at 11:07 AM
3/11/2010	11:07:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	11:10:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	11:10:58 AM	Recipe started at 11:10 AM
3/11/2010	11:10:58 AM	Helium valve closed
3/11/2010	11:10:58 AM	H2 valve closed
3/11/2010	11:10:58 AM	BCl3 valve closed
3/11/2010	11:10:58 AM	PH3 valve closed
3/11/2010	11:10:58 AM	SiCl4 pre valve closed
3/11/2010	11:10:58 AM	SiCl4 post valve closed
3/11/2010	11:10:58 AM	Main Vac valve closed
3/11/2010	11:10:58 AM	Bubbler valve closed
3/11/2010	11:10:58 AM	Bypass valve opened
3/11/2010	11:10:58 AM	Helium MFC set to  0.000000
3/11/2010	11:10:58 AM	H2 MFC set to  0.000000
3/11/2010	11:10:58 AM	BCl3 MFC set to  0.000000
3/11/2010	11:10:58 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:10:58 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:10:58 AM	Tube furnace set to 0
3/11/2010	11:11:28 AM	Helium valve closed
3/11/2010	11:11:28 AM	H2 valve closed
3/11/2010	11:11:28 AM	BCl3 valve closed
3/11/2010	11:11:28 AM	PH3 valve closed
3/11/2010	11:11:28 AM	SiCl4 pre valve closed
3/11/2010	11:11:28 AM	SiCl4 post valve closed
3/11/2010	11:11:28 AM	Bubbler valve closed
3/11/2010	11:11:28 AM	Main Vac valve opened
3/11/2010	11:11:28 AM	Bypass valve opened
3/11/2010	11:11:28 AM	Helium MFC set to  0.000000
3/11/2010	11:11:28 AM	H2 MFC set to  0.000000
3/11/2010	11:11:28 AM	BCl3 MFC set to  0.000000
3/11/2010	11:11:28 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:11:28 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:11:28 AM	Tube furnace set to 0
3/11/2010	11:11:29 AM	Run finished at 11:11 AM
3/11/2010	11:11:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	11:13:03 AM	Main Vac valve closed
3/11/2010	11:13:04 AM	Bypass valve closed
3/11/2010	11:13:28 AM	Bypass valve opened
3/11/2010	11:13:29 AM	Main Vac valve opened
3/11/2010	11:14:26 AM	Recipe started at 11:14 AM
3/11/2010	11:14:26 AM	H2 valve closed
3/11/2010	11:14:26 AM	BCl3 valve closed
3/11/2010	11:14:26 AM	PH3 valve closed
3/11/2010	11:14:26 AM	SiCl4 pre valve closed
3/11/2010	11:14:26 AM	SiCl4 post valve closed
3/11/2010	11:14:26 AM	Main Vac valve closed
3/11/2010	11:14:26 AM	Bypass valve closed
3/11/2010	11:14:26 AM	Bubbler valve closed
3/11/2010	11:14:26 AM	Helium valve opened
3/11/2010	11:14:26 AM	Helium MFC set to  500.000000
3/11/2010	11:14:26 AM	H2 MFC set to  0.000000
3/11/2010	11:14:26 AM	BCl3 MFC set to  0.000000
3/11/2010	11:14:26 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:14:26 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:14:26 AM	Tube furnace set to 0
3/11/2010	11:15:49 AM	Helium valve closed
3/11/2010	11:15:49 AM	H2 valve closed
3/11/2010	11:15:49 AM	BCl3 valve closed
3/11/2010	11:15:49 AM	PH3 valve closed
3/11/2010	11:15:49 AM	SiCl4 pre valve closed
3/11/2010	11:15:49 AM	SiCl4 post valve closed
3/11/2010	11:15:49 AM	Main Vac valve closed
3/11/2010	11:15:49 AM	Bypass valve closed
3/11/2010	11:15:49 AM	Bubbler valve closed
3/11/2010	11:15:49 AM	Helium MFC set to  0.000000
3/11/2010	11:15:49 AM	H2 MFC set to  0.000000
3/11/2010	11:15:49 AM	BCl3 MFC set to  0.000000
3/11/2010	11:15:49 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:15:49 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:15:49 AM	Tube furnace set to 0
3/11/2010	11:16:04 AM	Helium valve closed
3/11/2010	11:16:04 AM	H2 valve closed
3/11/2010	11:16:04 AM	BCl3 valve closed
3/11/2010	11:16:04 AM	PH3 valve closed
3/11/2010	11:16:04 AM	SiCl4 pre valve closed
3/11/2010	11:16:04 AM	SiCl4 post valve closed
3/11/2010	11:16:04 AM	Main Vac valve closed
3/11/2010	11:16:04 AM	Bubbler valve closed
3/11/2010	11:16:04 AM	Bypass valve opened
3/11/2010	11:16:04 AM	Helium MFC set to  0.000000
3/11/2010	11:16:04 AM	H2 MFC set to  0.000000
3/11/2010	11:16:04 AM	BCl3 MFC set to  0.000000
3/11/2010	11:16:04 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:16:04 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:16:04 AM	Tube furnace set to 0
3/11/2010	11:16:26 AM	Helium valve closed
3/11/2010	11:16:26 AM	H2 valve closed
3/11/2010	11:16:26 AM	BCl3 valve closed
3/11/2010	11:16:26 AM	PH3 valve closed
3/11/2010	11:16:26 AM	SiCl4 pre valve closed
3/11/2010	11:16:26 AM	SiCl4 post valve closed
3/11/2010	11:16:26 AM	Bubbler valve closed
3/11/2010	11:16:26 AM	Main Vac valve opened
3/11/2010	11:16:26 AM	Bypass valve opened
3/11/2010	11:16:26 AM	Helium MFC set to  0.000000
3/11/2010	11:16:26 AM	H2 MFC set to  0.000000
3/11/2010	11:16:26 AM	BCl3 MFC set to  0.000000
3/11/2010	11:16:26 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:16:26 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:16:26 AM	Tube furnace set to 0
3/11/2010	11:21:26 AM	H2 valve closed
3/11/2010	11:21:26 AM	BCl3 valve closed
3/11/2010	11:21:26 AM	PH3 valve closed
3/11/2010	11:21:26 AM	SiCl4 pre valve closed
3/11/2010	11:21:26 AM	SiCl4 post valve closed
3/11/2010	11:21:26 AM	Main Vac valve closed
3/11/2010	11:21:26 AM	Bypass valve closed
3/11/2010	11:21:26 AM	Bubbler valve closed
3/11/2010	11:21:26 AM	Helium valve opened
3/11/2010	11:21:26 AM	Helium MFC set to  500.000000
3/11/2010	11:21:26 AM	H2 MFC set to  0.000000
3/11/2010	11:21:26 AM	BCl3 MFC set to  0.000000
3/11/2010	11:21:26 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:21:26 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:21:26 AM	Tube furnace set to 0
3/11/2010	11:22:49 AM	Helium valve closed
3/11/2010	11:22:49 AM	H2 valve closed
3/11/2010	11:22:49 AM	BCl3 valve closed
3/11/2010	11:22:49 AM	PH3 valve closed
3/11/2010	11:22:49 AM	SiCl4 pre valve closed
3/11/2010	11:22:49 AM	SiCl4 post valve closed
3/11/2010	11:22:49 AM	Main Vac valve closed
3/11/2010	11:22:49 AM	Bypass valve closed
3/11/2010	11:22:49 AM	Bubbler valve closed
3/11/2010	11:22:49 AM	Helium MFC set to  0.000000
3/11/2010	11:22:49 AM	H2 MFC set to  0.000000
3/11/2010	11:22:49 AM	BCl3 MFC set to  0.000000
3/11/2010	11:22:49 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:22:49 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:22:49 AM	Tube furnace set to 0
3/11/2010	11:23:05 AM	Helium valve closed
3/11/2010	11:23:05 AM	H2 valve closed
3/11/2010	11:23:05 AM	BCl3 valve closed
3/11/2010	11:23:05 AM	PH3 valve closed
3/11/2010	11:23:05 AM	SiCl4 pre valve closed
3/11/2010	11:23:05 AM	SiCl4 post valve closed
3/11/2010	11:23:05 AM	Main Vac valve closed
3/11/2010	11:23:05 AM	Bubbler valve closed
3/11/2010	11:23:05 AM	Bypass valve opened
3/11/2010	11:23:05 AM	Helium MFC set to  0.000000
3/11/2010	11:23:05 AM	H2 MFC set to  0.000000
3/11/2010	11:23:05 AM	BCl3 MFC set to  0.000000
3/11/2010	11:23:05 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:23:05 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:23:05 AM	Tube furnace set to 0
3/11/2010	11:23:27 AM	Helium valve closed
3/11/2010	11:23:27 AM	H2 valve closed
3/11/2010	11:23:27 AM	BCl3 valve closed
3/11/2010	11:23:27 AM	PH3 valve closed
3/11/2010	11:23:27 AM	SiCl4 pre valve closed
3/11/2010	11:23:27 AM	SiCl4 post valve closed
3/11/2010	11:23:27 AM	Bubbler valve closed
3/11/2010	11:23:27 AM	Main Vac valve opened
3/11/2010	11:23:27 AM	Bypass valve opened
3/11/2010	11:23:27 AM	Helium MFC set to  0.000000
3/11/2010	11:23:27 AM	H2 MFC set to  0.000000
3/11/2010	11:23:27 AM	BCl3 MFC set to  0.000000
3/11/2010	11:23:27 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:23:27 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:23:27 AM	Tube furnace set to 0
3/11/2010	11:28:27 AM	H2 valve closed
3/11/2010	11:28:27 AM	BCl3 valve closed
3/11/2010	11:28:27 AM	PH3 valve closed
3/11/2010	11:28:27 AM	SiCl4 pre valve closed
3/11/2010	11:28:27 AM	SiCl4 post valve closed
3/11/2010	11:28:27 AM	Main Vac valve closed
3/11/2010	11:28:27 AM	Bypass valve closed
3/11/2010	11:28:27 AM	Bubbler valve closed
3/11/2010	11:28:27 AM	Helium valve opened
3/11/2010	11:28:27 AM	Helium MFC set to  500.000000
3/11/2010	11:28:27 AM	H2 MFC set to  0.000000
3/11/2010	11:28:27 AM	BCl3 MFC set to  0.000000
3/11/2010	11:28:27 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:28:27 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:28:27 AM	Tube furnace set to 0
3/11/2010	11:29:51 AM	Helium valve closed
3/11/2010	11:29:51 AM	H2 valve closed
3/11/2010	11:29:51 AM	BCl3 valve closed
3/11/2010	11:29:51 AM	PH3 valve closed
3/11/2010	11:29:51 AM	SiCl4 pre valve closed
3/11/2010	11:29:51 AM	SiCl4 post valve closed
3/11/2010	11:29:51 AM	Main Vac valve closed
3/11/2010	11:29:51 AM	Bypass valve closed
3/11/2010	11:29:51 AM	Bubbler valve closed
3/11/2010	11:29:51 AM	Helium MFC set to  0.000000
3/11/2010	11:29:51 AM	H2 MFC set to  0.000000
3/11/2010	11:29:51 AM	BCl3 MFC set to  0.000000
3/11/2010	11:29:51 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:29:51 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:29:51 AM	Tube furnace set to 0
3/11/2010	11:30:06 AM	Helium valve closed
3/11/2010	11:30:06 AM	H2 valve closed
3/11/2010	11:30:06 AM	BCl3 valve closed
3/11/2010	11:30:06 AM	PH3 valve closed
3/11/2010	11:30:06 AM	SiCl4 pre valve closed
3/11/2010	11:30:06 AM	SiCl4 post valve closed
3/11/2010	11:30:06 AM	Main Vac valve closed
3/11/2010	11:30:06 AM	Bubbler valve closed
3/11/2010	11:30:06 AM	Bypass valve opened
3/11/2010	11:30:06 AM	Helium MFC set to  0.000000
3/11/2010	11:30:06 AM	H2 MFC set to  0.000000
3/11/2010	11:30:06 AM	BCl3 MFC set to  0.000000
3/11/2010	11:30:06 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:30:06 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:30:06 AM	Tube furnace set to 0
3/11/2010	11:30:28 AM	Helium valve closed
3/11/2010	11:30:28 AM	H2 valve closed
3/11/2010	11:30:28 AM	BCl3 valve closed
3/11/2010	11:30:28 AM	PH3 valve closed
3/11/2010	11:30:28 AM	SiCl4 pre valve closed
3/11/2010	11:30:28 AM	SiCl4 post valve closed
3/11/2010	11:30:28 AM	Bubbler valve closed
3/11/2010	11:30:28 AM	Main Vac valve opened
3/11/2010	11:30:28 AM	Bypass valve opened
3/11/2010	11:30:28 AM	Helium MFC set to  0.000000
3/11/2010	11:30:28 AM	H2 MFC set to  0.000000
3/11/2010	11:30:28 AM	BCl3 MFC set to  0.000000
3/11/2010	11:30:28 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:30:28 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:30:28 AM	Tube furnace set to 0
3/11/2010	11:35:28 AM	Helium valve closed
3/11/2010	11:35:28 AM	H2 valve closed
3/11/2010	11:35:28 AM	BCl3 valve closed
3/11/2010	11:35:28 AM	PH3 valve closed
3/11/2010	11:35:28 AM	SiCl4 pre valve closed
3/11/2010	11:35:28 AM	SiCl4 post valve closed
3/11/2010	11:35:28 AM	Bubbler valve closed
3/11/2010	11:35:28 AM	Main Vac valve opened
3/11/2010	11:35:28 AM	Bypass valve opened
3/11/2010	11:35:28 AM	Helium MFC set to  0.000000
3/11/2010	11:35:28 AM	H2 MFC set to  0.000000
3/11/2010	11:35:28 AM	BCl3 MFC set to  0.000000
3/11/2010	11:35:28 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:35:28 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:35:28 AM	Tube furnace set to 0
3/11/2010	11:35:30 AM	Run finished at 11:35 AM
3/11/2010	11:46:39 AM	Main Vac valve closed
3/11/2010	11:46:42 AM	Bypass valve closed
3/11/2010	11:46:50 AM	Main Vac valve opened
3/11/2010	11:46:51 AM	Bypass valve opened
3/11/2010	11:48:03 AM	Recipe started at 11:48 AM
3/11/2010	11:48:03 AM	Helium valve closed
3/11/2010	11:48:03 AM	BCl3 valve closed
3/11/2010	11:48:03 AM	PH3 valve closed
3/11/2010	11:48:03 AM	SiCl4 pre valve closed
3/11/2010	11:48:03 AM	SiCl4 post valve closed
3/11/2010	11:48:03 AM	Main Vac valve closed
3/11/2010	11:48:03 AM	Bypass valve closed
3/11/2010	11:48:03 AM	Bubbler valve closed
3/11/2010	11:48:03 AM	H2 valve opened
3/11/2010	11:48:03 AM	Helium MFC set to  0.000000
3/11/2010	11:48:03 AM	H2 MFC set to  500.000000
3/11/2010	11:48:03 AM	BCl3 MFC set to  0.000000
3/11/2010	11:48:03 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:48:03 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:48:03 AM	Tube furnace set to 0
3/11/2010	11:49:25 AM	Helium valve closed
3/11/2010	11:49:25 AM	BCl3 valve closed
3/11/2010	11:49:25 AM	PH3 valve closed
3/11/2010	11:49:25 AM	SiCl4 pre valve closed
3/11/2010	11:49:25 AM	SiCl4 post valve closed
3/11/2010	11:49:25 AM	Main Vac valve closed
3/11/2010	11:49:25 AM	Bypass valve closed
3/11/2010	11:49:25 AM	H2 valve opened
3/11/2010	11:49:25 AM	Bubbler valve opened
3/11/2010	11:49:25 AM	Helium MFC set to  0.000000
3/11/2010	11:49:25 AM	H2 MFC set to  500.000000
3/11/2010	11:49:25 AM	BCl3 MFC set to  0.000000
3/11/2010	11:49:25 AM	SiCl4 MFC set to  0.000000
3/11/2010	11:49:25 AM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:49:25 AM	Tube furnace set to 0
3/11/2010	12:09:25 PM	Helium valve closed
3/11/2010	12:09:25 PM	BCl3 valve closed
3/11/2010	12:09:25 PM	PH3 valve closed
3/11/2010	12:09:25 PM	Main Vac valve closed
3/11/2010	12:09:25 PM	Bypass valve closed
3/11/2010	12:09:25 PM	H2 valve opened
3/11/2010	12:09:25 PM	SiCl4 pre valve opened
3/11/2010	12:09:25 PM	SiCl4 post valve opened
3/11/2010	12:09:25 PM	Bubbler valve opened
3/11/2010	12:09:25 PM	Helium MFC set to  0.000000
3/11/2010	12:09:25 PM	H2 MFC set to  500.000000
3/11/2010	12:09:25 PM	BCl3 MFC set to  0.000000
3/11/2010	12:09:25 PM	SiCl4 MFC set to  325.000000
3/11/2010	12:09:25 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:09:25 PM	Tube furnace set to 0
3/11/2010	12:24:25 PM	Helium valve closed
3/11/2010	12:24:25 PM	BCl3 valve closed
3/11/2010	12:24:25 PM	PH3 valve closed
3/11/2010	12:24:25 PM	SiCl4 pre valve closed
3/11/2010	12:24:25 PM	SiCl4 post valve closed
3/11/2010	12:24:25 PM	Main Vac valve closed
3/11/2010	12:24:25 PM	Bypass valve closed
3/11/2010	12:24:25 PM	H2 valve opened
3/11/2010	12:24:25 PM	Bubbler valve opened
3/11/2010	12:24:25 PM	Helium MFC set to  0.000000
3/11/2010	12:24:25 PM	H2 MFC set to  500.000000
3/11/2010	12:24:25 PM	BCl3 MFC set to  0.000000
3/11/2010	12:24:25 PM	SiCl4 MFC set to  0.000000
3/11/2010	12:24:25 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:24:25 PM	Tube furnace set to 0
3/11/2010	12:44:26 PM	H2 valve closed
3/11/2010	12:44:26 PM	BCl3 valve closed
3/11/2010	12:44:26 PM	PH3 valve closed
3/11/2010	12:44:26 PM	SiCl4 pre valve closed
3/11/2010	12:44:26 PM	SiCl4 post valve closed
3/11/2010	12:44:26 PM	Main Vac valve closed
3/11/2010	12:44:26 PM	Bypass valve closed
3/11/2010	12:44:26 PM	Helium valve opened
3/11/2010	12:44:26 PM	Bubbler valve opened
3/11/2010	12:44:26 PM	Helium MFC set to  500.000000
3/11/2010	12:44:26 PM	H2 MFC set to  0.000000
3/11/2010	12:44:26 PM	BCl3 MFC set to  0.000000
3/11/2010	12:44:26 PM	SiCl4 MFC set to  0.000000
3/11/2010	12:44:26 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	12:44:26 PM	Tube furnace set to 0
3/11/2010	1:04:26 PM	Helium valve closed
3/11/2010	1:04:26 PM	H2 valve closed
3/11/2010	1:04:26 PM	BCl3 valve closed
3/11/2010	1:04:26 PM	PH3 valve closed
3/11/2010	1:04:26 PM	SiCl4 pre valve closed
3/11/2010	1:04:26 PM	SiCl4 post valve closed
3/11/2010	1:04:26 PM	Main Vac valve closed
3/11/2010	1:04:26 PM	Bypass valve closed
3/11/2010	1:04:26 PM	Bubbler valve closed
3/11/2010	1:04:26 PM	Helium MFC set to  0.000000
3/11/2010	1:04:26 PM	H2 MFC set to  0.000000
3/11/2010	1:04:26 PM	BCl3 MFC set to  0.000000
3/11/2010	1:04:26 PM	SiCl4 MFC set to  0.000000
3/11/2010	1:04:26 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	1:04:26 PM	Tube furnace set to 0
3/11/2010	1:04:27 PM	Run finished at 1:04 PM
3/11/2010	1:48:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	1:48:34 PM	Recipe started at 1:48 PM
3/11/2010	1:48:34 PM	Helium valve closed
3/11/2010	1:48:34 PM	H2 valve closed
3/11/2010	1:48:34 PM	BCl3 valve closed
3/11/2010	1:48:34 PM	PH3 valve closed
3/11/2010	1:48:34 PM	SiCl4 pre valve closed
3/11/2010	1:48:34 PM	SiCl4 post valve closed
3/11/2010	1:48:34 PM	Main Vac valve closed
3/11/2010	1:48:34 PM	Bubbler valve closed
3/11/2010	1:48:34 PM	Bypass valve opened
3/11/2010	1:48:34 PM	Helium MFC set to  0.000000
3/11/2010	1:48:34 PM	H2 MFC set to  0.000000
3/11/2010	1:48:34 PM	BCl3 MFC set to  0.000000
3/11/2010	1:48:34 PM	SiCl4 MFC set to  0.000000
3/11/2010	1:48:34 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	1:48:34 PM	Tube furnace set to 0
3/11/2010	1:49:06 PM	Helium valve closed
3/11/2010	1:49:06 PM	H2 valve closed
3/11/2010	1:49:06 PM	BCl3 valve closed
3/11/2010	1:49:06 PM	PH3 valve closed
3/11/2010	1:49:06 PM	SiCl4 pre valve closed
3/11/2010	1:49:06 PM	SiCl4 post valve closed
3/11/2010	1:49:06 PM	Bubbler valve closed
3/11/2010	1:49:06 PM	Main Vac valve opened
3/11/2010	1:49:06 PM	Bypass valve opened
3/11/2010	1:49:06 PM	Helium MFC set to  0.000000
3/11/2010	1:49:06 PM	H2 MFC set to  0.000000
3/11/2010	1:49:06 PM	BCl3 MFC set to  0.000000
3/11/2010	1:49:06 PM	SiCl4 MFC set to  0.000000
3/11/2010	1:49:06 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	1:49:06 PM	Tube furnace set to 0
3/11/2010	1:49:06 PM	Run finished at 1:49 PM
3/11/2010	1:49:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	1:51:51 PM	Recipe started at 1:51 PM
3/11/2010	1:51:51 PM	H2 valve closed
3/11/2010	1:51:51 PM	BCl3 valve closed
3/11/2010	1:51:51 PM	PH3 valve closed
3/11/2010	1:51:51 PM	SiCl4 pre valve closed
3/11/2010	1:51:51 PM	SiCl4 post valve closed
3/11/2010	1:51:51 PM	Main Vac valve closed
3/11/2010	1:51:51 PM	Bypass valve closed
3/11/2010	1:51:51 PM	Bubbler valve closed
3/11/2010	1:51:51 PM	Helium valve opened
3/11/2010	1:51:51 PM	Helium MFC set to  500.000000
3/11/2010	1:51:51 PM	H2 MFC set to  0.000000
3/11/2010	1:51:51 PM	BCl3 MFC set to  0.000000
3/11/2010	1:51:51 PM	SiCl4 MFC set to  0.000000
3/11/2010	1:51:51 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	1:51:51 PM	Tube furnace set to 0
3/11/2010	1:53:14 PM	Helium valve closed
3/11/2010	1:53:14 PM	H2 valve closed
3/11/2010	1:53:14 PM	BCl3 valve closed
3/11/2010	1:53:14 PM	PH3 valve closed
3/11/2010	1:53:14 PM	SiCl4 pre valve closed
3/11/2010	1:53:14 PM	SiCl4 post valve closed
3/11/2010	1:53:14 PM	Main Vac valve closed
3/11/2010	1:53:14 PM	Bypass valve closed
3/11/2010	1:53:14 PM	Bubbler valve closed
3/11/2010	1:53:14 PM	Helium MFC set to  0.000000
3/11/2010	1:53:14 PM	H2 MFC set to  0.000000
3/11/2010	1:53:14 PM	BCl3 MFC set to  0.000000
3/11/2010	1:53:14 PM	SiCl4 MFC set to  0.000000
3/11/2010	1:53:14 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	1:53:14 PM	Tube furnace set to 0
3/11/2010	1:53:29 PM	Helium valve closed
3/11/2010	1:53:29 PM	H2 valve closed
3/11/2010	1:53:29 PM	BCl3 valve closed
3/11/2010	1:53:29 PM	PH3 valve closed
3/11/2010	1:53:29 PM	SiCl4 pre valve closed
3/11/2010	1:53:29 PM	SiCl4 post valve closed
3/11/2010	1:53:29 PM	Main Vac valve closed
3/11/2010	1:53:29 PM	Bubbler valve closed
3/11/2010	1:53:29 PM	Bypass valve opened
3/11/2010	1:53:29 PM	Helium MFC set to  0.000000
3/11/2010	1:53:29 PM	H2 MFC set to  0.000000
3/11/2010	1:53:29 PM	BCl3 MFC set to  0.000000
3/11/2010	1:53:29 PM	SiCl4 MFC set to  0.000000
3/11/2010	1:53:29 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	1:53:29 PM	Tube furnace set to 0
3/11/2010	1:53:52 PM	Helium valve closed
3/11/2010	1:53:52 PM	H2 valve closed
3/11/2010	1:53:52 PM	BCl3 valve closed
3/11/2010	1:53:52 PM	PH3 valve closed
3/11/2010	1:53:52 PM	SiCl4 pre valve closed
3/11/2010	1:53:52 PM	SiCl4 post valve closed
3/11/2010	1:53:52 PM	Bubbler valve closed
3/11/2010	1:53:52 PM	Main Vac valve opened
3/11/2010	1:53:52 PM	Bypass valve opened
3/11/2010	1:53:52 PM	Helium MFC set to  0.000000
3/11/2010	1:53:52 PM	H2 MFC set to  0.000000
3/11/2010	1:53:52 PM	BCl3 MFC set to  0.000000
3/11/2010	1:53:52 PM	SiCl4 MFC set to  0.000000
3/11/2010	1:53:52 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	1:53:52 PM	Tube furnace set to 0
3/11/2010	1:58:52 PM	H2 valve closed
3/11/2010	1:58:52 PM	BCl3 valve closed
3/11/2010	1:58:52 PM	PH3 valve closed
3/11/2010	1:58:52 PM	SiCl4 pre valve closed
3/11/2010	1:58:52 PM	SiCl4 post valve closed
3/11/2010	1:58:52 PM	Main Vac valve closed
3/11/2010	1:58:52 PM	Bypass valve closed
3/11/2010	1:58:52 PM	Bubbler valve closed
3/11/2010	1:58:52 PM	Helium valve opened
3/11/2010	1:58:52 PM	Helium MFC set to  500.000000
3/11/2010	1:58:52 PM	H2 MFC set to  0.000000
3/11/2010	1:58:52 PM	BCl3 MFC set to  0.000000
3/11/2010	1:58:52 PM	SiCl4 MFC set to  0.000000
3/11/2010	1:58:52 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	1:58:52 PM	Tube furnace set to 0
3/11/2010	2:00:15 PM	Helium valve closed
3/11/2010	2:00:15 PM	H2 valve closed
3/11/2010	2:00:15 PM	BCl3 valve closed
3/11/2010	2:00:15 PM	PH3 valve closed
3/11/2010	2:00:15 PM	SiCl4 pre valve closed
3/11/2010	2:00:15 PM	SiCl4 post valve closed
3/11/2010	2:00:15 PM	Main Vac valve closed
3/11/2010	2:00:15 PM	Bypass valve closed
3/11/2010	2:00:15 PM	Bubbler valve closed
3/11/2010	2:00:15 PM	Helium MFC set to  0.000000
3/11/2010	2:00:15 PM	H2 MFC set to  0.000000
3/11/2010	2:00:15 PM	BCl3 MFC set to  0.000000
3/11/2010	2:00:15 PM	SiCl4 MFC set to  0.000000
3/11/2010	2:00:15 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:00:15 PM	Tube furnace set to 0
3/11/2010	2:00:30 PM	Helium valve closed
3/11/2010	2:00:30 PM	H2 valve closed
3/11/2010	2:00:30 PM	BCl3 valve closed
3/11/2010	2:00:30 PM	PH3 valve closed
3/11/2010	2:00:30 PM	SiCl4 pre valve closed
3/11/2010	2:00:30 PM	SiCl4 post valve closed
3/11/2010	2:00:30 PM	Main Vac valve closed
3/11/2010	2:00:30 PM	Bubbler valve closed
3/11/2010	2:00:30 PM	Bypass valve opened
3/11/2010	2:00:30 PM	Helium MFC set to  0.000000
3/11/2010	2:00:30 PM	H2 MFC set to  0.000000
3/11/2010	2:00:30 PM	BCl3 MFC set to  0.000000
3/11/2010	2:00:30 PM	SiCl4 MFC set to  0.000000
3/11/2010	2:00:30 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:00:30 PM	Tube furnace set to 0
3/11/2010	2:00:52 PM	Helium valve closed
3/11/2010	2:00:52 PM	H2 valve closed
3/11/2010	2:00:52 PM	BCl3 valve closed
3/11/2010	2:00:52 PM	PH3 valve closed
3/11/2010	2:00:52 PM	SiCl4 pre valve closed
3/11/2010	2:00:52 PM	SiCl4 post valve closed
3/11/2010	2:00:52 PM	Bubbler valve closed
3/11/2010	2:00:52 PM	Main Vac valve opened
3/11/2010	2:00:52 PM	Bypass valve opened
3/11/2010	2:00:52 PM	Helium MFC set to  0.000000
3/11/2010	2:00:52 PM	H2 MFC set to  0.000000
3/11/2010	2:00:52 PM	BCl3 MFC set to  0.000000
3/11/2010	2:00:52 PM	SiCl4 MFC set to  0.000000
3/11/2010	2:00:52 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:00:52 PM	Tube furnace set to 0
3/11/2010	2:05:53 PM	H2 valve closed
3/11/2010	2:05:53 PM	BCl3 valve closed
3/11/2010	2:05:53 PM	PH3 valve closed
3/11/2010	2:05:53 PM	SiCl4 pre valve closed
3/11/2010	2:05:53 PM	SiCl4 post valve closed
3/11/2010	2:05:53 PM	Main Vac valve closed
3/11/2010	2:05:53 PM	Bypass valve closed
3/11/2010	2:05:53 PM	Bubbler valve closed
3/11/2010	2:05:53 PM	Helium valve opened
3/11/2010	2:05:53 PM	Helium MFC set to  500.000000
3/11/2010	2:05:53 PM	H2 MFC set to  0.000000
3/11/2010	2:05:53 PM	BCl3 MFC set to  0.000000
3/11/2010	2:05:53 PM	SiCl4 MFC set to  0.000000
3/11/2010	2:05:53 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:05:53 PM	Tube furnace set to 0
3/11/2010	2:07:16 PM	Helium valve closed
3/11/2010	2:07:16 PM	H2 valve closed
3/11/2010	2:07:16 PM	BCl3 valve closed
3/11/2010	2:07:16 PM	PH3 valve closed
3/11/2010	2:07:16 PM	SiCl4 pre valve closed
3/11/2010	2:07:16 PM	SiCl4 post valve closed
3/11/2010	2:07:16 PM	Main Vac valve closed
3/11/2010	2:07:16 PM	Bypass valve closed
3/11/2010	2:07:16 PM	Bubbler valve closed
3/11/2010	2:07:16 PM	Helium MFC set to  0.000000
3/11/2010	2:07:16 PM	H2 MFC set to  0.000000
3/11/2010	2:07:16 PM	BCl3 MFC set to  0.000000
3/11/2010	2:07:16 PM	SiCl4 MFC set to  0.000000
3/11/2010	2:07:16 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:07:16 PM	Tube furnace set to 0
3/11/2010	2:07:31 PM	Helium valve closed
3/11/2010	2:07:31 PM	H2 valve closed
3/11/2010	2:07:31 PM	BCl3 valve closed
3/11/2010	2:07:31 PM	PH3 valve closed
3/11/2010	2:07:31 PM	SiCl4 pre valve closed
3/11/2010	2:07:31 PM	SiCl4 post valve closed
3/11/2010	2:07:31 PM	Main Vac valve closed
3/11/2010	2:07:31 PM	Bubbler valve closed
3/11/2010	2:07:31 PM	Bypass valve opened
3/11/2010	2:07:31 PM	Helium MFC set to  0.000000
3/11/2010	2:07:31 PM	H2 MFC set to  0.000000
3/11/2010	2:07:31 PM	BCl3 MFC set to  0.000000
3/11/2010	2:07:31 PM	SiCl4 MFC set to  0.000000
3/11/2010	2:07:31 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:07:31 PM	Tube furnace set to 0
3/11/2010	2:07:53 PM	Helium valve closed
3/11/2010	2:07:53 PM	H2 valve closed
3/11/2010	2:07:53 PM	BCl3 valve closed
3/11/2010	2:07:53 PM	PH3 valve closed
3/11/2010	2:07:53 PM	SiCl4 pre valve closed
3/11/2010	2:07:53 PM	SiCl4 post valve closed
3/11/2010	2:07:53 PM	Bubbler valve closed
3/11/2010	2:07:53 PM	Main Vac valve opened
3/11/2010	2:07:53 PM	Bypass valve opened
3/11/2010	2:07:53 PM	Helium MFC set to  0.000000
3/11/2010	2:07:53 PM	H2 MFC set to  0.000000
3/11/2010	2:07:53 PM	BCl3 MFC set to  0.000000
3/11/2010	2:07:53 PM	SiCl4 MFC set to  0.000000
3/11/2010	2:07:53 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:07:53 PM	Tube furnace set to 0
3/11/2010	2:12:54 PM	Helium valve closed
3/11/2010	2:12:54 PM	H2 valve closed
3/11/2010	2:12:54 PM	BCl3 valve closed
3/11/2010	2:12:54 PM	PH3 valve closed
3/11/2010	2:12:54 PM	SiCl4 pre valve closed
3/11/2010	2:12:54 PM	SiCl4 post valve closed
3/11/2010	2:12:54 PM	Bubbler valve closed
3/11/2010	2:12:54 PM	Main Vac valve opened
3/11/2010	2:12:54 PM	Bypass valve opened
3/11/2010	2:12:54 PM	Helium MFC set to  0.000000
3/11/2010	2:12:54 PM	H2 MFC set to  0.000000
3/11/2010	2:12:54 PM	BCl3 MFC set to  0.000000
3/11/2010	2:12:54 PM	SiCl4 MFC set to  0.000000
3/11/2010	2:12:54 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:12:54 PM	Tube furnace set to 0
3/11/2010	2:12:55 PM	Run finished at 2:12 PM
3/11/2010	2:16:07 PM	Main Vac valve closed
3/11/2010	2:16:08 PM	Bypass valve closed
3/11/2010	2:16:19 PM	Bypass valve opened
3/11/2010	2:16:20 PM	Main Vac valve opened
3/11/2010	2:17:17 PM	Recipe started at 2:17 PM
3/11/2010	2:17:17 PM	Helium valve closed
3/11/2010	2:17:17 PM	BCl3 valve closed
3/11/2010	2:17:17 PM	PH3 valve closed
3/11/2010	2:17:17 PM	SiCl4 pre valve closed
3/11/2010	2:17:17 PM	SiCl4 post valve closed
3/11/2010	2:17:17 PM	Main Vac valve closed
3/11/2010	2:17:17 PM	Bypass valve closed
3/11/2010	2:17:17 PM	Bubbler valve closed
3/11/2010	2:17:17 PM	H2 valve opened
3/11/2010	2:17:17 PM	Helium MFC set to  0.000000
3/11/2010	2:17:17 PM	H2 MFC set to  500.000000
3/11/2010	2:17:17 PM	BCl3 MFC set to  0.000000
3/11/2010	2:17:17 PM	SiCl4 MFC set to  0.000000
3/11/2010	2:17:17 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:17:17 PM	Tube furnace set to 0
3/11/2010	2:18:39 PM	Helium valve closed
3/11/2010	2:18:39 PM	BCl3 valve closed
3/11/2010	2:18:39 PM	PH3 valve closed
3/11/2010	2:18:39 PM	SiCl4 pre valve closed
3/11/2010	2:18:39 PM	SiCl4 post valve closed
3/11/2010	2:18:39 PM	Main Vac valve closed
3/11/2010	2:18:39 PM	Bypass valve closed
3/11/2010	2:18:39 PM	H2 valve opened
3/11/2010	2:18:39 PM	Bubbler valve opened
3/11/2010	2:18:39 PM	Helium MFC set to  0.000000
3/11/2010	2:18:39 PM	H2 MFC set to  500.000000
3/11/2010	2:18:39 PM	BCl3 MFC set to  0.000000
3/11/2010	2:18:39 PM	SiCl4 MFC set to  0.000000
3/11/2010	2:18:39 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:18:39 PM	Tube furnace set to 0
3/11/2010	2:38:40 PM	Helium valve closed
3/11/2010	2:38:40 PM	BCl3 valve closed
3/11/2010	2:38:40 PM	PH3 valve closed
3/11/2010	2:38:40 PM	Main Vac valve closed
3/11/2010	2:38:40 PM	Bypass valve closed
3/11/2010	2:38:40 PM	H2 valve opened
3/11/2010	2:38:40 PM	SiCl4 pre valve opened
3/11/2010	2:38:40 PM	SiCl4 post valve opened
3/11/2010	2:38:40 PM	Bubbler valve opened
3/11/2010	2:38:40 PM	Helium MFC set to  0.000000
3/11/2010	2:38:40 PM	H2 MFC set to  500.000000
3/11/2010	2:38:40 PM	BCl3 MFC set to  0.000000
3/11/2010	2:38:40 PM	SiCl4 MFC set to  325.000000
3/11/2010	2:38:40 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:38:40 PM	Tube furnace set to 0
3/11/2010	2:53:40 PM	Helium valve closed
3/11/2010	2:53:40 PM	BCl3 valve closed
3/11/2010	2:53:40 PM	PH3 valve closed
3/11/2010	2:53:40 PM	SiCl4 pre valve closed
3/11/2010	2:53:40 PM	SiCl4 post valve closed
3/11/2010	2:53:40 PM	Main Vac valve closed
3/11/2010	2:53:40 PM	Bypass valve closed
3/11/2010	2:53:40 PM	H2 valve opened
3/11/2010	2:53:40 PM	Bubbler valve opened
3/11/2010	2:53:40 PM	Helium MFC set to  0.000000
3/11/2010	2:53:40 PM	H2 MFC set to  500.000000
3/11/2010	2:53:40 PM	BCl3 MFC set to  0.000000
3/11/2010	2:53:40 PM	SiCl4 MFC set to  0.000000
3/11/2010	2:53:40 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	2:53:40 PM	Tube furnace set to 0
3/11/2010	3:13:40 PM	H2 valve closed
3/11/2010	3:13:40 PM	BCl3 valve closed
3/11/2010	3:13:40 PM	PH3 valve closed
3/11/2010	3:13:40 PM	SiCl4 pre valve closed
3/11/2010	3:13:40 PM	SiCl4 post valve closed
3/11/2010	3:13:40 PM	Main Vac valve closed
3/11/2010	3:13:40 PM	Bypass valve closed
3/11/2010	3:13:40 PM	Helium valve opened
3/11/2010	3:13:40 PM	Bubbler valve opened
3/11/2010	3:13:40 PM	Helium MFC set to  500.000000
3/11/2010	3:13:40 PM	H2 MFC set to  0.000000
3/11/2010	3:13:40 PM	BCl3 MFC set to  0.000000
3/11/2010	3:13:40 PM	SiCl4 MFC set to  0.000000
3/11/2010	3:13:40 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:13:40 PM	Tube furnace set to 0
3/11/2010	3:33:41 PM	Helium valve closed
3/11/2010	3:33:41 PM	H2 valve closed
3/11/2010	3:33:41 PM	BCl3 valve closed
3/11/2010	3:33:41 PM	PH3 valve closed
3/11/2010	3:33:41 PM	SiCl4 pre valve closed
3/11/2010	3:33:41 PM	SiCl4 post valve closed
3/11/2010	3:33:41 PM	Main Vac valve closed
3/11/2010	3:33:41 PM	Bypass valve closed
3/11/2010	3:33:41 PM	Bubbler valve closed
3/11/2010	3:33:41 PM	Helium MFC set to  0.000000
3/11/2010	3:33:41 PM	H2 MFC set to  0.000000
3/11/2010	3:33:41 PM	BCl3 MFC set to  0.000000
3/11/2010	3:33:41 PM	SiCl4 MFC set to  0.000000
3/11/2010	3:33:41 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:33:41 PM	Tube furnace set to 0
3/11/2010	3:33:41 PM	Run finished at 3:33 PM
3/11/2010	3:42:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	3:42:58 PM	Recipe started at 3:42 PM
3/11/2010	3:42:58 PM	Helium valve closed
3/11/2010	3:42:58 PM	H2 valve closed
3/11/2010	3:42:58 PM	BCl3 valve closed
3/11/2010	3:42:58 PM	PH3 valve closed
3/11/2010	3:42:58 PM	SiCl4 pre valve closed
3/11/2010	3:42:58 PM	SiCl4 post valve closed
3/11/2010	3:42:58 PM	Main Vac valve closed
3/11/2010	3:42:58 PM	Bubbler valve closed
3/11/2010	3:42:58 PM	Bypass valve opened
3/11/2010	3:42:58 PM	Helium MFC set to  0.000000
3/11/2010	3:42:58 PM	H2 MFC set to  0.000000
3/11/2010	3:42:58 PM	BCl3 MFC set to  0.000000
3/11/2010	3:42:58 PM	SiCl4 MFC set to  0.000000
3/11/2010	3:42:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:42:58 PM	Tube furnace set to 0
3/11/2010	3:43:29 PM	Helium valve closed
3/11/2010	3:43:29 PM	H2 valve closed
3/11/2010	3:43:29 PM	BCl3 valve closed
3/11/2010	3:43:29 PM	PH3 valve closed
3/11/2010	3:43:29 PM	SiCl4 pre valve closed
3/11/2010	3:43:29 PM	SiCl4 post valve closed
3/11/2010	3:43:29 PM	Bubbler valve closed
3/11/2010	3:43:29 PM	Main Vac valve opened
3/11/2010	3:43:29 PM	Bypass valve opened
3/11/2010	3:43:29 PM	Helium MFC set to  0.000000
3/11/2010	3:43:29 PM	H2 MFC set to  0.000000
3/11/2010	3:43:29 PM	BCl3 MFC set to  0.000000
3/11/2010	3:43:29 PM	SiCl4 MFC set to  0.000000
3/11/2010	3:43:29 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:43:29 PM	Tube furnace set to 0
3/11/2010	3:43:29 PM	Run finished at 3:43 PM
3/11/2010	3:43:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	3:46:01 PM	Recipe started at 3:45 PM
3/11/2010	3:46:01 PM	H2 valve closed
3/11/2010	3:46:01 PM	BCl3 valve closed
3/11/2010	3:46:01 PM	PH3 valve closed
3/11/2010	3:46:01 PM	SiCl4 pre valve closed
3/11/2010	3:46:01 PM	SiCl4 post valve closed
3/11/2010	3:46:01 PM	Main Vac valve closed
3/11/2010	3:46:01 PM	Bypass valve closed
3/11/2010	3:46:01 PM	Bubbler valve closed
3/11/2010	3:46:01 PM	Helium valve opened
3/11/2010	3:46:01 PM	Helium MFC set to  500.000000
3/11/2010	3:46:01 PM	H2 MFC set to  0.000000
3/11/2010	3:46:01 PM	BCl3 MFC set to  0.000000
3/11/2010	3:46:01 PM	SiCl4 MFC set to  0.000000
3/11/2010	3:46:01 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:46:01 PM	Tube furnace set to 0
3/11/2010	3:47:23 PM	Helium valve closed
3/11/2010	3:47:23 PM	H2 valve closed
3/11/2010	3:47:23 PM	BCl3 valve closed
3/11/2010	3:47:23 PM	PH3 valve closed
3/11/2010	3:47:23 PM	SiCl4 pre valve closed
3/11/2010	3:47:23 PM	SiCl4 post valve closed
3/11/2010	3:47:23 PM	Main Vac valve closed
3/11/2010	3:47:23 PM	Bypass valve closed
3/11/2010	3:47:23 PM	Bubbler valve closed
3/11/2010	3:47:23 PM	Helium MFC set to  0.000000
3/11/2010	3:47:23 PM	H2 MFC set to  0.000000
3/11/2010	3:47:23 PM	BCl3 MFC set to  0.000000
3/11/2010	3:47:23 PM	SiCl4 MFC set to  0.000000
3/11/2010	3:47:23 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:47:23 PM	Tube furnace set to 0
3/11/2010	3:47:38 PM	Helium valve closed
3/11/2010	3:47:38 PM	H2 valve closed
3/11/2010	3:47:38 PM	BCl3 valve closed
3/11/2010	3:47:38 PM	PH3 valve closed
3/11/2010	3:47:38 PM	SiCl4 pre valve closed
3/11/2010	3:47:38 PM	SiCl4 post valve closed
3/11/2010	3:47:38 PM	Main Vac valve closed
3/11/2010	3:47:38 PM	Bubbler valve closed
3/11/2010	3:47:38 PM	Bypass valve opened
3/11/2010	3:47:38 PM	Helium MFC set to  0.000000
3/11/2010	3:47:38 PM	H2 MFC set to  0.000000
3/11/2010	3:47:38 PM	BCl3 MFC set to  0.000000
3/11/2010	3:47:38 PM	SiCl4 MFC set to  0.000000
3/11/2010	3:47:38 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:47:38 PM	Tube furnace set to 0
3/11/2010	3:48:00 PM	Helium valve closed
3/11/2010	3:48:00 PM	H2 valve closed
3/11/2010	3:48:00 PM	BCl3 valve closed
3/11/2010	3:48:00 PM	PH3 valve closed
3/11/2010	3:48:00 PM	SiCl4 pre valve closed
3/11/2010	3:48:00 PM	SiCl4 post valve closed
3/11/2010	3:48:00 PM	Bubbler valve closed
3/11/2010	3:48:00 PM	Main Vac valve opened
3/11/2010	3:48:00 PM	Bypass valve opened
3/11/2010	3:48:00 PM	Helium MFC set to  0.000000
3/11/2010	3:48:00 PM	H2 MFC set to  0.000000
3/11/2010	3:48:00 PM	BCl3 MFC set to  0.000000
3/11/2010	3:48:00 PM	SiCl4 MFC set to  0.000000
3/11/2010	3:48:00 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:48:00 PM	Tube furnace set to 0
3/11/2010	3:53:00 PM	H2 valve closed
3/11/2010	3:53:00 PM	BCl3 valve closed
3/11/2010	3:53:00 PM	PH3 valve closed
3/11/2010	3:53:00 PM	SiCl4 pre valve closed
3/11/2010	3:53:00 PM	SiCl4 post valve closed
3/11/2010	3:53:00 PM	Main Vac valve closed
3/11/2010	3:53:00 PM	Bypass valve closed
3/11/2010	3:53:00 PM	Bubbler valve closed
3/11/2010	3:53:00 PM	Helium valve opened
3/11/2010	3:53:00 PM	Helium MFC set to  500.000000
3/11/2010	3:53:00 PM	H2 MFC set to  0.000000
3/11/2010	3:53:00 PM	BCl3 MFC set to  0.000000
3/11/2010	3:53:00 PM	SiCl4 MFC set to  0.000000
3/11/2010	3:53:00 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:53:00 PM	Tube furnace set to 0
3/11/2010	3:54:22 PM	Helium valve closed
3/11/2010	3:54:22 PM	H2 valve closed
3/11/2010	3:54:22 PM	BCl3 valve closed
3/11/2010	3:54:22 PM	PH3 valve closed
3/11/2010	3:54:22 PM	SiCl4 pre valve closed
3/11/2010	3:54:22 PM	SiCl4 post valve closed
3/11/2010	3:54:22 PM	Main Vac valve closed
3/11/2010	3:54:22 PM	Bypass valve closed
3/11/2010	3:54:22 PM	Bubbler valve closed
3/11/2010	3:54:22 PM	Helium MFC set to  0.000000
3/11/2010	3:54:22 PM	H2 MFC set to  0.000000
3/11/2010	3:54:22 PM	BCl3 MFC set to  0.000000
3/11/2010	3:54:22 PM	SiCl4 MFC set to  0.000000
3/11/2010	3:54:22 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:54:22 PM	Tube furnace set to 0
3/11/2010	3:54:38 PM	Helium valve closed
3/11/2010	3:54:38 PM	H2 valve closed
3/11/2010	3:54:38 PM	BCl3 valve closed
3/11/2010	3:54:38 PM	PH3 valve closed
3/11/2010	3:54:38 PM	SiCl4 pre valve closed
3/11/2010	3:54:38 PM	SiCl4 post valve closed
3/11/2010	3:54:38 PM	Main Vac valve closed
3/11/2010	3:54:38 PM	Bubbler valve closed
3/11/2010	3:54:38 PM	Bypass valve opened
3/11/2010	3:54:38 PM	Helium MFC set to  0.000000
3/11/2010	3:54:38 PM	H2 MFC set to  0.000000
3/11/2010	3:54:38 PM	BCl3 MFC set to  0.000000
3/11/2010	3:54:38 PM	SiCl4 MFC set to  0.000000
3/11/2010	3:54:38 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:54:38 PM	Tube furnace set to 0
3/11/2010	3:55:00 PM	Helium valve closed
3/11/2010	3:55:00 PM	H2 valve closed
3/11/2010	3:55:00 PM	BCl3 valve closed
3/11/2010	3:55:00 PM	PH3 valve closed
3/11/2010	3:55:00 PM	SiCl4 pre valve closed
3/11/2010	3:55:00 PM	SiCl4 post valve closed
3/11/2010	3:55:00 PM	Bubbler valve closed
3/11/2010	3:55:00 PM	Main Vac valve opened
3/11/2010	3:55:00 PM	Bypass valve opened
3/11/2010	3:55:00 PM	Helium MFC set to  0.000000
3/11/2010	3:55:00 PM	H2 MFC set to  0.000000
3/11/2010	3:55:00 PM	BCl3 MFC set to  0.000000
3/11/2010	3:55:00 PM	SiCl4 MFC set to  0.000000
3/11/2010	3:55:00 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	3:55:00 PM	Tube furnace set to 0
3/11/2010	4:00:00 PM	H2 valve closed
3/11/2010	4:00:00 PM	BCl3 valve closed
3/11/2010	4:00:00 PM	PH3 valve closed
3/11/2010	4:00:00 PM	SiCl4 pre valve closed
3/11/2010	4:00:00 PM	SiCl4 post valve closed
3/11/2010	4:00:00 PM	Main Vac valve closed
3/11/2010	4:00:00 PM	Bypass valve closed
3/11/2010	4:00:00 PM	Bubbler valve closed
3/11/2010	4:00:00 PM	Helium valve opened
3/11/2010	4:00:00 PM	Helium MFC set to  500.000000
3/11/2010	4:00:00 PM	H2 MFC set to  0.000000
3/11/2010	4:00:00 PM	BCl3 MFC set to  0.000000
3/11/2010	4:00:00 PM	SiCl4 MFC set to  0.000000
3/11/2010	4:00:00 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	4:00:00 PM	Tube furnace set to 0
3/11/2010	4:01:22 PM	Helium valve closed
3/11/2010	4:01:22 PM	H2 valve closed
3/11/2010	4:01:22 PM	BCl3 valve closed
3/11/2010	4:01:22 PM	PH3 valve closed
3/11/2010	4:01:22 PM	SiCl4 pre valve closed
3/11/2010	4:01:22 PM	SiCl4 post valve closed
3/11/2010	4:01:22 PM	Main Vac valve closed
3/11/2010	4:01:22 PM	Bypass valve closed
3/11/2010	4:01:22 PM	Bubbler valve closed
3/11/2010	4:01:22 PM	Helium MFC set to  0.000000
3/11/2010	4:01:22 PM	H2 MFC set to  0.000000
3/11/2010	4:01:22 PM	BCl3 MFC set to  0.000000
3/11/2010	4:01:22 PM	SiCl4 MFC set to  0.000000
3/11/2010	4:01:22 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	4:01:22 PM	Tube furnace set to 0
3/11/2010	4:01:38 PM	Helium valve closed
3/11/2010	4:01:38 PM	H2 valve closed
3/11/2010	4:01:38 PM	BCl3 valve closed
3/11/2010	4:01:38 PM	PH3 valve closed
3/11/2010	4:01:38 PM	SiCl4 pre valve closed
3/11/2010	4:01:38 PM	SiCl4 post valve closed
3/11/2010	4:01:38 PM	Main Vac valve closed
3/11/2010	4:01:38 PM	Bubbler valve closed
3/11/2010	4:01:38 PM	Bypass valve opened
3/11/2010	4:01:38 PM	Helium MFC set to  0.000000
3/11/2010	4:01:38 PM	H2 MFC set to  0.000000
3/11/2010	4:01:38 PM	BCl3 MFC set to  0.000000
3/11/2010	4:01:38 PM	SiCl4 MFC set to  0.000000
3/11/2010	4:01:38 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	4:01:38 PM	Tube furnace set to 0
3/11/2010	4:02:00 PM	Helium valve closed
3/11/2010	4:02:00 PM	H2 valve closed
3/11/2010	4:02:00 PM	BCl3 valve closed
3/11/2010	4:02:00 PM	PH3 valve closed
3/11/2010	4:02:00 PM	SiCl4 pre valve closed
3/11/2010	4:02:00 PM	SiCl4 post valve closed
3/11/2010	4:02:00 PM	Bubbler valve closed
3/11/2010	4:02:00 PM	Main Vac valve opened
3/11/2010	4:02:00 PM	Bypass valve opened
3/11/2010	4:02:00 PM	Helium MFC set to  0.000000
3/11/2010	4:02:00 PM	H2 MFC set to  0.000000
3/11/2010	4:02:00 PM	BCl3 MFC set to  0.000000
3/11/2010	4:02:00 PM	SiCl4 MFC set to  0.000000
3/11/2010	4:02:00 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	4:02:00 PM	Tube furnace set to 0
3/11/2010	4:07:00 PM	Helium valve closed
3/11/2010	4:07:00 PM	H2 valve closed
3/11/2010	4:07:00 PM	BCl3 valve closed
3/11/2010	4:07:00 PM	PH3 valve closed
3/11/2010	4:07:00 PM	SiCl4 pre valve closed
3/11/2010	4:07:00 PM	SiCl4 post valve closed
3/11/2010	4:07:00 PM	Bubbler valve closed
3/11/2010	4:07:00 PM	Main Vac valve opened
3/11/2010	4:07:00 PM	Bypass valve opened
3/11/2010	4:07:00 PM	Helium MFC set to  0.000000
3/11/2010	4:07:00 PM	H2 MFC set to  0.000000
3/11/2010	4:07:00 PM	BCl3 MFC set to  0.000000
3/11/2010	4:07:00 PM	SiCl4 MFC set to  0.000000
3/11/2010	4:07:00 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	4:07:00 PM	Tube furnace set to 0
3/11/2010	4:07:01 PM	Run finished at 4:07 PM
3/11/2010	4:09:48 PM	Main Vac valve closed
3/11/2010	4:09:50 PM	Bypass valve closed
3/11/2010	4:10:00 PM	Main Vac valve opened
3/11/2010	4:10:01 PM	Bypass valve opened
3/11/2010	4:11:08 PM	Recipe started at 4:11 PM
3/11/2010	4:11:08 PM	Helium valve closed
3/11/2010	4:11:08 PM	BCl3 valve closed
3/11/2010	4:11:08 PM	PH3 valve closed
3/11/2010	4:11:08 PM	SiCl4 pre valve closed
3/11/2010	4:11:08 PM	SiCl4 post valve closed
3/11/2010	4:11:08 PM	Main Vac valve closed
3/11/2010	4:11:08 PM	Bypass valve closed
3/11/2010	4:11:08 PM	Bubbler valve closed
3/11/2010	4:11:08 PM	H2 valve opened
3/11/2010	4:11:08 PM	Helium MFC set to  0.000000
3/11/2010	4:11:08 PM	H2 MFC set to  500.000000
3/11/2010	4:11:08 PM	BCl3 MFC set to  0.000000
3/11/2010	4:11:08 PM	SiCl4 MFC set to  0.000000
3/11/2010	4:11:08 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	4:11:08 PM	Tube furnace set to 0
3/11/2010	4:12:30 PM	Helium valve closed
3/11/2010	4:12:30 PM	BCl3 valve closed
3/11/2010	4:12:30 PM	PH3 valve closed
3/11/2010	4:12:30 PM	SiCl4 pre valve closed
3/11/2010	4:12:30 PM	SiCl4 post valve closed
3/11/2010	4:12:30 PM	Main Vac valve closed
3/11/2010	4:12:30 PM	Bypass valve closed
3/11/2010	4:12:30 PM	H2 valve opened
3/11/2010	4:12:30 PM	Bubbler valve opened
3/11/2010	4:12:30 PM	Helium MFC set to  0.000000
3/11/2010	4:12:30 PM	H2 MFC set to  500.000000
3/11/2010	4:12:30 PM	BCl3 MFC set to  0.000000
3/11/2010	4:12:30 PM	SiCl4 MFC set to  0.000000
3/11/2010	4:12:30 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	4:12:30 PM	Tube furnace set to 0
3/11/2010	4:32:30 PM	Helium valve closed
3/11/2010	4:32:30 PM	BCl3 valve closed
3/11/2010	4:32:30 PM	PH3 valve closed
3/11/2010	4:32:30 PM	Main Vac valve closed
3/11/2010	4:32:30 PM	Bypass valve closed
3/11/2010	4:32:30 PM	H2 valve opened
3/11/2010	4:32:30 PM	SiCl4 pre valve opened
3/11/2010	4:32:30 PM	SiCl4 post valve opened
3/11/2010	4:32:30 PM	Bubbler valve opened
3/11/2010	4:32:30 PM	Helium MFC set to  0.000000
3/11/2010	4:32:30 PM	H2 MFC set to  500.000000
3/11/2010	4:32:30 PM	BCl3 MFC set to  0.000000
3/11/2010	4:32:30 PM	SiCl4 MFC set to  350.000000
3/11/2010	4:32:30 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	4:32:30 PM	Tube furnace set to 0
3/11/2010	4:47:31 PM	Helium valve closed
3/11/2010	4:47:31 PM	BCl3 valve closed
3/11/2010	4:47:31 PM	PH3 valve closed
3/11/2010	4:47:31 PM	SiCl4 pre valve closed
3/11/2010	4:47:31 PM	SiCl4 post valve closed
3/11/2010	4:47:31 PM	Main Vac valve closed
3/11/2010	4:47:31 PM	Bypass valve closed
3/11/2010	4:47:31 PM	H2 valve opened
3/11/2010	4:47:31 PM	Bubbler valve opened
3/11/2010	4:47:31 PM	Helium MFC set to  0.000000
3/11/2010	4:47:31 PM	H2 MFC set to  500.000000
3/11/2010	4:47:31 PM	BCl3 MFC set to  0.000000
3/11/2010	4:47:31 PM	SiCl4 MFC set to  0.000000
3/11/2010	4:47:31 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	4:47:31 PM	Tube furnace set to 0
3/11/2010	4:49:02 PM	H2 valve closed
3/11/2010	4:49:02 PM	BCl3 valve closed
3/11/2010	4:49:02 PM	PH3 valve closed
3/11/2010	4:49:02 PM	SiCl4 pre valve closed
3/11/2010	4:49:02 PM	SiCl4 post valve closed
3/11/2010	4:49:02 PM	Main Vac valve closed
3/11/2010	4:49:02 PM	Bypass valve closed
3/11/2010	4:49:02 PM	Helium valve opened
3/11/2010	4:49:02 PM	Bubbler valve opened
3/11/2010	4:49:02 PM	Helium MFC set to  500.000000
3/11/2010	4:49:02 PM	H2 MFC set to  0.000000
3/11/2010	4:49:02 PM	BCl3 MFC set to  0.000000
3/11/2010	4:49:02 PM	SiCl4 MFC set to  0.000000
3/11/2010	4:49:02 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	4:49:02 PM	Tube furnace set to 0
3/11/2010	5:04:42 PM	Run aborted at 5:04 PM
3/11/2010	5:04:42 PM	Helium valve closed
3/11/2010	5:04:42 PM	H2 valve closed
3/11/2010	5:04:42 PM	BCl3 valve closed
3/11/2010	5:04:42 PM	PH3 valve closed
3/11/2010	5:04:42 PM	SiCl4 pre valve closed
3/11/2010	5:04:42 PM	SiCl4 post valve closed
3/11/2010	5:04:42 PM	Bypass valve closed
3/11/2010	5:04:42 PM	Main Vac valve closed
3/11/2010	5:04:42 PM	Bubbler valve closed
3/11/2010	5:04:42 PM	Helium MFC set to  0.000000
3/11/2010	5:04:42 PM	H2 MFC set to  0.000000
3/11/2010	5:04:42 PM	BCl3 MFC set to  0.000000
3/11/2010	5:04:42 PM	SiCl4 MFC set to  0.000000
3/11/2010	5:04:42 PM	Tube furnace set to 0
3/11/2010	5:13:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	5:13:25 PM	Recipe started at 5:13 PM
3/11/2010	5:13:25 PM	Helium valve closed
3/11/2010	5:13:25 PM	H2 valve closed
3/11/2010	5:13:25 PM	BCl3 valve closed
3/11/2010	5:13:25 PM	PH3 valve closed
3/11/2010	5:13:25 PM	SiCl4 pre valve closed
3/11/2010	5:13:25 PM	SiCl4 post valve closed
3/11/2010	5:13:25 PM	Main Vac valve closed
3/11/2010	5:13:25 PM	Bubbler valve closed
3/11/2010	5:13:25 PM	Bypass valve opened
3/11/2010	5:13:25 PM	Helium MFC set to  0.000000
3/11/2010	5:13:25 PM	H2 MFC set to  0.000000
3/11/2010	5:13:25 PM	BCl3 MFC set to  0.000000
3/11/2010	5:13:25 PM	SiCl4 MFC set to  0.000000
3/11/2010	5:13:25 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	5:13:25 PM	Tube furnace set to 0
3/11/2010	5:13:56 PM	Helium valve closed
3/11/2010	5:13:56 PM	H2 valve closed
3/11/2010	5:13:56 PM	BCl3 valve closed
3/11/2010	5:13:56 PM	PH3 valve closed
3/11/2010	5:13:56 PM	SiCl4 pre valve closed
3/11/2010	5:13:56 PM	SiCl4 post valve closed
3/11/2010	5:13:56 PM	Bubbler valve closed
3/11/2010	5:13:56 PM	Main Vac valve opened
3/11/2010	5:13:56 PM	Bypass valve opened
3/11/2010	5:13:56 PM	Helium MFC set to  0.000000
3/11/2010	5:13:56 PM	H2 MFC set to  0.000000
3/11/2010	5:13:56 PM	BCl3 MFC set to  0.000000
3/11/2010	5:13:56 PM	SiCl4 MFC set to  0.000000
3/11/2010	5:13:56 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	5:13:56 PM	Tube furnace set to 0
3/11/2010	5:13:57 PM	Run finished at 5:13 PM
3/11/2010	5:13:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	5:22:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	5:22:39 PM	Recipe started at 5:22 PM
3/11/2010	5:22:39 PM	H2 valve closed
3/11/2010	5:22:39 PM	BCl3 valve closed
3/11/2010	5:22:39 PM	PH3 valve closed
3/11/2010	5:22:39 PM	SiCl4 pre valve closed
3/11/2010	5:22:39 PM	SiCl4 post valve closed
3/11/2010	5:22:39 PM	Main Vac valve closed
3/11/2010	5:22:39 PM	Bypass valve closed
3/11/2010	5:22:39 PM	Bubbler valve closed
3/11/2010	5:22:39 PM	Helium valve opened
3/11/2010	5:22:39 PM	Helium MFC set to  500.000000
3/11/2010	5:22:39 PM	H2 MFC set to  0.000000
3/11/2010	5:22:39 PM	BCl3 MFC set to  0.000000
3/11/2010	5:22:39 PM	SiCl4 MFC set to  0.000000
3/11/2010	5:22:39 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	5:22:39 PM	Tube furnace set to 0
3/11/2010	5:23:58 PM	Helium valve closed
3/11/2010	5:23:58 PM	H2 valve closed
3/11/2010	5:23:58 PM	BCl3 valve closed
3/11/2010	5:23:58 PM	PH3 valve closed
3/11/2010	5:23:58 PM	SiCl4 pre valve closed
3/11/2010	5:23:58 PM	SiCl4 post valve closed
3/11/2010	5:23:58 PM	Main Vac valve closed
3/11/2010	5:23:58 PM	Bypass valve closed
3/11/2010	5:23:58 PM	Bubbler valve closed
3/11/2010	5:23:58 PM	Helium MFC set to  0.000000
3/11/2010	5:23:58 PM	H2 MFC set to  0.000000
3/11/2010	5:23:58 PM	BCl3 MFC set to  0.000000
3/11/2010	5:23:58 PM	SiCl4 MFC set to  0.000000
3/11/2010	5:23:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	5:23:58 PM	Tube furnace set to 0
3/11/2010	5:23:58 PM	Run finished at 5:23 PM
3/11/2010	5:23:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	5:24:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	5:24:07 PM	Recipe started at 5:24 PM
3/11/2010	5:24:07 PM	Helium valve closed
3/11/2010	5:24:07 PM	H2 valve closed
3/11/2010	5:24:07 PM	BCl3 valve closed
3/11/2010	5:24:07 PM	PH3 valve closed
3/11/2010	5:24:07 PM	SiCl4 pre valve closed
3/11/2010	5:24:07 PM	SiCl4 post valve closed
3/11/2010	5:24:07 PM	Main Vac valve closed
3/11/2010	5:24:07 PM	Bubbler valve closed
3/11/2010	5:24:07 PM	Bypass valve opened
3/11/2010	5:24:07 PM	Helium MFC set to  0.000000
3/11/2010	5:24:07 PM	H2 MFC set to  0.000000
3/11/2010	5:24:07 PM	BCl3 MFC set to  0.000000
3/11/2010	5:24:07 PM	SiCl4 MFC set to  0.000000
3/11/2010	5:24:07 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	5:24:07 PM	Tube furnace set to 0
3/11/2010	5:24:29 PM	Helium valve closed
3/11/2010	5:24:29 PM	H2 valve closed
3/11/2010	5:24:29 PM	BCl3 valve closed
3/11/2010	5:24:29 PM	PH3 valve closed
3/11/2010	5:24:29 PM	SiCl4 pre valve closed
3/11/2010	5:24:29 PM	SiCl4 post valve closed
3/11/2010	5:24:29 PM	Bubbler valve closed
3/11/2010	5:24:29 PM	Main Vac valve opened
3/11/2010	5:24:29 PM	Bypass valve opened
3/11/2010	5:24:29 PM	Helium MFC set to  0.000000
3/11/2010	5:24:29 PM	H2 MFC set to  0.000000
3/11/2010	5:24:29 PM	BCl3 MFC set to  0.000000
3/11/2010	5:24:29 PM	SiCl4 MFC set to  0.000000
3/11/2010	5:24:29 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	5:24:29 PM	Tube furnace set to 0
3/11/2010	5:24:29 PM	Run finished at 5:24 PM
3/11/2010	5:24:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	5:25:52 PM	Main Vac valve closed
3/11/2010	5:25:54 PM	Bypass valve closed
3/11/2010	5:26:03 PM	Bypass valve opened
3/11/2010	5:26:04 PM	Main Vac valve opened
3/11/2010	5:28:01 PM	Recipe started at 5:28 PM
3/11/2010	5:28:01 PM	Helium valve closed
3/11/2010	5:28:01 PM	BCl3 valve closed
3/11/2010	5:28:01 PM	PH3 valve closed
3/11/2010	5:28:01 PM	SiCl4 pre valve closed
3/11/2010	5:28:01 PM	SiCl4 post valve closed
3/11/2010	5:28:01 PM	Main Vac valve closed
3/11/2010	5:28:01 PM	Bypass valve closed
3/11/2010	5:28:01 PM	Bubbler valve closed
3/11/2010	5:28:01 PM	H2 valve opened
3/11/2010	5:28:01 PM	Helium MFC set to  0.000000
3/11/2010	5:28:01 PM	H2 MFC set to  500.000000
3/11/2010	5:28:01 PM	BCl3 MFC set to  0.000000
3/11/2010	5:28:01 PM	SiCl4 MFC set to  0.000000
3/11/2010	5:28:01 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	5:28:01 PM	Tube furnace set to 0
3/11/2010	5:29:21 PM	Helium valve closed
3/11/2010	5:29:21 PM	BCl3 valve closed
3/11/2010	5:29:21 PM	PH3 valve closed
3/11/2010	5:29:21 PM	SiCl4 pre valve closed
3/11/2010	5:29:21 PM	SiCl4 post valve closed
3/11/2010	5:29:21 PM	Main Vac valve closed
3/11/2010	5:29:21 PM	Bypass valve closed
3/11/2010	5:29:21 PM	H2 valve opened
3/11/2010	5:29:21 PM	Bubbler valve opened
3/11/2010	5:29:21 PM	Helium MFC set to  0.000000
3/11/2010	5:29:21 PM	H2 MFC set to  500.000000
3/11/2010	5:29:21 PM	BCl3 MFC set to  0.000000
3/11/2010	5:29:21 PM	SiCl4 MFC set to  0.000000
3/11/2010	5:29:21 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	5:29:21 PM	Tube furnace set to 0
3/11/2010	5:49:22 PM	Helium valve closed
3/11/2010	5:49:22 PM	BCl3 valve closed
3/11/2010	5:49:22 PM	PH3 valve closed
3/11/2010	5:49:22 PM	Main Vac valve closed
3/11/2010	5:49:22 PM	Bypass valve closed
3/11/2010	5:49:22 PM	H2 valve opened
3/11/2010	5:49:22 PM	SiCl4 pre valve opened
3/11/2010	5:49:22 PM	SiCl4 post valve opened
3/11/2010	5:49:22 PM	Bubbler valve opened
3/11/2010	5:49:22 PM	Helium MFC set to  0.000000
3/11/2010	5:49:22 PM	H2 MFC set to  500.000000
3/11/2010	5:49:22 PM	BCl3 MFC set to  0.000000
3/11/2010	5:49:22 PM	SiCl4 MFC set to  400.000000
3/11/2010	5:49:22 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	5:49:22 PM	Tube furnace set to 0
3/11/2010	6:04:22 PM	Helium valve closed
3/11/2010	6:04:22 PM	BCl3 valve closed
3/11/2010	6:04:22 PM	PH3 valve closed
3/11/2010	6:04:22 PM	SiCl4 pre valve closed
3/11/2010	6:04:22 PM	SiCl4 post valve closed
3/11/2010	6:04:22 PM	Main Vac valve closed
3/11/2010	6:04:22 PM	Bypass valve closed
3/11/2010	6:04:22 PM	H2 valve opened
3/11/2010	6:04:22 PM	Bubbler valve opened
3/11/2010	6:04:22 PM	Helium MFC set to  0.000000
3/11/2010	6:04:22 PM	H2 MFC set to  500.000000
3/11/2010	6:04:22 PM	BCl3 MFC set to  0.000000
3/11/2010	6:04:22 PM	SiCl4 MFC set to  0.000000
3/11/2010	6:04:22 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	6:04:22 PM	Tube furnace set to 0
3/11/2010	6:24:23 PM	H2 valve closed
3/11/2010	6:24:23 PM	BCl3 valve closed
3/11/2010	6:24:23 PM	PH3 valve closed
3/11/2010	6:24:23 PM	SiCl4 pre valve closed
3/11/2010	6:24:23 PM	SiCl4 post valve closed
3/11/2010	6:24:23 PM	Main Vac valve closed
3/11/2010	6:24:23 PM	Bypass valve closed
3/11/2010	6:24:23 PM	Helium valve opened
3/11/2010	6:24:23 PM	Bubbler valve opened
3/11/2010	6:24:23 PM	Helium MFC set to  500.000000
3/11/2010	6:24:23 PM	H2 MFC set to  0.000000
3/11/2010	6:24:23 PM	BCl3 MFC set to  0.000000
3/11/2010	6:24:23 PM	SiCl4 MFC set to  0.000000
3/11/2010	6:24:23 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	6:24:23 PM	Tube furnace set to 0
3/11/2010	6:35:23 PM	Helium valve closed
3/11/2010	6:35:23 PM	H2 valve closed
3/11/2010	6:35:23 PM	BCl3 valve closed
3/11/2010	6:35:23 PM	PH3 valve closed
3/11/2010	6:35:23 PM	SiCl4 pre valve closed
3/11/2010	6:35:23 PM	SiCl4 post valve closed
3/11/2010	6:35:23 PM	Main Vac valve closed
3/11/2010	6:35:23 PM	Bypass valve closed
3/11/2010	6:35:23 PM	Bubbler valve closed
3/11/2010	6:35:23 PM	Helium MFC set to  0.000000
3/11/2010	6:35:23 PM	H2 MFC set to  0.000000
3/11/2010	6:35:23 PM	BCl3 MFC set to  0.000000
3/11/2010	6:35:23 PM	SiCl4 MFC set to  0.000000
3/11/2010	6:35:23 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	6:35:23 PM	Tube furnace set to 0
3/11/2010	6:35:23 PM	Run finished at 6:35 PM
3/11/2010	6:35:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	6:35:31 PM	Recipe started at 6:35 PM
3/11/2010	6:35:31 PM	H2 valve closed
3/11/2010	6:35:31 PM	BCl3 valve closed
3/11/2010	6:35:31 PM	PH3 valve closed
3/11/2010	6:35:31 PM	SiCl4 pre valve closed
3/11/2010	6:35:31 PM	SiCl4 post valve closed
3/11/2010	6:35:31 PM	Main Vac valve closed
3/11/2010	6:35:31 PM	Bypass valve closed
3/11/2010	6:35:31 PM	Bubbler valve closed
3/11/2010	6:35:31 PM	Helium valve opened
3/11/2010	6:35:31 PM	Helium MFC set to  500.000000
3/11/2010	6:35:31 PM	H2 MFC set to  0.000000
3/11/2010	6:35:31 PM	BCl3 MFC set to  0.000000
3/11/2010	6:35:31 PM	SiCl4 MFC set to  0.000000
3/11/2010	6:35:31 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	6:35:31 PM	Tube furnace set to 0
3/11/2010	6:35:31 PM	Helium valve closed
3/11/2010	6:35:31 PM	H2 valve closed
3/11/2010	6:35:31 PM	BCl3 valve closed
3/11/2010	6:35:31 PM	PH3 valve closed
3/11/2010	6:35:31 PM	SiCl4 pre valve closed
3/11/2010	6:35:31 PM	SiCl4 post valve closed
3/11/2010	6:35:31 PM	Main Vac valve closed
3/11/2010	6:35:31 PM	Bypass valve closed
3/11/2010	6:35:31 PM	Bubbler valve closed
3/11/2010	6:35:31 PM	Helium MFC set to  0.000000
3/11/2010	6:35:31 PM	H2 MFC set to  0.000000
3/11/2010	6:35:31 PM	BCl3 MFC set to  0.000000
3/11/2010	6:35:31 PM	SiCl4 MFC set to  0.000000
3/11/2010	6:35:31 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	6:35:31 PM	Tube furnace set to 0
3/11/2010	6:35:31 PM	Run finished at 6:35 PM
3/11/2010	6:35:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	6:51:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	6:51:49 PM	Recipe started at 6:51 PM
3/11/2010	6:51:49 PM	Helium valve closed
3/11/2010	6:51:49 PM	H2 valve closed
3/11/2010	6:51:49 PM	BCl3 valve closed
3/11/2010	6:51:49 PM	PH3 valve closed
3/11/2010	6:51:49 PM	SiCl4 pre valve closed
3/11/2010	6:51:49 PM	SiCl4 post valve closed
3/11/2010	6:51:49 PM	Main Vac valve closed
3/11/2010	6:51:49 PM	Bubbler valve closed
3/11/2010	6:51:49 PM	Bypass valve opened
3/11/2010	6:51:49 PM	Helium MFC set to  0.000000
3/11/2010	6:51:49 PM	H2 MFC set to  0.000000
3/11/2010	6:51:49 PM	BCl3 MFC set to  0.000000
3/11/2010	6:51:49 PM	SiCl4 MFC set to  0.000000
3/11/2010	6:51:49 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	6:51:49 PM	Tube furnace set to 0
3/11/2010	6:52:21 PM	Helium valve closed
3/11/2010	6:52:21 PM	H2 valve closed
3/11/2010	6:52:21 PM	BCl3 valve closed
3/11/2010	6:52:21 PM	PH3 valve closed
3/11/2010	6:52:21 PM	SiCl4 pre valve closed
3/11/2010	6:52:21 PM	SiCl4 post valve closed
3/11/2010	6:52:21 PM	Bubbler valve closed
3/11/2010	6:52:21 PM	Main Vac valve opened
3/11/2010	6:52:21 PM	Bypass valve opened
3/11/2010	6:52:21 PM	Helium MFC set to  0.000000
3/11/2010	6:52:21 PM	H2 MFC set to  0.000000
3/11/2010	6:52:21 PM	BCl3 MFC set to  0.000000
3/11/2010	6:52:21 PM	SiCl4 MFC set to  0.000000
3/11/2010	6:52:21 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	6:52:21 PM	Tube furnace set to 0
3/11/2010	6:52:21 PM	Run finished at 6:52 PM
3/11/2010	6:52:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	7:30:49 PM	Recipe started at 7:30 PM
3/11/2010	7:30:49 PM	H2 valve closed
3/11/2010	7:30:49 PM	BCl3 valve closed
3/11/2010	7:30:49 PM	PH3 valve closed
3/11/2010	7:30:49 PM	SiCl4 pre valve closed
3/11/2010	7:30:49 PM	SiCl4 post valve closed
3/11/2010	7:30:49 PM	Main Vac valve closed
3/11/2010	7:30:49 PM	Bypass valve closed
3/11/2010	7:30:49 PM	Bubbler valve closed
3/11/2010	7:30:49 PM	Helium valve opened
3/11/2010	7:30:49 PM	Helium MFC set to  500.000000
3/11/2010	7:30:49 PM	H2 MFC set to  0.000000
3/11/2010	7:30:49 PM	BCl3 MFC set to  0.000000
3/11/2010	7:30:49 PM	SiCl4 MFC set to  0.000000
3/11/2010	7:30:49 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	7:30:49 PM	Tube furnace set to 0
3/11/2010	7:32:03 PM	Helium valve closed
3/11/2010	7:32:03 PM	H2 valve closed
3/11/2010	7:32:03 PM	BCl3 valve closed
3/11/2010	7:32:03 PM	PH3 valve closed
3/11/2010	7:32:03 PM	SiCl4 pre valve closed
3/11/2010	7:32:03 PM	SiCl4 post valve closed
3/11/2010	7:32:03 PM	Main Vac valve closed
3/11/2010	7:32:03 PM	Bypass valve closed
3/11/2010	7:32:03 PM	Bubbler valve closed
3/11/2010	7:32:03 PM	Helium MFC set to  0.000000
3/11/2010	7:32:03 PM	H2 MFC set to  0.000000
3/11/2010	7:32:03 PM	BCl3 MFC set to  0.000000
3/11/2010	7:32:03 PM	SiCl4 MFC set to  0.000000
3/11/2010	7:32:03 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	7:32:03 PM	Tube furnace set to 0
3/11/2010	7:32:18 PM	Helium valve closed
3/11/2010	7:32:18 PM	H2 valve closed
3/11/2010	7:32:18 PM	BCl3 valve closed
3/11/2010	7:32:18 PM	PH3 valve closed
3/11/2010	7:32:18 PM	SiCl4 pre valve closed
3/11/2010	7:32:18 PM	SiCl4 post valve closed
3/11/2010	7:32:18 PM	Main Vac valve closed
3/11/2010	7:32:18 PM	Bubbler valve closed
3/11/2010	7:32:18 PM	Bypass valve opened
3/11/2010	7:32:18 PM	Helium MFC set to  0.000000
3/11/2010	7:32:18 PM	H2 MFC set to  0.000000
3/11/2010	7:32:18 PM	BCl3 MFC set to  0.000000
3/11/2010	7:32:18 PM	SiCl4 MFC set to  0.000000
3/11/2010	7:32:18 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	7:32:18 PM	Tube furnace set to 0
3/11/2010	7:32:38 PM	Helium valve closed
3/11/2010	7:32:38 PM	H2 valve closed
3/11/2010	7:32:38 PM	BCl3 valve closed
3/11/2010	7:32:38 PM	PH3 valve closed
3/11/2010	7:32:38 PM	SiCl4 pre valve closed
3/11/2010	7:32:38 PM	SiCl4 post valve closed
3/11/2010	7:32:38 PM	Bubbler valve closed
3/11/2010	7:32:38 PM	Main Vac valve opened
3/11/2010	7:32:38 PM	Bypass valve opened
3/11/2010	7:32:38 PM	Helium MFC set to  0.000000
3/11/2010	7:32:38 PM	H2 MFC set to  0.000000
3/11/2010	7:32:38 PM	BCl3 MFC set to  0.000000
3/11/2010	7:32:38 PM	SiCl4 MFC set to  0.000000
3/11/2010	7:32:38 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	7:32:38 PM	Tube furnace set to 0
3/11/2010	7:37:39 PM	H2 valve closed
3/11/2010	7:37:39 PM	BCl3 valve closed
3/11/2010	7:37:39 PM	PH3 valve closed
3/11/2010	7:37:39 PM	SiCl4 pre valve closed
3/11/2010	7:37:39 PM	SiCl4 post valve closed
3/11/2010	7:37:39 PM	Main Vac valve closed
3/11/2010	7:37:39 PM	Bypass valve closed
3/11/2010	7:37:39 PM	Bubbler valve closed
3/11/2010	7:37:39 PM	Helium valve opened
3/11/2010	7:37:39 PM	Helium MFC set to  500.000000
3/11/2010	7:37:39 PM	H2 MFC set to  0.000000
3/11/2010	7:37:39 PM	BCl3 MFC set to  0.000000
3/11/2010	7:37:39 PM	SiCl4 MFC set to  0.000000
3/11/2010	7:37:39 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	7:37:39 PM	Tube furnace set to 0
3/11/2010	7:38:57 PM	Helium valve closed
3/11/2010	7:38:57 PM	H2 valve closed
3/11/2010	7:38:57 PM	BCl3 valve closed
3/11/2010	7:38:57 PM	PH3 valve closed
3/11/2010	7:38:57 PM	SiCl4 pre valve closed
3/11/2010	7:38:57 PM	SiCl4 post valve closed
3/11/2010	7:38:57 PM	Main Vac valve closed
3/11/2010	7:38:57 PM	Bypass valve closed
3/11/2010	7:38:57 PM	Bubbler valve closed
3/11/2010	7:38:57 PM	Helium MFC set to  0.000000
3/11/2010	7:38:57 PM	H2 MFC set to  0.000000
3/11/2010	7:38:57 PM	BCl3 MFC set to  0.000000
3/11/2010	7:38:57 PM	SiCl4 MFC set to  0.000000
3/11/2010	7:38:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	7:38:57 PM	Tube furnace set to 0
3/11/2010	7:39:13 PM	Helium valve closed
3/11/2010	7:39:13 PM	H2 valve closed
3/11/2010	7:39:13 PM	BCl3 valve closed
3/11/2010	7:39:13 PM	PH3 valve closed
3/11/2010	7:39:13 PM	SiCl4 pre valve closed
3/11/2010	7:39:13 PM	SiCl4 post valve closed
3/11/2010	7:39:13 PM	Main Vac valve closed
3/11/2010	7:39:13 PM	Bubbler valve closed
3/11/2010	7:39:13 PM	Bypass valve opened
3/11/2010	7:39:13 PM	Helium MFC set to  0.000000
3/11/2010	7:39:13 PM	H2 MFC set to  0.000000
3/11/2010	7:39:13 PM	BCl3 MFC set to  0.000000
3/11/2010	7:39:13 PM	SiCl4 MFC set to  0.000000
3/11/2010	7:39:13 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	7:39:13 PM	Tube furnace set to 0
3/11/2010	7:39:34 PM	Helium valve closed
3/11/2010	7:39:34 PM	H2 valve closed
3/11/2010	7:39:34 PM	BCl3 valve closed
3/11/2010	7:39:34 PM	PH3 valve closed
3/11/2010	7:39:34 PM	SiCl4 pre valve closed
3/11/2010	7:39:34 PM	SiCl4 post valve closed
3/11/2010	7:39:34 PM	Bubbler valve closed
3/11/2010	7:39:34 PM	Main Vac valve opened
3/11/2010	7:39:34 PM	Bypass valve opened
3/11/2010	7:39:34 PM	Helium MFC set to  0.000000
3/11/2010	7:39:34 PM	H2 MFC set to  0.000000
3/11/2010	7:39:34 PM	BCl3 MFC set to  0.000000
3/11/2010	7:39:34 PM	SiCl4 MFC set to  0.000000
3/11/2010	7:39:34 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	7:39:34 PM	Tube furnace set to 0
3/11/2010	7:44:34 PM	H2 valve closed
3/11/2010	7:44:34 PM	BCl3 valve closed
3/11/2010	7:44:34 PM	PH3 valve closed
3/11/2010	7:44:34 PM	SiCl4 pre valve closed
3/11/2010	7:44:34 PM	SiCl4 post valve closed
3/11/2010	7:44:34 PM	Main Vac valve closed
3/11/2010	7:44:34 PM	Bypass valve closed
3/11/2010	7:44:34 PM	Bubbler valve closed
3/11/2010	7:44:34 PM	Helium valve opened
3/11/2010	7:44:34 PM	Helium MFC set to  500.000000
3/11/2010	7:44:34 PM	H2 MFC set to  0.000000
3/11/2010	7:44:34 PM	BCl3 MFC set to  0.000000
3/11/2010	7:44:34 PM	SiCl4 MFC set to  0.000000
3/11/2010	7:44:34 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	7:44:34 PM	Tube furnace set to 0
3/11/2010	7:45:55 PM	Helium valve closed
3/11/2010	7:45:55 PM	H2 valve closed
3/11/2010	7:45:55 PM	BCl3 valve closed
3/11/2010	7:45:55 PM	PH3 valve closed
3/11/2010	7:45:55 PM	SiCl4 pre valve closed
3/11/2010	7:45:55 PM	SiCl4 post valve closed
3/11/2010	7:45:55 PM	Main Vac valve closed
3/11/2010	7:45:55 PM	Bypass valve closed
3/11/2010	7:45:55 PM	Bubbler valve closed
3/11/2010	7:45:55 PM	Helium MFC set to  0.000000
3/11/2010	7:45:55 PM	H2 MFC set to  0.000000
3/11/2010	7:45:55 PM	BCl3 MFC set to  0.000000
3/11/2010	7:45:55 PM	SiCl4 MFC set to  0.000000
3/11/2010	7:45:55 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	7:45:55 PM	Tube furnace set to 0
3/11/2010	7:46:10 PM	Helium valve closed
3/11/2010	7:46:10 PM	H2 valve closed
3/11/2010	7:46:10 PM	BCl3 valve closed
3/11/2010	7:46:10 PM	PH3 valve closed
3/11/2010	7:46:10 PM	SiCl4 pre valve closed
3/11/2010	7:46:10 PM	SiCl4 post valve closed
3/11/2010	7:46:10 PM	Main Vac valve closed
3/11/2010	7:46:10 PM	Bubbler valve closed
3/11/2010	7:46:10 PM	Bypass valve opened
3/11/2010	7:46:10 PM	Helium MFC set to  0.000000
3/11/2010	7:46:10 PM	H2 MFC set to  0.000000
3/11/2010	7:46:10 PM	BCl3 MFC set to  0.000000
3/11/2010	7:46:10 PM	SiCl4 MFC set to  0.000000
3/11/2010	7:46:10 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	7:46:10 PM	Tube furnace set to 0
3/11/2010	7:46:32 PM	Helium valve closed
3/11/2010	7:46:32 PM	H2 valve closed
3/11/2010	7:46:32 PM	BCl3 valve closed
3/11/2010	7:46:32 PM	PH3 valve closed
3/11/2010	7:46:32 PM	SiCl4 pre valve closed
3/11/2010	7:46:32 PM	SiCl4 post valve closed
3/11/2010	7:46:32 PM	Bubbler valve closed
3/11/2010	7:46:32 PM	Main Vac valve opened
3/11/2010	7:46:32 PM	Bypass valve opened
3/11/2010	7:46:32 PM	Helium MFC set to  0.000000
3/11/2010	7:46:32 PM	H2 MFC set to  0.000000
3/11/2010	7:46:32 PM	BCl3 MFC set to  0.000000
3/11/2010	7:46:32 PM	SiCl4 MFC set to  0.000000
3/11/2010	7:46:32 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	7:46:32 PM	Tube furnace set to 0
3/11/2010	7:51:32 PM	Helium valve closed
3/11/2010	7:51:32 PM	H2 valve closed
3/11/2010	7:51:32 PM	BCl3 valve closed
3/11/2010	7:51:32 PM	PH3 valve closed
3/11/2010	7:51:32 PM	SiCl4 pre valve closed
3/11/2010	7:51:32 PM	SiCl4 post valve closed
3/11/2010	7:51:32 PM	Bubbler valve closed
3/11/2010	7:51:32 PM	Main Vac valve opened
3/11/2010	7:51:32 PM	Bypass valve opened
3/11/2010	7:51:32 PM	Helium MFC set to  0.000000
3/11/2010	7:51:32 PM	H2 MFC set to  0.000000
3/11/2010	7:51:32 PM	BCl3 MFC set to  0.000000
3/11/2010	7:51:32 PM	SiCl4 MFC set to  0.000000
3/11/2010	7:51:32 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	7:51:32 PM	Tube furnace set to 0
3/11/2010	7:51:33 PM	Run finished at 7:51 PM
3/11/2010	7:59:53 PM	Recipe started at 7:59 PM
3/11/2010	7:59:53 PM	H2 valve closed
3/11/2010	7:59:53 PM	BCl3 valve closed
3/11/2010	7:59:53 PM	PH3 valve closed
3/11/2010	7:59:53 PM	SiCl4 pre valve closed
3/11/2010	7:59:53 PM	SiCl4 post valve closed
3/11/2010	7:59:53 PM	Main Vac valve closed
3/11/2010	7:59:53 PM	Bypass valve closed
3/11/2010	7:59:53 PM	Bubbler valve closed
3/11/2010	7:59:53 PM	Helium valve opened
3/11/2010	7:59:53 PM	Helium MFC set to  500.000000
3/11/2010	7:59:53 PM	H2 MFC set to  0.000000
3/11/2010	7:59:53 PM	BCl3 MFC set to  0.000000
3/11/2010	7:59:53 PM	SiCl4 MFC set to  0.000000
3/11/2010	7:59:53 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	7:59:53 PM	Tube furnace set to 0
3/11/2010	8:01:15 PM	Helium valve closed
3/11/2010	8:01:15 PM	H2 valve closed
3/11/2010	8:01:15 PM	BCl3 valve closed
3/11/2010	8:01:15 PM	PH3 valve closed
3/11/2010	8:01:15 PM	SiCl4 pre valve closed
3/11/2010	8:01:15 PM	SiCl4 post valve closed
3/11/2010	8:01:15 PM	Main Vac valve closed
3/11/2010	8:01:15 PM	Bypass valve closed
3/11/2010	8:01:15 PM	Bubbler valve closed
3/11/2010	8:01:15 PM	Helium MFC set to  0.000000
3/11/2010	8:01:15 PM	H2 MFC set to  0.000000
3/11/2010	8:01:15 PM	BCl3 MFC set to  0.000000
3/11/2010	8:01:15 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:01:15 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:01:15 PM	Tube furnace set to 0
3/11/2010	8:01:30 PM	Helium valve closed
3/11/2010	8:01:30 PM	H2 valve closed
3/11/2010	8:01:30 PM	BCl3 valve closed
3/11/2010	8:01:30 PM	PH3 valve closed
3/11/2010	8:01:30 PM	SiCl4 pre valve closed
3/11/2010	8:01:30 PM	SiCl4 post valve closed
3/11/2010	8:01:30 PM	Main Vac valve closed
3/11/2010	8:01:30 PM	Bubbler valve closed
3/11/2010	8:01:30 PM	Bypass valve opened
3/11/2010	8:01:30 PM	Helium MFC set to  0.000000
3/11/2010	8:01:30 PM	H2 MFC set to  0.000000
3/11/2010	8:01:30 PM	BCl3 MFC set to  0.000000
3/11/2010	8:01:30 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:01:30 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:01:30 PM	Tube furnace set to 0
3/11/2010	8:01:52 PM	Helium valve closed
3/11/2010	8:01:52 PM	H2 valve closed
3/11/2010	8:01:52 PM	BCl3 valve closed
3/11/2010	8:01:52 PM	PH3 valve closed
3/11/2010	8:01:52 PM	SiCl4 pre valve closed
3/11/2010	8:01:52 PM	SiCl4 post valve closed
3/11/2010	8:01:52 PM	Bubbler valve closed
3/11/2010	8:01:52 PM	Main Vac valve opened
3/11/2010	8:01:52 PM	Bypass valve opened
3/11/2010	8:01:52 PM	Helium MFC set to  0.000000
3/11/2010	8:01:52 PM	H2 MFC set to  0.000000
3/11/2010	8:01:52 PM	BCl3 MFC set to  0.000000
3/11/2010	8:01:52 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:01:52 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:01:52 PM	Tube furnace set to 0
3/11/2010	8:02:44 PM	Run aborted at 8:02 PM
3/11/2010	8:02:44 PM	Helium valve closed
3/11/2010	8:02:44 PM	H2 valve closed
3/11/2010	8:02:44 PM	BCl3 valve closed
3/11/2010	8:02:44 PM	PH3 valve closed
3/11/2010	8:02:44 PM	SiCl4 pre valve closed
3/11/2010	8:02:44 PM	SiCl4 post valve closed
3/11/2010	8:02:44 PM	Bypass valve closed
3/11/2010	8:02:44 PM	Main Vac valve closed
3/11/2010	8:02:44 PM	Bubbler valve closed
3/11/2010	8:02:44 PM	Helium MFC set to  0.000000
3/11/2010	8:02:44 PM	H2 MFC set to  0.000000
3/11/2010	8:02:44 PM	BCl3 MFC set to  0.000000
3/11/2010	8:02:44 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:02:44 PM	Tube furnace set to 0
3/11/2010	8:03:28 PM	Main Vac valve closed
3/11/2010	8:03:29 PM	Bypass valve closed
3/11/2010	8:03:31 PM	Bypass valve opened
3/11/2010	8:03:37 PM	Main Vac valve opened
3/11/2010	8:03:59 PM	Bypass valve closed
3/11/2010	8:04:16 PM	Main Vac valve closed
3/11/2010	8:04:32 PM	Recipe started at 8:04 PM
3/11/2010	8:04:32 PM	H2 valve closed
3/11/2010	8:04:32 PM	BCl3 valve closed
3/11/2010	8:04:32 PM	PH3 valve closed
3/11/2010	8:04:32 PM	SiCl4 pre valve closed
3/11/2010	8:04:32 PM	SiCl4 post valve closed
3/11/2010	8:04:32 PM	Main Vac valve closed
3/11/2010	8:04:32 PM	Bypass valve closed
3/11/2010	8:04:32 PM	Bubbler valve closed
3/11/2010	8:04:32 PM	Helium valve opened
3/11/2010	8:04:32 PM	Helium MFC set to  500.000000
3/11/2010	8:04:32 PM	H2 MFC set to  0.000000
3/11/2010	8:04:32 PM	BCl3 MFC set to  0.000000
3/11/2010	8:04:32 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:04:32 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:04:32 PM	Tube furnace set to 0
3/11/2010	8:05:53 PM	Helium valve closed
3/11/2010	8:05:53 PM	H2 valve closed
3/11/2010	8:05:53 PM	BCl3 valve closed
3/11/2010	8:05:53 PM	PH3 valve closed
3/11/2010	8:05:53 PM	SiCl4 pre valve closed
3/11/2010	8:05:53 PM	SiCl4 post valve closed
3/11/2010	8:05:53 PM	Main Vac valve closed
3/11/2010	8:05:53 PM	Bypass valve closed
3/11/2010	8:05:53 PM	Bubbler valve closed
3/11/2010	8:05:53 PM	Helium MFC set to  0.000000
3/11/2010	8:05:53 PM	H2 MFC set to  0.000000
3/11/2010	8:05:53 PM	BCl3 MFC set to  0.000000
3/11/2010	8:05:53 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:05:53 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:05:53 PM	Tube furnace set to 0
3/11/2010	8:06:09 PM	Helium valve closed
3/11/2010	8:06:09 PM	H2 valve closed
3/11/2010	8:06:09 PM	BCl3 valve closed
3/11/2010	8:06:09 PM	PH3 valve closed
3/11/2010	8:06:09 PM	SiCl4 pre valve closed
3/11/2010	8:06:09 PM	SiCl4 post valve closed
3/11/2010	8:06:09 PM	Main Vac valve closed
3/11/2010	8:06:09 PM	Bubbler valve closed
3/11/2010	8:06:09 PM	Bypass valve opened
3/11/2010	8:06:09 PM	Helium MFC set to  0.000000
3/11/2010	8:06:09 PM	H2 MFC set to  0.000000
3/11/2010	8:06:09 PM	BCl3 MFC set to  0.000000
3/11/2010	8:06:09 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:06:09 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:06:09 PM	Tube furnace set to 0
3/11/2010	8:06:31 PM	Helium valve closed
3/11/2010	8:06:31 PM	H2 valve closed
3/11/2010	8:06:31 PM	BCl3 valve closed
3/11/2010	8:06:31 PM	PH3 valve closed
3/11/2010	8:06:31 PM	SiCl4 pre valve closed
3/11/2010	8:06:31 PM	SiCl4 post valve closed
3/11/2010	8:06:31 PM	Bubbler valve closed
3/11/2010	8:06:31 PM	Main Vac valve opened
3/11/2010	8:06:31 PM	Bypass valve opened
3/11/2010	8:06:31 PM	Helium MFC set to  0.000000
3/11/2010	8:06:31 PM	H2 MFC set to  0.000000
3/11/2010	8:06:31 PM	BCl3 MFC set to  0.000000
3/11/2010	8:06:31 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:06:31 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:06:31 PM	Tube furnace set to 0
3/11/2010	8:11:31 PM	H2 valve closed
3/11/2010	8:11:31 PM	BCl3 valve closed
3/11/2010	8:11:31 PM	PH3 valve closed
3/11/2010	8:11:31 PM	SiCl4 pre valve closed
3/11/2010	8:11:31 PM	SiCl4 post valve closed
3/11/2010	8:11:31 PM	Main Vac valve closed
3/11/2010	8:11:31 PM	Bypass valve closed
3/11/2010	8:11:31 PM	Bubbler valve closed
3/11/2010	8:11:31 PM	Helium valve opened
3/11/2010	8:11:31 PM	Helium MFC set to  500.000000
3/11/2010	8:11:31 PM	H2 MFC set to  0.000000
3/11/2010	8:11:31 PM	BCl3 MFC set to  0.000000
3/11/2010	8:11:31 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:11:31 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:11:31 PM	Tube furnace set to 0
3/11/2010	8:12:53 PM	Helium valve closed
3/11/2010	8:12:53 PM	H2 valve closed
3/11/2010	8:12:53 PM	BCl3 valve closed
3/11/2010	8:12:53 PM	PH3 valve closed
3/11/2010	8:12:53 PM	SiCl4 pre valve closed
3/11/2010	8:12:53 PM	SiCl4 post valve closed
3/11/2010	8:12:53 PM	Main Vac valve closed
3/11/2010	8:12:53 PM	Bypass valve closed
3/11/2010	8:12:53 PM	Bubbler valve closed
3/11/2010	8:12:53 PM	Helium MFC set to  0.000000
3/11/2010	8:12:53 PM	H2 MFC set to  0.000000
3/11/2010	8:12:53 PM	BCl3 MFC set to  0.000000
3/11/2010	8:12:53 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:12:53 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:12:53 PM	Tube furnace set to 0
3/11/2010	8:13:09 PM	Helium valve closed
3/11/2010	8:13:09 PM	H2 valve closed
3/11/2010	8:13:09 PM	BCl3 valve closed
3/11/2010	8:13:09 PM	PH3 valve closed
3/11/2010	8:13:09 PM	SiCl4 pre valve closed
3/11/2010	8:13:09 PM	SiCl4 post valve closed
3/11/2010	8:13:09 PM	Main Vac valve closed
3/11/2010	8:13:09 PM	Bubbler valve closed
3/11/2010	8:13:09 PM	Bypass valve opened
3/11/2010	8:13:09 PM	Helium MFC set to  0.000000
3/11/2010	8:13:09 PM	H2 MFC set to  0.000000
3/11/2010	8:13:09 PM	BCl3 MFC set to  0.000000
3/11/2010	8:13:09 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:13:09 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:13:09 PM	Tube furnace set to 0
3/11/2010	8:13:31 PM	Helium valve closed
3/11/2010	8:13:31 PM	H2 valve closed
3/11/2010	8:13:31 PM	BCl3 valve closed
3/11/2010	8:13:31 PM	PH3 valve closed
3/11/2010	8:13:31 PM	SiCl4 pre valve closed
3/11/2010	8:13:31 PM	SiCl4 post valve closed
3/11/2010	8:13:31 PM	Bubbler valve closed
3/11/2010	8:13:31 PM	Main Vac valve opened
3/11/2010	8:13:31 PM	Bypass valve opened
3/11/2010	8:13:31 PM	Helium MFC set to  0.000000
3/11/2010	8:13:31 PM	H2 MFC set to  0.000000
3/11/2010	8:13:31 PM	BCl3 MFC set to  0.000000
3/11/2010	8:13:31 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:13:31 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:13:31 PM	Tube furnace set to 0
3/11/2010	8:18:31 PM	H2 valve closed
3/11/2010	8:18:31 PM	BCl3 valve closed
3/11/2010	8:18:31 PM	PH3 valve closed
3/11/2010	8:18:31 PM	SiCl4 pre valve closed
3/11/2010	8:18:31 PM	SiCl4 post valve closed
3/11/2010	8:18:31 PM	Main Vac valve closed
3/11/2010	8:18:31 PM	Bypass valve closed
3/11/2010	8:18:31 PM	Bubbler valve closed
3/11/2010	8:18:31 PM	Helium valve opened
3/11/2010	8:18:31 PM	Helium MFC set to  500.000000
3/11/2010	8:18:31 PM	H2 MFC set to  0.000000
3/11/2010	8:18:31 PM	BCl3 MFC set to  0.000000
3/11/2010	8:18:31 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:18:31 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:18:31 PM	Tube furnace set to 0
3/11/2010	8:19:54 PM	Helium valve closed
3/11/2010	8:19:54 PM	H2 valve closed
3/11/2010	8:19:54 PM	BCl3 valve closed
3/11/2010	8:19:54 PM	PH3 valve closed
3/11/2010	8:19:54 PM	SiCl4 pre valve closed
3/11/2010	8:19:54 PM	SiCl4 post valve closed
3/11/2010	8:19:54 PM	Main Vac valve closed
3/11/2010	8:19:54 PM	Bypass valve closed
3/11/2010	8:19:54 PM	Bubbler valve closed
3/11/2010	8:19:54 PM	Helium MFC set to  0.000000
3/11/2010	8:19:54 PM	H2 MFC set to  0.000000
3/11/2010	8:19:54 PM	BCl3 MFC set to  0.000000
3/11/2010	8:19:54 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:19:54 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:19:54 PM	Tube furnace set to 0
3/11/2010	8:20:09 PM	Helium valve closed
3/11/2010	8:20:09 PM	H2 valve closed
3/11/2010	8:20:09 PM	BCl3 valve closed
3/11/2010	8:20:09 PM	PH3 valve closed
3/11/2010	8:20:09 PM	SiCl4 pre valve closed
3/11/2010	8:20:09 PM	SiCl4 post valve closed
3/11/2010	8:20:09 PM	Main Vac valve closed
3/11/2010	8:20:09 PM	Bubbler valve closed
3/11/2010	8:20:09 PM	Bypass valve opened
3/11/2010	8:20:09 PM	Helium MFC set to  0.000000
3/11/2010	8:20:09 PM	H2 MFC set to  0.000000
3/11/2010	8:20:09 PM	BCl3 MFC set to  0.000000
3/11/2010	8:20:09 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:20:09 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:20:09 PM	Tube furnace set to 0
3/11/2010	8:20:31 PM	Helium valve closed
3/11/2010	8:20:31 PM	H2 valve closed
3/11/2010	8:20:31 PM	BCl3 valve closed
3/11/2010	8:20:31 PM	PH3 valve closed
3/11/2010	8:20:31 PM	SiCl4 pre valve closed
3/11/2010	8:20:31 PM	SiCl4 post valve closed
3/11/2010	8:20:31 PM	Bubbler valve closed
3/11/2010	8:20:31 PM	Main Vac valve opened
3/11/2010	8:20:31 PM	Bypass valve opened
3/11/2010	8:20:31 PM	Helium MFC set to  0.000000
3/11/2010	8:20:31 PM	H2 MFC set to  0.000000
3/11/2010	8:20:31 PM	BCl3 MFC set to  0.000000
3/11/2010	8:20:31 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:20:31 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:20:31 PM	Tube furnace set to 0
3/11/2010	8:25:31 PM	Helium valve closed
3/11/2010	8:25:31 PM	H2 valve closed
3/11/2010	8:25:31 PM	BCl3 valve closed
3/11/2010	8:25:31 PM	PH3 valve closed
3/11/2010	8:25:31 PM	SiCl4 pre valve closed
3/11/2010	8:25:31 PM	SiCl4 post valve closed
3/11/2010	8:25:31 PM	Bubbler valve closed
3/11/2010	8:25:31 PM	Main Vac valve opened
3/11/2010	8:25:31 PM	Bypass valve opened
3/11/2010	8:25:31 PM	Helium MFC set to  0.000000
3/11/2010	8:25:31 PM	H2 MFC set to  0.000000
3/11/2010	8:25:31 PM	BCl3 MFC set to  0.000000
3/11/2010	8:25:31 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:25:31 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:25:31 PM	Tube furnace set to 0
3/11/2010	8:25:32 PM	Run finished at 8:25 PM
3/11/2010	8:57:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	8:57:44 PM	Recipe started at 8:57 PM
3/11/2010	8:57:44 PM	H2 valve closed
3/11/2010	8:57:44 PM	BCl3 valve closed
3/11/2010	8:57:44 PM	PH3 valve closed
3/11/2010	8:57:44 PM	SiCl4 pre valve closed
3/11/2010	8:57:44 PM	SiCl4 post valve closed
3/11/2010	8:57:44 PM	Main Vac valve closed
3/11/2010	8:57:44 PM	Bypass valve closed
3/11/2010	8:57:44 PM	Bubbler valve closed
3/11/2010	8:57:44 PM	Helium valve opened
3/11/2010	8:57:44 PM	Helium MFC set to  500.000000
3/11/2010	8:57:44 PM	H2 MFC set to  0.000000
3/11/2010	8:57:44 PM	BCl3 MFC set to  0.000000
3/11/2010	8:57:44 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:57:44 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:57:44 PM	Tube furnace set to 0
3/11/2010	8:59:05 PM	Helium valve closed
3/11/2010	8:59:05 PM	H2 valve closed
3/11/2010	8:59:05 PM	BCl3 valve closed
3/11/2010	8:59:05 PM	PH3 valve closed
3/11/2010	8:59:05 PM	SiCl4 pre valve closed
3/11/2010	8:59:05 PM	SiCl4 post valve closed
3/11/2010	8:59:05 PM	Main Vac valve closed
3/11/2010	8:59:05 PM	Bypass valve closed
3/11/2010	8:59:05 PM	Bubbler valve closed
3/11/2010	8:59:05 PM	Helium MFC set to  0.000000
3/11/2010	8:59:05 PM	H2 MFC set to  0.000000
3/11/2010	8:59:05 PM	BCl3 MFC set to  0.000000
3/11/2010	8:59:05 PM	SiCl4 MFC set to  0.000000
3/11/2010	8:59:05 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	8:59:05 PM	Tube furnace set to 0
3/11/2010	8:59:05 PM	Run finished at 8:59 PM
3/11/2010	8:59:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	9:09:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	9:09:34 PM	Recipe started at 9:09 PM
3/11/2010	9:09:34 PM	Helium valve closed
3/11/2010	9:09:34 PM	H2 valve closed
3/11/2010	9:09:34 PM	BCl3 valve closed
3/11/2010	9:09:34 PM	PH3 valve closed
3/11/2010	9:09:34 PM	SiCl4 pre valve closed
3/11/2010	9:09:34 PM	SiCl4 post valve closed
3/11/2010	9:09:34 PM	Main Vac valve closed
3/11/2010	9:09:34 PM	Bubbler valve closed
3/11/2010	9:09:34 PM	Bypass valve opened
3/11/2010	9:09:34 PM	Helium MFC set to  0.000000
3/11/2010	9:09:34 PM	H2 MFC set to  0.000000
3/11/2010	9:09:34 PM	BCl3 MFC set to  0.000000
3/11/2010	9:09:34 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:09:34 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:09:34 PM	Tube furnace set to 0
3/11/2010	9:09:56 PM	Helium valve closed
3/11/2010	9:09:56 PM	H2 valve closed
3/11/2010	9:09:56 PM	BCl3 valve closed
3/11/2010	9:09:56 PM	PH3 valve closed
3/11/2010	9:09:56 PM	SiCl4 pre valve closed
3/11/2010	9:09:56 PM	SiCl4 post valve closed
3/11/2010	9:09:56 PM	Bubbler valve closed
3/11/2010	9:09:56 PM	Main Vac valve opened
3/11/2010	9:09:56 PM	Bypass valve opened
3/11/2010	9:09:56 PM	Helium MFC set to  0.000000
3/11/2010	9:09:56 PM	H2 MFC set to  0.000000
3/11/2010	9:09:56 PM	BCl3 MFC set to  0.000000
3/11/2010	9:09:56 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:09:56 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:09:56 PM	Tube furnace set to 0
3/11/2010	9:09:56 PM	Run finished at 9:09 PM
3/11/2010	9:09:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	9:10:35 PM	Bypass valve closed
3/11/2010	9:10:35 PM	Main Vac valve closed
3/11/2010	9:10:44 PM	Bypass valve opened
3/11/2010	9:10:45 PM	Main Vac valve opened
3/11/2010	9:10:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	9:10:49 PM	Recipe started at 9:10 PM
3/11/2010	9:10:49 PM	H2 valve closed
3/11/2010	9:10:49 PM	BCl3 valve closed
3/11/2010	9:10:49 PM	PH3 valve closed
3/11/2010	9:10:49 PM	SiCl4 pre valve closed
3/11/2010	9:10:49 PM	SiCl4 post valve closed
3/11/2010	9:10:49 PM	Main Vac valve closed
3/11/2010	9:10:49 PM	Bypass valve closed
3/11/2010	9:10:49 PM	Bubbler valve closed
3/11/2010	9:10:49 PM	Helium valve opened
3/11/2010	9:10:49 PM	Helium MFC set to  500.000000
3/11/2010	9:10:49 PM	H2 MFC set to  0.000000
3/11/2010	9:10:49 PM	BCl3 MFC set to  0.000000
3/11/2010	9:10:49 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:10:49 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:10:49 PM	Tube furnace set to 0
3/11/2010	9:12:10 PM	Helium valve closed
3/11/2010	9:12:10 PM	H2 valve closed
3/11/2010	9:12:10 PM	BCl3 valve closed
3/11/2010	9:12:10 PM	PH3 valve closed
3/11/2010	9:12:10 PM	SiCl4 pre valve closed
3/11/2010	9:12:10 PM	SiCl4 post valve closed
3/11/2010	9:12:10 PM	Main Vac valve closed
3/11/2010	9:12:10 PM	Bypass valve closed
3/11/2010	9:12:10 PM	Bubbler valve closed
3/11/2010	9:12:10 PM	Helium MFC set to  0.000000
3/11/2010	9:12:10 PM	H2 MFC set to  0.000000
3/11/2010	9:12:10 PM	BCl3 MFC set to  0.000000
3/11/2010	9:12:10 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:12:10 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:12:10 PM	Tube furnace set to 0
3/11/2010	9:12:10 PM	Run finished at 9:12 PM
3/11/2010	9:12:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	9:22:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	9:22:55 PM	Recipe started at 9:22 PM
3/11/2010	9:22:55 PM	Helium valve closed
3/11/2010	9:22:55 PM	H2 valve closed
3/11/2010	9:22:55 PM	BCl3 valve closed
3/11/2010	9:22:55 PM	PH3 valve closed
3/11/2010	9:22:55 PM	SiCl4 pre valve closed
3/11/2010	9:22:55 PM	SiCl4 post valve closed
3/11/2010	9:22:55 PM	Main Vac valve closed
3/11/2010	9:22:55 PM	Bubbler valve closed
3/11/2010	9:22:55 PM	Bypass valve opened
3/11/2010	9:22:55 PM	Helium MFC set to  0.000000
3/11/2010	9:22:55 PM	H2 MFC set to  0.000000
3/11/2010	9:22:55 PM	BCl3 MFC set to  0.000000
3/11/2010	9:22:55 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:22:55 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:22:55 PM	Tube furnace set to 0
3/11/2010	9:23:27 PM	Helium valve closed
3/11/2010	9:23:27 PM	H2 valve closed
3/11/2010	9:23:27 PM	BCl3 valve closed
3/11/2010	9:23:27 PM	PH3 valve closed
3/11/2010	9:23:27 PM	SiCl4 pre valve closed
3/11/2010	9:23:27 PM	SiCl4 post valve closed
3/11/2010	9:23:27 PM	Bubbler valve closed
3/11/2010	9:23:27 PM	Main Vac valve opened
3/11/2010	9:23:27 PM	Bypass valve opened
3/11/2010	9:23:27 PM	Helium MFC set to  0.000000
3/11/2010	9:23:27 PM	H2 MFC set to  0.000000
3/11/2010	9:23:27 PM	BCl3 MFC set to  0.000000
3/11/2010	9:23:27 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:23:27 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:23:27 PM	Tube furnace set to 0
3/11/2010	9:23:27 PM	Run finished at 9:23 PM
3/11/2010	9:23:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	9:23:57 PM	Recipe started at 9:23 PM
3/11/2010	9:23:57 PM	H2 valve closed
3/11/2010	9:23:57 PM	BCl3 valve closed
3/11/2010	9:23:57 PM	PH3 valve closed
3/11/2010	9:23:57 PM	SiCl4 pre valve closed
3/11/2010	9:23:57 PM	SiCl4 post valve closed
3/11/2010	9:23:57 PM	Main Vac valve closed
3/11/2010	9:23:57 PM	Bypass valve closed
3/11/2010	9:23:57 PM	Bubbler valve closed
3/11/2010	9:23:57 PM	Helium valve opened
3/11/2010	9:23:57 PM	Helium MFC set to  500.000000
3/11/2010	9:23:57 PM	H2 MFC set to  0.000000
3/11/2010	9:23:57 PM	BCl3 MFC set to  0.000000
3/11/2010	9:23:57 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:23:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:23:57 PM	Tube furnace set to 0
3/11/2010	9:25:20 PM	Helium valve closed
3/11/2010	9:25:20 PM	H2 valve closed
3/11/2010	9:25:20 PM	BCl3 valve closed
3/11/2010	9:25:20 PM	PH3 valve closed
3/11/2010	9:25:20 PM	SiCl4 pre valve closed
3/11/2010	9:25:20 PM	SiCl4 post valve closed
3/11/2010	9:25:20 PM	Main Vac valve closed
3/11/2010	9:25:20 PM	Bypass valve closed
3/11/2010	9:25:20 PM	Bubbler valve closed
3/11/2010	9:25:20 PM	Helium MFC set to  0.000000
3/11/2010	9:25:20 PM	H2 MFC set to  0.000000
3/11/2010	9:25:20 PM	BCl3 MFC set to  0.000000
3/11/2010	9:25:20 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:25:20 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:25:20 PM	Tube furnace set to 0
3/11/2010	9:25:36 PM	Helium valve closed
3/11/2010	9:25:36 PM	H2 valve closed
3/11/2010	9:25:36 PM	BCl3 valve closed
3/11/2010	9:25:36 PM	PH3 valve closed
3/11/2010	9:25:36 PM	SiCl4 pre valve closed
3/11/2010	9:25:36 PM	SiCl4 post valve closed
3/11/2010	9:25:36 PM	Main Vac valve closed
3/11/2010	9:25:36 PM	Bubbler valve closed
3/11/2010	9:25:36 PM	Bypass valve opened
3/11/2010	9:25:36 PM	Helium MFC set to  0.000000
3/11/2010	9:25:36 PM	H2 MFC set to  0.000000
3/11/2010	9:25:36 PM	BCl3 MFC set to  0.000000
3/11/2010	9:25:36 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:25:36 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:25:36 PM	Tube furnace set to 0
3/11/2010	9:25:58 PM	Helium valve closed
3/11/2010	9:25:58 PM	H2 valve closed
3/11/2010	9:25:58 PM	BCl3 valve closed
3/11/2010	9:25:58 PM	PH3 valve closed
3/11/2010	9:25:58 PM	SiCl4 pre valve closed
3/11/2010	9:25:58 PM	SiCl4 post valve closed
3/11/2010	9:25:58 PM	Bubbler valve closed
3/11/2010	9:25:58 PM	Main Vac valve opened
3/11/2010	9:25:58 PM	Bypass valve opened
3/11/2010	9:25:58 PM	Helium MFC set to  0.000000
3/11/2010	9:25:58 PM	H2 MFC set to  0.000000
3/11/2010	9:25:58 PM	BCl3 MFC set to  0.000000
3/11/2010	9:25:58 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:25:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:25:58 PM	Tube furnace set to 0
3/11/2010	9:30:58 PM	H2 valve closed
3/11/2010	9:30:58 PM	BCl3 valve closed
3/11/2010	9:30:58 PM	PH3 valve closed
3/11/2010	9:30:58 PM	SiCl4 pre valve closed
3/11/2010	9:30:58 PM	SiCl4 post valve closed
3/11/2010	9:30:58 PM	Main Vac valve closed
3/11/2010	9:30:58 PM	Bypass valve closed
3/11/2010	9:30:58 PM	Bubbler valve closed
3/11/2010	9:30:58 PM	Helium valve opened
3/11/2010	9:30:58 PM	Helium MFC set to  500.000000
3/11/2010	9:30:58 PM	H2 MFC set to  0.000000
3/11/2010	9:30:58 PM	BCl3 MFC set to  0.000000
3/11/2010	9:30:58 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:30:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:30:58 PM	Tube furnace set to 0
3/11/2010	9:32:21 PM	Helium valve closed
3/11/2010	9:32:21 PM	H2 valve closed
3/11/2010	9:32:21 PM	BCl3 valve closed
3/11/2010	9:32:21 PM	PH3 valve closed
3/11/2010	9:32:21 PM	SiCl4 pre valve closed
3/11/2010	9:32:21 PM	SiCl4 post valve closed
3/11/2010	9:32:21 PM	Main Vac valve closed
3/11/2010	9:32:21 PM	Bypass valve closed
3/11/2010	9:32:21 PM	Bubbler valve closed
3/11/2010	9:32:21 PM	Helium MFC set to  0.000000
3/11/2010	9:32:21 PM	H2 MFC set to  0.000000
3/11/2010	9:32:22 PM	BCl3 MFC set to  0.000000
3/11/2010	9:32:22 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:32:22 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:32:22 PM	Tube furnace set to 0
3/11/2010	9:32:37 PM	Helium valve closed
3/11/2010	9:32:37 PM	H2 valve closed
3/11/2010	9:32:37 PM	BCl3 valve closed
3/11/2010	9:32:37 PM	PH3 valve closed
3/11/2010	9:32:37 PM	SiCl4 pre valve closed
3/11/2010	9:32:37 PM	SiCl4 post valve closed
3/11/2010	9:32:37 PM	Main Vac valve closed
3/11/2010	9:32:37 PM	Bubbler valve closed
3/11/2010	9:32:37 PM	Bypass valve opened
3/11/2010	9:32:37 PM	Helium MFC set to  0.000000
3/11/2010	9:32:37 PM	H2 MFC set to  0.000000
3/11/2010	9:32:37 PM	BCl3 MFC set to  0.000000
3/11/2010	9:32:37 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:32:37 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:32:37 PM	Tube furnace set to 0
3/11/2010	9:32:59 PM	Helium valve closed
3/11/2010	9:32:59 PM	H2 valve closed
3/11/2010	9:32:59 PM	BCl3 valve closed
3/11/2010	9:32:59 PM	PH3 valve closed
3/11/2010	9:32:59 PM	SiCl4 pre valve closed
3/11/2010	9:32:59 PM	SiCl4 post valve closed
3/11/2010	9:32:59 PM	Bubbler valve closed
3/11/2010	9:32:59 PM	Main Vac valve opened
3/11/2010	9:32:59 PM	Bypass valve opened
3/11/2010	9:32:59 PM	Helium MFC set to  0.000000
3/11/2010	9:32:59 PM	H2 MFC set to  0.000000
3/11/2010	9:32:59 PM	BCl3 MFC set to  0.000000
3/11/2010	9:32:59 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:32:59 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:32:59 PM	Tube furnace set to 0
3/11/2010	9:37:59 PM	H2 valve closed
3/11/2010	9:37:59 PM	BCl3 valve closed
3/11/2010	9:37:59 PM	PH3 valve closed
3/11/2010	9:37:59 PM	SiCl4 pre valve closed
3/11/2010	9:37:59 PM	SiCl4 post valve closed
3/11/2010	9:37:59 PM	Main Vac valve closed
3/11/2010	9:37:59 PM	Bypass valve closed
3/11/2010	9:37:59 PM	Bubbler valve closed
3/11/2010	9:37:59 PM	Helium valve opened
3/11/2010	9:37:59 PM	Helium MFC set to  500.000000
3/11/2010	9:37:59 PM	H2 MFC set to  0.000000
3/11/2010	9:37:59 PM	BCl3 MFC set to  0.000000
3/11/2010	9:37:59 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:37:59 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:37:59 PM	Tube furnace set to 0
3/11/2010	9:39:23 PM	Helium valve closed
3/11/2010	9:39:23 PM	H2 valve closed
3/11/2010	9:39:23 PM	BCl3 valve closed
3/11/2010	9:39:23 PM	PH3 valve closed
3/11/2010	9:39:23 PM	SiCl4 pre valve closed
3/11/2010	9:39:23 PM	SiCl4 post valve closed
3/11/2010	9:39:23 PM	Main Vac valve closed
3/11/2010	9:39:23 PM	Bypass valve closed
3/11/2010	9:39:23 PM	Bubbler valve closed
3/11/2010	9:39:23 PM	Helium MFC set to  0.000000
3/11/2010	9:39:23 PM	H2 MFC set to  0.000000
3/11/2010	9:39:23 PM	BCl3 MFC set to  0.000000
3/11/2010	9:39:23 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:39:23 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:39:23 PM	Tube furnace set to 0
3/11/2010	9:39:38 PM	Helium valve closed
3/11/2010	9:39:38 PM	H2 valve closed
3/11/2010	9:39:38 PM	BCl3 valve closed
3/11/2010	9:39:38 PM	PH3 valve closed
3/11/2010	9:39:38 PM	SiCl4 pre valve closed
3/11/2010	9:39:38 PM	SiCl4 post valve closed
3/11/2010	9:39:38 PM	Main Vac valve closed
3/11/2010	9:39:38 PM	Bubbler valve closed
3/11/2010	9:39:38 PM	Bypass valve opened
3/11/2010	9:39:38 PM	Helium MFC set to  0.000000
3/11/2010	9:39:38 PM	H2 MFC set to  0.000000
3/11/2010	9:39:38 PM	BCl3 MFC set to  0.000000
3/11/2010	9:39:38 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:39:38 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:39:38 PM	Tube furnace set to 0
3/11/2010	9:40:01 PM	Helium valve closed
3/11/2010	9:40:01 PM	H2 valve closed
3/11/2010	9:40:01 PM	BCl3 valve closed
3/11/2010	9:40:01 PM	PH3 valve closed
3/11/2010	9:40:01 PM	SiCl4 pre valve closed
3/11/2010	9:40:01 PM	SiCl4 post valve closed
3/11/2010	9:40:01 PM	Bubbler valve closed
3/11/2010	9:40:01 PM	Main Vac valve opened
3/11/2010	9:40:01 PM	Bypass valve opened
3/11/2010	9:40:01 PM	Helium MFC set to  0.000000
3/11/2010	9:40:01 PM	H2 MFC set to  0.000000
3/11/2010	9:40:01 PM	BCl3 MFC set to  0.000000
3/11/2010	9:40:01 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:40:01 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:40:01 PM	Tube furnace set to 0
3/11/2010	9:45:01 PM	Helium valve closed
3/11/2010	9:45:01 PM	H2 valve closed
3/11/2010	9:45:01 PM	BCl3 valve closed
3/11/2010	9:45:01 PM	PH3 valve closed
3/11/2010	9:45:01 PM	SiCl4 pre valve closed
3/11/2010	9:45:01 PM	SiCl4 post valve closed
3/11/2010	9:45:01 PM	Bubbler valve closed
3/11/2010	9:45:01 PM	Main Vac valve opened
3/11/2010	9:45:01 PM	Bypass valve opened
3/11/2010	9:45:01 PM	Helium MFC set to  0.000000
3/11/2010	9:45:01 PM	H2 MFC set to  0.000000
3/11/2010	9:45:01 PM	BCl3 MFC set to  0.000000
3/11/2010	9:45:01 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:45:01 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:45:01 PM	Tube furnace set to 0
3/11/2010	9:45:02 PM	Run finished at 9:45 PM
3/11/2010	9:55:36 PM	Bypass valve closed
3/11/2010	9:55:37 PM	Main Vac valve closed
3/11/2010	9:55:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	9:55:50 PM	Recipe started at 9:55 PM
3/11/2010	9:55:50 PM	H2 valve closed
3/11/2010	9:55:50 PM	BCl3 valve closed
3/11/2010	9:55:50 PM	PH3 valve closed
3/11/2010	9:55:50 PM	SiCl4 pre valve closed
3/11/2010	9:55:50 PM	SiCl4 post valve closed
3/11/2010	9:55:50 PM	Main Vac valve closed
3/11/2010	9:55:50 PM	Bypass valve closed
3/11/2010	9:55:50 PM	Bubbler valve closed
3/11/2010	9:55:50 PM	Helium valve opened
3/11/2010	9:55:50 PM	Helium MFC set to  500.000000
3/11/2010	9:55:50 PM	H2 MFC set to  0.000000
3/11/2010	9:55:50 PM	BCl3 MFC set to  0.000000
3/11/2010	9:55:50 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:55:50 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:55:50 PM	Tube furnace set to 0
3/11/2010	9:57:11 PM	Helium valve closed
3/11/2010	9:57:11 PM	H2 valve closed
3/11/2010	9:57:11 PM	BCl3 valve closed
3/11/2010	9:57:11 PM	PH3 valve closed
3/11/2010	9:57:11 PM	SiCl4 pre valve closed
3/11/2010	9:57:11 PM	SiCl4 post valve closed
3/11/2010	9:57:11 PM	Main Vac valve closed
3/11/2010	9:57:11 PM	Bypass valve closed
3/11/2010	9:57:11 PM	Bubbler valve closed
3/11/2010	9:57:11 PM	Helium MFC set to  0.000000
3/11/2010	9:57:11 PM	H2 MFC set to  0.000000
3/11/2010	9:57:11 PM	BCl3 MFC set to  0.000000
3/11/2010	9:57:11 PM	SiCl4 MFC set to  0.000000
3/11/2010	9:57:11 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	9:57:11 PM	Tube furnace set to 0
3/11/2010	9:57:11 PM	Run finished at 9:57 PM
3/11/2010	9:57:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2010	10:10:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	10:10:13 PM	Recipe started at 10:10 PM
3/11/2010	10:10:13 PM	Helium valve closed
3/11/2010	10:10:13 PM	H2 valve closed
3/11/2010	10:10:13 PM	BCl3 valve closed
3/11/2010	10:10:13 PM	PH3 valve closed
3/11/2010	10:10:13 PM	SiCl4 pre valve closed
3/11/2010	10:10:13 PM	SiCl4 post valve closed
3/11/2010	10:10:13 PM	Main Vac valve closed
3/11/2010	10:10:13 PM	Bubbler valve closed
3/11/2010	10:10:13 PM	Bypass valve opened
3/11/2010	10:10:13 PM	Helium MFC set to  0.000000
3/11/2010	10:10:13 PM	H2 MFC set to  0.000000
3/11/2010	10:10:13 PM	BCl3 MFC set to  0.000000
3/11/2010	10:10:13 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:10:13 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:10:13 PM	Tube furnace set to 0
3/11/2010	10:10:44 PM	Helium valve closed
3/11/2010	10:10:44 PM	H2 valve closed
3/11/2010	10:10:44 PM	BCl3 valve closed
3/11/2010	10:10:44 PM	PH3 valve closed
3/11/2010	10:10:44 PM	SiCl4 pre valve closed
3/11/2010	10:10:44 PM	SiCl4 post valve closed
3/11/2010	10:10:44 PM	Bubbler valve closed
3/11/2010	10:10:44 PM	Main Vac valve opened
3/11/2010	10:10:44 PM	Bypass valve opened
3/11/2010	10:10:44 PM	Helium MFC set to  0.000000
3/11/2010	10:10:44 PM	H2 MFC set to  0.000000
3/11/2010	10:10:44 PM	BCl3 MFC set to  0.000000
3/11/2010	10:10:44 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:10:44 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:10:44 PM	Tube furnace set to 0
3/11/2010	10:10:44 PM	Run finished at 10:10 PM
3/11/2010	10:10:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2010	10:11:32 PM	Recipe started at 10:11 PM
3/11/2010	10:11:32 PM	H2 valve closed
3/11/2010	10:11:32 PM	BCl3 valve closed
3/11/2010	10:11:32 PM	PH3 valve closed
3/11/2010	10:11:32 PM	SiCl4 pre valve closed
3/11/2010	10:11:32 PM	SiCl4 post valve closed
3/11/2010	10:11:32 PM	Main Vac valve closed
3/11/2010	10:11:32 PM	Bypass valve closed
3/11/2010	10:11:32 PM	Bubbler valve closed
3/11/2010	10:11:32 PM	Helium valve opened
3/11/2010	10:11:32 PM	Helium MFC set to  500.000000
3/11/2010	10:11:32 PM	H2 MFC set to  0.000000
3/11/2010	10:11:32 PM	BCl3 MFC set to  0.000000
3/11/2010	10:11:32 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:11:32 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:11:32 PM	Tube furnace set to 0
3/11/2010	10:12:55 PM	Helium valve closed
3/11/2010	10:12:55 PM	H2 valve closed
3/11/2010	10:12:55 PM	BCl3 valve closed
3/11/2010	10:12:55 PM	PH3 valve closed
3/11/2010	10:12:55 PM	SiCl4 pre valve closed
3/11/2010	10:12:55 PM	SiCl4 post valve closed
3/11/2010	10:12:55 PM	Main Vac valve closed
3/11/2010	10:12:55 PM	Bypass valve closed
3/11/2010	10:12:55 PM	Bubbler valve closed
3/11/2010	10:12:55 PM	Helium MFC set to  0.000000
3/11/2010	10:12:55 PM	H2 MFC set to  0.000000
3/11/2010	10:12:55 PM	BCl3 MFC set to  0.000000
3/11/2010	10:12:55 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:12:55 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:12:55 PM	Tube furnace set to 0
3/11/2010	10:13:10 PM	Helium valve closed
3/11/2010	10:13:10 PM	H2 valve closed
3/11/2010	10:13:10 PM	BCl3 valve closed
3/11/2010	10:13:10 PM	PH3 valve closed
3/11/2010	10:13:10 PM	SiCl4 pre valve closed
3/11/2010	10:13:10 PM	SiCl4 post valve closed
3/11/2010	10:13:10 PM	Main Vac valve closed
3/11/2010	10:13:10 PM	Bubbler valve closed
3/11/2010	10:13:10 PM	Bypass valve opened
3/11/2010	10:13:10 PM	Helium MFC set to  0.000000
3/11/2010	10:13:10 PM	H2 MFC set to  0.000000
3/11/2010	10:13:10 PM	BCl3 MFC set to  0.000000
3/11/2010	10:13:10 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:13:10 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:13:10 PM	Tube furnace set to 0
3/11/2010	10:13:33 PM	Helium valve closed
3/11/2010	10:13:33 PM	H2 valve closed
3/11/2010	10:13:33 PM	BCl3 valve closed
3/11/2010	10:13:33 PM	PH3 valve closed
3/11/2010	10:13:33 PM	SiCl4 pre valve closed
3/11/2010	10:13:33 PM	SiCl4 post valve closed
3/11/2010	10:13:33 PM	Bubbler valve closed
3/11/2010	10:13:33 PM	Main Vac valve opened
3/11/2010	10:13:33 PM	Bypass valve opened
3/11/2010	10:13:33 PM	Helium MFC set to  0.000000
3/11/2010	10:13:33 PM	H2 MFC set to  0.000000
3/11/2010	10:13:33 PM	BCl3 MFC set to  0.000000
3/11/2010	10:13:33 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:13:33 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:13:33 PM	Tube furnace set to 0
3/11/2010	10:18:33 PM	H2 valve closed
3/11/2010	10:18:33 PM	BCl3 valve closed
3/11/2010	10:18:33 PM	PH3 valve closed
3/11/2010	10:18:33 PM	SiCl4 pre valve closed
3/11/2010	10:18:33 PM	SiCl4 post valve closed
3/11/2010	10:18:33 PM	Main Vac valve closed
3/11/2010	10:18:33 PM	Bypass valve closed
3/11/2010	10:18:33 PM	Bubbler valve closed
3/11/2010	10:18:33 PM	Helium valve opened
3/11/2010	10:18:33 PM	Helium MFC set to  500.000000
3/11/2010	10:18:33 PM	H2 MFC set to  0.000000
3/11/2010	10:18:33 PM	BCl3 MFC set to  0.000000
3/11/2010	10:18:33 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:18:33 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:18:33 PM	Tube furnace set to 0
3/11/2010	10:19:56 PM	Helium valve closed
3/11/2010	10:19:56 PM	H2 valve closed
3/11/2010	10:19:56 PM	BCl3 valve closed
3/11/2010	10:19:56 PM	PH3 valve closed
3/11/2010	10:19:56 PM	SiCl4 pre valve closed
3/11/2010	10:19:56 PM	SiCl4 post valve closed
3/11/2010	10:19:56 PM	Main Vac valve closed
3/11/2010	10:19:56 PM	Bypass valve closed
3/11/2010	10:19:56 PM	Bubbler valve closed
3/11/2010	10:19:56 PM	Helium MFC set to  0.000000
3/11/2010	10:19:56 PM	H2 MFC set to  0.000000
3/11/2010	10:19:56 PM	BCl3 MFC set to  0.000000
3/11/2010	10:19:56 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:19:56 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:19:56 PM	Tube furnace set to 0
3/11/2010	10:20:12 PM	Helium valve closed
3/11/2010	10:20:12 PM	H2 valve closed
3/11/2010	10:20:12 PM	BCl3 valve closed
3/11/2010	10:20:12 PM	PH3 valve closed
3/11/2010	10:20:12 PM	SiCl4 pre valve closed
3/11/2010	10:20:12 PM	SiCl4 post valve closed
3/11/2010	10:20:12 PM	Main Vac valve closed
3/11/2010	10:20:12 PM	Bubbler valve closed
3/11/2010	10:20:12 PM	Bypass valve opened
3/11/2010	10:20:12 PM	Helium MFC set to  0.000000
3/11/2010	10:20:12 PM	H2 MFC set to  0.000000
3/11/2010	10:20:12 PM	BCl3 MFC set to  0.000000
3/11/2010	10:20:12 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:20:12 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:20:12 PM	Tube furnace set to 0
3/11/2010	10:20:34 PM	Helium valve closed
3/11/2010	10:20:34 PM	H2 valve closed
3/11/2010	10:20:34 PM	BCl3 valve closed
3/11/2010	10:20:34 PM	PH3 valve closed
3/11/2010	10:20:34 PM	SiCl4 pre valve closed
3/11/2010	10:20:34 PM	SiCl4 post valve closed
3/11/2010	10:20:34 PM	Bubbler valve closed
3/11/2010	10:20:34 PM	Main Vac valve opened
3/11/2010	10:20:34 PM	Bypass valve opened
3/11/2010	10:20:34 PM	Helium MFC set to  0.000000
3/11/2010	10:20:34 PM	H2 MFC set to  0.000000
3/11/2010	10:20:34 PM	BCl3 MFC set to  0.000000
3/11/2010	10:20:34 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:20:34 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:20:34 PM	Tube furnace set to 0
3/11/2010	10:25:34 PM	H2 valve closed
3/11/2010	10:25:34 PM	BCl3 valve closed
3/11/2010	10:25:34 PM	PH3 valve closed
3/11/2010	10:25:34 PM	SiCl4 pre valve closed
3/11/2010	10:25:34 PM	SiCl4 post valve closed
3/11/2010	10:25:34 PM	Main Vac valve closed
3/11/2010	10:25:34 PM	Bypass valve closed
3/11/2010	10:25:34 PM	Bubbler valve closed
3/11/2010	10:25:34 PM	Helium valve opened
3/11/2010	10:25:34 PM	Helium MFC set to  500.000000
3/11/2010	10:25:34 PM	H2 MFC set to  0.000000
3/11/2010	10:25:34 PM	BCl3 MFC set to  0.000000
3/11/2010	10:25:34 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:25:34 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:25:34 PM	Tube furnace set to 0
3/11/2010	10:26:58 PM	Helium valve closed
3/11/2010	10:26:58 PM	H2 valve closed
3/11/2010	10:26:58 PM	BCl3 valve closed
3/11/2010	10:26:58 PM	PH3 valve closed
3/11/2010	10:26:58 PM	SiCl4 pre valve closed
3/11/2010	10:26:58 PM	SiCl4 post valve closed
3/11/2010	10:26:58 PM	Main Vac valve closed
3/11/2010	10:26:58 PM	Bypass valve closed
3/11/2010	10:26:58 PM	Bubbler valve closed
3/11/2010	10:26:58 PM	Helium MFC set to  0.000000
3/11/2010	10:26:58 PM	H2 MFC set to  0.000000
3/11/2010	10:26:58 PM	BCl3 MFC set to  0.000000
3/11/2010	10:26:58 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:26:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:26:58 PM	Tube furnace set to 0
3/11/2010	10:27:13 PM	Helium valve closed
3/11/2010	10:27:13 PM	H2 valve closed
3/11/2010	10:27:13 PM	BCl3 valve closed
3/11/2010	10:27:13 PM	PH3 valve closed
3/11/2010	10:27:13 PM	SiCl4 pre valve closed
3/11/2010	10:27:13 PM	SiCl4 post valve closed
3/11/2010	10:27:13 PM	Main Vac valve closed
3/11/2010	10:27:13 PM	Bubbler valve closed
3/11/2010	10:27:13 PM	Bypass valve opened
3/11/2010	10:27:13 PM	Helium MFC set to  0.000000
3/11/2010	10:27:13 PM	H2 MFC set to  0.000000
3/11/2010	10:27:13 PM	BCl3 MFC set to  0.000000
3/11/2010	10:27:13 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:27:13 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:27:13 PM	Tube furnace set to 0
3/11/2010	10:27:35 PM	Helium valve closed
3/11/2010	10:27:35 PM	H2 valve closed
3/11/2010	10:27:35 PM	BCl3 valve closed
3/11/2010	10:27:35 PM	PH3 valve closed
3/11/2010	10:27:36 PM	SiCl4 pre valve closed
3/11/2010	10:27:36 PM	SiCl4 post valve closed
3/11/2010	10:27:36 PM	Bubbler valve closed
3/11/2010	10:27:36 PM	Main Vac valve opened
3/11/2010	10:27:36 PM	Bypass valve opened
3/11/2010	10:27:36 PM	Helium MFC set to  0.000000
3/11/2010	10:27:36 PM	H2 MFC set to  0.000000
3/11/2010	10:27:36 PM	BCl3 MFC set to  0.000000
3/11/2010	10:27:36 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:27:36 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:27:36 PM	Tube furnace set to 0
3/11/2010	10:32:36 PM	Helium valve closed
3/11/2010	10:32:36 PM	H2 valve closed
3/11/2010	10:32:36 PM	BCl3 valve closed
3/11/2010	10:32:36 PM	PH3 valve closed
3/11/2010	10:32:36 PM	SiCl4 pre valve closed
3/11/2010	10:32:36 PM	SiCl4 post valve closed
3/11/2010	10:32:36 PM	Bubbler valve closed
3/11/2010	10:32:36 PM	Main Vac valve opened
3/11/2010	10:32:36 PM	Bypass valve opened
3/11/2010	10:32:36 PM	Helium MFC set to  0.000000
3/11/2010	10:32:36 PM	H2 MFC set to  0.000000
3/11/2010	10:32:36 PM	BCl3 MFC set to  0.000000
3/11/2010	10:32:36 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:32:36 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:32:36 PM	Tube furnace set to 0
3/11/2010	10:32:37 PM	Run finished at 10:32 PM
3/11/2010	10:43:47 PM	Bypass valve closed
3/11/2010	10:43:47 PM	Main Vac valve closed
3/11/2010	10:44:05 PM	Bypass valve opened
3/11/2010	10:44:05 PM	Main Vac valve opened
3/11/2010	10:45:39 PM	Recipe started at 10:45 PM
3/11/2010	10:45:39 PM	Helium valve closed
3/11/2010	10:45:39 PM	BCl3 valve closed
3/11/2010	10:45:39 PM	PH3 valve closed
3/11/2010	10:45:39 PM	SiCl4 pre valve closed
3/11/2010	10:45:39 PM	SiCl4 post valve closed
3/11/2010	10:45:39 PM	Main Vac valve closed
3/11/2010	10:45:39 PM	Bypass valve closed
3/11/2010	10:45:39 PM	Bubbler valve closed
3/11/2010	10:45:39 PM	H2 valve opened
3/11/2010	10:45:39 PM	Helium MFC set to  0.000000
3/11/2010	10:45:39 PM	H2 MFC set to  500.000000
3/11/2010	10:45:39 PM	BCl3 MFC set to  0.000000
3/11/2010	10:45:39 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:45:39 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:45:39 PM	Tube furnace set to 0
3/11/2010	10:47:04 PM	Helium valve closed
3/11/2010	10:47:04 PM	BCl3 valve closed
3/11/2010	10:47:04 PM	PH3 valve closed
3/11/2010	10:47:04 PM	SiCl4 pre valve closed
3/11/2010	10:47:04 PM	SiCl4 post valve closed
3/11/2010	10:47:04 PM	Main Vac valve closed
3/11/2010	10:47:04 PM	Bypass valve closed
3/11/2010	10:47:04 PM	H2 valve opened
3/11/2010	10:47:04 PM	Bubbler valve opened
3/11/2010	10:47:04 PM	Helium MFC set to  0.000000
3/11/2010	10:47:04 PM	H2 MFC set to  500.000000
3/11/2010	10:47:04 PM	BCl3 MFC set to  0.000000
3/11/2010	10:47:04 PM	SiCl4 MFC set to  0.000000
3/11/2010	10:47:04 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	10:47:04 PM	Tube furnace set to 0
3/11/2010	11:07:04 PM	Helium valve closed
3/11/2010	11:07:04 PM	PH3 valve closed
3/11/2010	11:07:04 PM	Main Vac valve closed
3/11/2010	11:07:04 PM	Bypass valve closed
3/11/2010	11:07:04 PM	H2 valve opened
3/11/2010	11:07:04 PM	BCl3 valve opened
3/11/2010	11:07:04 PM	SiCl4 pre valve opened
3/11/2010	11:07:04 PM	SiCl4 post valve opened
3/11/2010	11:07:04 PM	Bubbler valve opened
3/11/2010	11:07:04 PM	Helium MFC set to  0.000000
3/11/2010	11:07:04 PM	H2 MFC set to  500.000000
3/11/2010	11:07:04 PM	BCl3 MFC set to  35.000000
3/11/2010	11:07:04 PM	SiCl4 MFC set to  325.000000
3/11/2010	11:07:04 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:07:04 PM	Tube furnace set to 0
3/11/2010	11:27:05 PM	Helium valve closed
3/11/2010	11:27:05 PM	BCl3 valve closed
3/11/2010	11:27:05 PM	PH3 valve closed
3/11/2010	11:27:05 PM	SiCl4 pre valve closed
3/11/2010	11:27:05 PM	SiCl4 post valve closed
3/11/2010	11:27:05 PM	Main Vac valve closed
3/11/2010	11:27:05 PM	Bypass valve closed
3/11/2010	11:27:05 PM	H2 valve opened
3/11/2010	11:27:05 PM	Bubbler valve opened
3/11/2010	11:27:05 PM	Helium MFC set to  0.000000
3/11/2010	11:27:05 PM	H2 MFC set to  500.000000
3/11/2010	11:27:05 PM	BCl3 MFC set to  0.000000
3/11/2010	11:27:05 PM	SiCl4 MFC set to  0.000000
3/11/2010	11:27:05 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:27:05 PM	Tube furnace set to 0
3/11/2010	11:47:05 PM	H2 valve closed
3/11/2010	11:47:05 PM	BCl3 valve closed
3/11/2010	11:47:05 PM	PH3 valve closed
3/11/2010	11:47:05 PM	SiCl4 pre valve closed
3/11/2010	11:47:05 PM	SiCl4 post valve closed
3/11/2010	11:47:05 PM	Main Vac valve closed
3/11/2010	11:47:05 PM	Bypass valve closed
3/11/2010	11:47:05 PM	Helium valve opened
3/11/2010	11:47:05 PM	Bubbler valve opened
3/11/2010	11:47:05 PM	Helium MFC set to  500.000000
3/11/2010	11:47:05 PM	H2 MFC set to  0.000000
3/11/2010	11:47:05 PM	BCl3 MFC set to  0.000000
3/11/2010	11:47:05 PM	SiCl4 MFC set to  0.000000
3/11/2010	11:47:05 PM	Bypass solenoid MFC set to  0.000000
3/11/2010	11:47:05 PM	Tube furnace set to 0
